Abstract: A ferroelectric material includes a mixed crystal having AlN and at least one nitride of a transition metal. The proportion of the nitride of the transition metal is selected such that a direction of an initial or spontaneous polarity of the ferroelectric material is switchable by applying a switchover voltage. The switchover voltage is below a breakdown voltage of the ferroelectric material.

Abstract: A MEMS switch includes: a housing, a switching assembly; a first actuation electrode, a first contact, a second contact, and a second actuation electrode. The switching device has a stress gradient along the thickness direction, such that in response to applying no voltage between the first actuation electrode and the second actuation electrode, the switching assembly contacts with the first contact. In response to applying a first voltage between the third actuation electrode and the fourth actuation electrode, the switching assembly is driven to deflect such that the switching assembly is spaced apart from both the first contact and the second contact. In response to applying a second voltage between the third actuation electrode and the fourth actuation electrode, the switching assembly is driven to deflect such that the switching assembly contacts with the second contact. The first voltage is smaller than the third voltage.

Abstract: Apparatuses and method are described to create an energy harvesting microstructure, referred to herein as a transduction micro-electro mechanical system (T-MEMS). A T-MEMS includes a substrate, a first buckled membrane, the first buckled membrane has a buckling axis and is connected to the substrate. The first buckled membrane further includes a transduction material, a first conductor, the first conductor is applied to a first area of the transduction material; and a second conductor, the second conductor is applied to a second area of the transduction material, wherein electrical charge is harvested from the transduction material when the first buckled membrane is translated along the buckling axis.

Abstract: An opening switch for a vehicle having a decorative cover assembly, a sensor housing region, and a microelectromechanical (MEMS) sensor mounted in the sensor housing region. The decorative cover assembly has an inner surface, an outer surface, an anchor portion, and a deflection portion. When contact from a vehicle user occurs at the deflection portion in the decorative cover assembly, a microdeflection occurs. The microdeflection has a microdeflection apex, and the microdeflection apex is spaced from other surfaces in the sensor housing region when the contact from the user occurs at the deflection portion in the decorative cover assembly. The MEMS sensor is configured to generate an output signal that is indicative of a force of the contact from the user. The force integrated switch can include haptic feedback and/or backlighting.

Abstract: A solid electrolyte capacitor includes a sintered body formed by sintering a molded body containing a metal powder; and a solid electrolyte layer disposed on the sintered body, wherein the solid electrolyte layer includes a first layer containing an electrolytic polymerization conductive polymer disposed on the sintered body and a second layer containing a chemical polymerization conductive polymer disposed on the first layer.

Abstract: A radio frequency, RF, switch circuit (201, 301, 401, 501, 601, 701, 751, 801) includes at least one first PiN diode device (252, 352, 452, 552, 652, 752, 852, 945) configured to sink or source a first alternating current; and an impedance inversion circuit (222, 322, 422, 522, 622, 722, 822, 922), connected to the at least one first PiN diode device and arranged to provide a transformed impedance between a first side of the impedance inversion circuit and a second side of the impedance inversion circuit. The RF switch further includes a second diode-based device (254, 354, 454, 554, 654, 754, 854, 945) configured to source or sink a second alternating current; and a bias circuit (330, 430, 530, 630, 830, 930) connected to at least one of the at least one first PiN diode device and the second diode-based device, wherein the at least one first PiN diode device cooperates with the second diode-based device as a push-pull current circuit.

Abstract: Provided is an electrostatic drive switch, which includes a source plate to which a voltage for driving the electrostatic drive switch is applied and a drain electrode spaced apart from the source plate. The source plate includes a source electrode and an elastic part connected to the source electrode, and a first material and a second material having lower hardness than the first material are provided on the source electrode. When the source electrode and the drain electrode are electrically connected to each other by the voltage, the second material is brought into contact with the drain electrode by the elastic part after the first material is brought into contact with the drain electrode by the elastic part.

