Abstract: A diaphragm valve includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; and a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member. A housing is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member. A humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing. The diaphragm valve is capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm.

Abstract: A valve cavity cap arrangement including an insert and a threaded cap is provided in combination with a valve body defining a valve cavity, a central passage, and at least one offset passage. The insert is received in the valve cavity and includes an inner annular sealing surface sized to seal against a portion of the recessed surface surrounding the central passage, an outer annular sealing surface sized to seal against an outer periphery of the recessed surface, surrounding the offset passage(s), and a solid web portion extending between the inner and outer annular sealing surfaces. The threaded cap includes an outer threaded portion threadably engaged with an internal threaded portion of the valve cavity, a central end portion configured to apply a first sealing force to the inner annular sealing surface, and an outer end portion configured to apply a second sealing force to the outer annular sealing surface.

Abstract: Technologies are described for devices and methods to determine a position of a valve. The devices may comprise a housing attached to an actuator. The actuator may be in physical communication with the valve. The devices may comprise a microcontroller within the housing. The microcontroller may be in communication with the actuator to control a position of the valve. The devices may comprise a position sensor module in communication with the microcontroller. The devices may comprise a position sensor target attached to at least one part of the actuator that moves. The position sensor module may be configured to detect movement and a position of the position sensor target, generate position data related to the position of the position sensor target, and transmit the position data to the microcontroller. The microcontroller may be configured to determine a position of the valve based on the position data.

Abstract: A diaphragm 30 includes a fixed portion 32 to be fixed to a body portion 10, and a flexible thin film portion 33 integrally connected to the fixed portion 32. The fixed portion 32 has a tubular press-fitting portion 34 to be press-fitted into a tubular sealing groove 15 formed on the body portion 10, and a diaphragm-side tapered surface 38 formed on an axis C side with respect to the press-fitting portion 34. In a state where the press-fitting portion 34 is press-fitted into the sealing groove 15, an inclination angle ?1 of the diaphragm-side tapered surface 38 relative to the axis C is smaller than an inclination angle ?2 of a body-side tapered surface 18 formed on the body portion 10 relative to the axis C, and an end portion 38a of the diaphragm-side tapered surface 38 is brought into contact with the body-side tapered surface 18.

Abstract: Technologies are described for a diaphragm. The diaphragm may comprise a structure. The structure may be a disc shape with a top and bottom side. The top and bottom sides may be circular in outline. The diaphragm may comprise a diaphragm stud at a center point on the top side. The diaphragm stud may be configured to couple with a connector of a bonnet assembly. The diaphragm may comprise a diaphragm bead on the bottom side. The diaphragm bead may be along a first axis. The diaphragm may comprise at least one tab which may extend radially from the structure along at an outer edge of the structure. The at least one tab may engage with a bonnet notch of a bonnet assembly to align the diaphragm to the bonnet assembly.

Abstract: A fluid handling device, comprising: a substrate including a first channel, a second channel and a partition wall formed between the first channel and the second channel; a film including a diaphragm, the film being disposed on the substrate so that the diaphragm faces the partition wall; and a sliding member slidable on the film while contacting with the film, the sliding member including a protrusion formed on an underside thereof, and the sliding member being disposed on the film with the underside facing the film, wherein: the sliding member is capable of switching between a first state and a second state by sliding on the film, wherein the protrusion is positioned so as not to face the partition wall with the diaphragm therebetween in the first state, and the protrusion is