Abstract: The present disclosure generally relates to the design of a MEMS ohmic switch which provides for a low-impact landing of the MEMS device movable plate on the RF contact and a high restoring force for breaking the contacts to improve the lifetime of the switch. The switch has at least one contact electrode disposed off-center of the switch device and also has a secondary landing post disposed near the center of the switch device. The secondary landing post extends to a greater height above the substrate as compared to the RF contact of the contact electrode so that the movable plate contacts the secondary landing post first and then gently lands on the RF contact. Upon release, the movable plate will disengage from the RF contact prior to disengaging from the secondary landing post and have a longer lifetime due to the high restoring force.

Abstract: A ferromagnetic actuator is disposed between first and second semiconductor devices that include first and second inductors. Each inductor is disposed on top of a multilevel wiring structure. Current flows through the first inductor to generate a first magnetic field that attracts the ferromagnetic actuator towards the first inductor causing the ferromagnetic actuator to transition from a first state to a second state. In the second state, a portion of the ferromagnetic actuator is disposed closer to the first inductor than it is in the first state. Current flows through the second inductor to generate a second magnetic field that attracts the ferromagnetic actuator towards the second inductor causing the ferromagnetic actuator to transition from the first or second state to a third state. In the third state, a portion of the ferromagnetic actuator is disposed closer to the first inductor than it is in the first state.

Abstract: A semiconductor device including control switches enabling a semiconductor die in a stack of semiconductor die to send or receive a signal, while electrically isolating the remaining die in the die stack. Parasitic pin cap is reduced or avoided by electrically isolating the non-enabled semiconductor die in the die stack.

Abstract: An electrostatic protection device includes: a first conductive layer, a second conductive layer and a polarization film layer, in which the polarization film layer is disposed between the first conductive layer and the second conductive layer and formed of a piezoelectric material which is capable of deforming when applied with electricity; a conductive cantilever, disposed on the second conductive layer and including a free end; and a charge diffusion layer, disposed at a side of the conductive cantilever away from the polarization film layer, electrically connected with the first conductive layer and spaced apart from the conductive cantilever, in which upon a voltage difference between the first conductive layer and the second conductive layer reaching a predetermined value, the polarization film layer deforms to allow the conductive cantilever to connect with the charge diffusion layer.

Abstract: The present disclosure generally relates to a mechanism for making a MEMS switch that can switch large electrical powers. Extra landing electrodes are employed that provide added electrical contact along the MEMS device so that when in contact current and heat are removed from the MEMS structure close to the hottest points.

Abstract: The present disclosure generally relates to a MEMS device for reducing ESD. A contacting switch is used to ensure that there is a closed electrical contact between two electrodes even if there is no applied bias voltage.

Abstract: A planer silicon-based displacement amplification structure and a method are provided for latching the displacement. The displacement amplification structure may include a first actuation beam and a second actuation beam coupled to the first beam with an angle, the ends of the first beam and the second beam coupled to fixture sites, and an end of the second beam coupled to a motion actuator; a motion shutter coupled to an opposing end of the first and second beams; and a latching thermoelectric displacement structure blocking the shutter return path and have faster response than the shutter structure.

Abstract: A display device includes a display region including a plurality of first regions, and a plurality of second regions arranged with a certain gap between the plurality of first regions, wherein each of the plurality of first regions includes a transistor, a first organic layer, a wiring, a first organic insulating layer on the wiring and the transistor, a display element on the first organic insulating layer, a first sealing layer on the display element and stacked in order with a first inorganic insulating layer, a second organic insulating layer and a second inorganic insulating layer, each of the plurality of second regions includes the wiring, a second organic layer on the wiring, a second sealing layer stacked in order with the first inorganic insulating layer and the second inorganic insulating layer, and a thickness of the second organic layer is smaller than the thickness of the first organic layer.

Abstract: Device and method of forming the device are disclosed. The method includes providing a substrate prepared with a complementary metal oxide semiconductor (CMOS) region and a sensor region. A substrate cavity is formed in the substrate in the sensor region, the substrate cavity including cavity sidewalls and cavity bottom surface and a membrane which serves as a substrate cavity top surface. The cavity bottom surface includes a reflector. The method also includes forming CMOS devices in the CMOS region, forming a micro-electrical mechanical system (MEMS) component on the membrane, and forming a back-end-of-line (BEOL) dielectric disposed on the substrate having a plurality of interlayer dielectric (ILD) layers. The BEOL dielectric includes an opening to expose the MEMS component. The opening forms a BEOL cavity above the MEMS component.

Abstract: An induction heating cooker includes at least one burner including a coil; a handling portion provided in a predetermined area separated from the burner, and including an input section for receiving a user's control and a first display for displaying information corresponding to the user's control; at least one second display provided in an area separated from the handling portion; and a controller configured to control the second display to display cooking information about the burner.

Abstract: A liquid atomization circuit for controlling a spray module that atomizes liquids is provided. The liquid atomization circuit includes a driving unit and a control unit. The driving unit can output a driving voltage so as to drive the spray module directly. The control unit is coupled to the driving unit to drive the driving unit so that the driving unit outputs a driving voltage. The spray module includes a first lead and a second lead. The first lead is coupled to the driving unit, and the second lead is coupled to the control unit. The control unit can output a predetermined voltage to the spray module.

Abstract: According to one aspect of the invention, there is proposed a capacitive radiofrequency MicroElectroMechanical System or capacitive RF MEMS comprising a metallic membrane suspended above an RF transmission line and resting on ground planes, and exhibiting a lower face, an upper face opposite to the lower face and a first layer comprising a refractory metallic material at least partially covering the upper face of the membrane so as to prevent the heating of the membrane.

Abstract: Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are provided. The method of forming a MEMS structure includes forming fixed actuator electrodes and a contact point on a substrate. The method further includes forming a MEMS beam over the fixed actuator electrodes and the contact point. The method further includes forming an array of actuator electrodes in alignment with portions of the fixed actuator electrodes, which are sized and dimensioned to prevent the MEMS beam from collapsing on the fixed actuator electrodes after repeating cycling. The array of actuator electrodes are formed in direct contact with at least one of an underside of the MEMS beam and a surface of the fixed actuator electrodes.

Abstract: The present invention generally relates to a mechanism for making the anchor of the MEMS switch more robust for current handling. The disclosure includes a modified leg and anchor design that allows for larger currents to be handled by the MEMS switch.

Abstract: An approach includes a method of fabricating a switch. The approach includes forming a first cantilevered electrode operable to directly contact a second fixed electrode upon an application of a voltage to a first fixed electrode, forming a second cantilevered electrode with an end that overlaps the first cantilevered electrode, and forming a hermetically sealed volume encapsulating the first fixed electrode, the second fixed electrode, the first cantilevered electrode, and the second cantilevered electrode.

Abstract: A laser activated initiation device including: a piezoelectric element; a capacitor; a self-powered acceleration pulse event detection with false trigger protection circuit; a switch reset circuit; and a switching circuit; wherein when the piezoelectric element is subjected to an acceleration pulse the piezoelectric element generates an open-circuit charge profile to charge the capacitor.

Abstract: A multi resonator system is provided including a support substrate and a plurality of multi resonators. Each of the plurality of multi resonators includes a plurality of resonators, and one end of each of the plurality of resonators is fixed to the support substrate. Center frequencies of different ones of the plurality of multi resonators are different from each other, and the plurality of resonators within each individual multi resonator all have a same center frequency.

Abstract: A radio frequency switch system includes a plurality of radio frequency switch circuitries that each include a switch branch coupled between a first branch terminal and a second branch terminal and are configured to allow passage of a radio frequency signal through the switch branch in an on-state and to block the radio frequency signal from passing through the switch branch in an off-state in response to a control signal applied to a branch control terminal of the switch branch. Also included is a switch controller configured to apply the control signal to the branch control terminal of the switch branch of each of the plurality of radio frequency switch circuitries, wherein the control signal has a first voltage level that places the switch branch in the on-state and a second voltage level that places the switch branch in the off-state without digital signal decoding of the control signal.

Abstract: A microelectromechanical device is disclosed and described. The microelectromechanical device can include a base having a raised support structure. The microelectromechanical device can also include a biasing electrode supported by the base. The microelectromechanical device can further include a displacement member supported by the raised support structure. The displacement member can have a movable portion extending from the raised support structure and spaced from the biasing electrode by a gap. The movable portion can be movable relative to the base by deflection of the displacement member. The displacement member can also have a piezoelectric material associated with the movable portion. In addition, the microelectromechanical device can include a voltage source electrically coupled to the piezoelectric material and the biasing electrode.

Abstract: An apparatus having an optical structure and ridges is described, wherein the ridges connect the optical structure to a supporting structure and wherein the optical structure is able to perform a movement in relation to a reference plane.

Abstract: A micro-electromechanical-system (MEMS) switch (1) is formed in a substrate (2) and includes a first RF signal line (3) and a second RF signal line (4), a deformable membrane (5), an activator (7) configured to deform the membrane (5), a substrate track, and a membrane track. The RF signal lines (3, 4) are connected by one of the membrane track and the substrate track. A membrane RF ground (9, 10) is integrated into the membrane (5), and the membrane RF ground is electrically connected to a substrate RF ground (11, 12, 3, 14), the membrane RF ground framing and being formed parallel to at least one among the membrane track (8) and the substrate track, such that the RF ground (9, 10) closely follows the RF signal path, in order to guide the propagation of the RF signal of the first RF signal line (3) to the second RF signal line (4) when the switch is in the on state.

Abstract: A MEMS switch contains an RF electrode 102, pull-down electrodes 104 and anchor electrodes 108 located on a substrate 101. A plurality of islands 226 are provided in the pull-down electrode and electrically isolated therefrom. On top of the RF electrode is the RF contact 206 to which the MEMS-bridge 212, 214 forms an ohmic contact in the pulled-down state. The pull-down electrodes 104 are covered with a dielectric layer 202 to avoid a short-circuit between the bridge and the pull-down electrode. Contact stoppers 224 are disposed on the dielectric layer 202 at locations corresponding to the islands 226, and the resulting gap between the bridge and the dielectric layer in the pulled-down state reduces dielectric charging. In alternative embodiments, the contact stoppers are provide within the dielectric layer 202 or disposed on the islands themselves and under the dielectric layer. The switch provides good controllability of the contact resistance of MEMS switches over a wide voltage operating range.

Abstract: The present invention generally relates to a MEMS DVC utilizing one or more MIM capacitors. The MIM capacitor may be disposed between the MEMS device and the RF pad or the MIM capacitor may be integrated into the MEMS device itself. The MIM capacitor ensures that a low resistance for the MEMS DVC is achieved.

Abstract: Embodiments in accordance of a torsional resonant sensor disclosure is configured to actuate a beam structure using electrostatic actuation with an AC harmonic load (e.g., AC and DC voltage sources) that is activated upon detecting a particular agent having a mass above a predefined level. In various embodiments, the beam structure may be different types of resonant structures that is at least partially coated or layered with a selective material.

Abstract: Disclosed is a microelectromechanical systems (MEMS) logic gate with a first logic MEMS switch having a first beam with a first switch contact, a first gate, and a first terminal contact, wherein the first beam is coupled to a fixed higher voltage node. The MEMS logic gate also includes a second logic MEMS switch having a second beam with a second switch contact, a second gate, and a second terminal contact, wherein the second beam is electrically coupled to a fixed lower voltage node. Further included is internal logic gate circuitry having a first input terminal and a first output terminal, wherein the internal logic gate circuitry is electrically coupled between the first terminal contact of the first logic MEMS switch and the second terminal contact of the second logic MEMS switch.

Abstract: A laser imaging system and method. In an example embodiment, one or more laser diode arrays are associated with a digital micro-mirror device. A shutter-like device can be positioned upstream in the light path of the laser diode array (or arrays) such that the shutter-like device diverts energy out of the laser imaging system and away from the digital micro-mirror device during periods of extended non-imaging. A homogenizer module can be provided wherein the shutter-like device is located.

Abstract: The present invention is directed to switch device disposed in a housing with a back body portion, the device includes a switch actuator having a user-accessible surface, the user accessible surface includes an indicator element and an interior channel optically coupled to the indicator element. A light emitting portion is disposed within the interior channel and optically coupled to the indicator element so that the interior channel moves relative to the light emitting portion when the switch actuator moves between the first actuator position and the second actuator position. The light emitting portion is optically coupled to the indicator element when the interior channel moves relative to the lighting portion. A modular lighting assembly is removably coupled to the back body portion at a fixed position so that a light emitting portion of the modular lighting assembly is disposed within the interior channel and optically coupled to the indicator element.

Abstract: A non-aqueous lithium-type power storage element obtained by a non-aqueous liquid electrolyte and an electrode laminate having a negative electrode body, a positive electrode body, and a separator being accommodated in an exterior body, wherein: the negative electrode body includes a negative electrode current collector and a negative electrode active material including a carbon material capable of occluding and releasing lithium ions.

Abstract: In accordance with various embodiments of the present invention, mechanical systems incorporating movable microelectromechanical (MEMS)-based features, e.g., cantilevers or suspended micron- and submicron-scale beams are utilized to secure solid-state devices such as controllers, microcontrollers, central processing units (CPUs), solid-state storage drives, and memory cards. In various embodiments of the invention, the beams are double-clamped, initially curved (or “pre-buckled”) segments that are provided within the solid-state device (e.g., on the top layer thereof) prior to encapsulation and packaging of the device.

Abstract: The present application is directed to a MEMS device. The MEMS device includes a substrate having a first end and a second end extending along a longitudinal axis, the substrate including an electrostatic actuator. The device also includes a movable plate having a first end and a second end. The device also includes a thermal actuator having a first end coupled to the first end of the substrate and a second end coupled to the first end of the plate. The actuator moves the plate in relation to the substrate. Further, the device includes a power source electrically coupled to the thermal actuator and the substrate. The application is also directed to a method for operating a MEMS device.

Abstract: An electrostatic actuator, including a base section, a movable electrode section to be displaceable in a predetermined direction with respect to the base section, and a plurality of fixed electrodes fixed to the base section to be separated from the movable electrode section along a movable direction of the movable electrode section and face the movable electrode section. Further, the plurality of fixed electrodes are electrically separated from each other. The electrostatic actuator is driven in accordance with a drive voltage selectively applied to the plurality of fixed electrodes and a voltage value of the drive voltage.

Abstract: This disclosure relates to systems that include a substrate and a platform connected to the substrate by at least one flexure hinge. The platform is movable relative to the substrate. The systems also include at least one position sensor having a plurality of piezoresistive elements that are connected to one another so as to form an electrical bridge. One of the piezoresistive elements of the plurality of piezoresistive elements is positioned on the at least one flexure hinge. At least one other piezoresistive element of the plurality of piezoresistive elements is positioned on at least one of the substrate and the platform.

Abstract: A vehicle-use alternating current generator regulator includes an IC regulator wherein an IC chip is sealed with resin and a lead terminal for external connection protrudes from a sealing resin, and a regulator holder having a lead opposing portion that encloses an IC regulator mounting portion in which the IC regulator is mounted. A configuration is such that the lead terminal has a lead protruding portion protruding from a contact with the regulator holder, and the IC regulator is positioned by the lead protruding portion being fitted into the lead opposing portion of the regulator holder.

Abstract: Embodiments of the invention provide apparatus, systems and methods for harvesting energy from bio-kinetic events to power various implanted medical devices. One embodiment provides an energy harvesting mechanism for a cardiac pacemaker comprising an energy converter and a signal path component. The energy converter is positionable inside a human body and configured to generate electric power signals in response to a bio-kinetic event of the human body such as a heart beat, respiration or arterial pulse. The converter can comprise a piezoelectric material which generates electricity in response to mechanical deformation of the converter. The converter can also have a power generation characteristic that is matched to the frequency of the bio-kinetic event. For heart beat powered applications, the power generation characteristic can be matched to the physiologic range of pulse rates.

Abstract: A method for forming electrical contacts on a semiconductor substrate is disclosed. The method includes forming a first metal layer over the substrate, and forming a layer of a second metal oxide by sputter deposition of a second metal in an oxygen environment. In some embodiments, the second metal oxide may be ruthenium dioxide, and the first metal layer may be gold, copper, platinum, silver or aluminum.

Abstract: The present disclosure provides for a microelectromechanical switch including a first port (e.g., input port), one or more second ports (e.g., output ports), a cantilever beam, and a mechanical spring connected to the cantilever beam for providing a mechanical force to move the cantilever beam. The cantilever beam extends from a first end, which is in contact with either the first port or one of the second ports, to a second end that is switchably connectable to the other of the first port or said one of the second ports. The first and second ports and cantilever beam may be formed in a coplanar waveguide.

Abstract: An assembly that includes a printed circuit board having an air gap, and a method of fabricating the assembly is disclosed. The assembly includes at least one air gap. This air gap is created by using a soluble material during the PCB assembly process. The soluble material can preferably be processed in accordance with traditional PCB fabrication processes. For example, other materials can be bonded to the soluble material. Additionally, the soluble material is capable of withstanding a drilling process. After the PCB assembly is complete, the soluble material is then dissolved, leaving an air gap where the soluble material once existed. This assembly may be useful in configurations where an antenna, EBG material or other electronic structure is to be disposed above the top surface of the printed circuit board.

Abstract: Systems and apparatuses are provided for increasing the possible force and/or travel generated in MEMS devices. For example, comb fingers may be utilized to form a strain actuator to generate larger forces. As another example, the force advantage of a parallel plate actuator is leveraged while also leveraging the travel advantage of comb drives to increase force and/or travel capable of being generated. The systems and apparatuses disclosed may utilize one or more comb drives operationally attached to one or more flexures and/or frames.

Abstract: The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.

Abstract: Deep via technology is used to construct an integrated silicon cantilever and cavity oriented in a vertical plane which creates an electrostatically-switched MEMS switch in a small wafer area. Another embodiment is a small wafer area electrostatically-switched, vertical-cantilever MEMS switch wherein the switch cavity is etched within a volume defined by walls grown internally within a silicon substrate using through vias.

Abstract: The present disclosure generally relates to a MEMS DVC utilizing one or more MIM capacitors located in the anchor of the DVC and an Ohmic contact located on the RF-electrode. The MIM capacitor in combination with the ohmic MEMS device ensures that a stable capacitance for the MEMS DVC is achieved with applied RF power.

Abstract: The present disclosure provides methods of fabricating a micro-electro-mechanical systems (MEMS) switch. The methods include providing a substrate, forming a first dielectric layer disposed above the substrate, forming a bump above the first dielectric layer, providing a movable member including a top actuation electrode, and forming at least one support member that includes the first dielectric layer and is directly below the top actuation electrode. The top actuation electrode is electrically coupled to the bump.

Abstract: Devices and methods of operating partitioned actuator plates to obtain a desirable shape of a movable component of a micro-electro-mechanical system (MEMS) device. The subject matter described herein can in some embodiments include a micro-electro-mechanical system (MEMS) device including a plurality of actuation electrodes attached to a first surface, where each of the one or more actuation electrode being independently controllable, and a movable component spaced apart from the first surface and movable with respect to the first surface. Where the movable component further includes one or more movable actuation electrodes spaced apart from the plurality of fixed actuation electrodes.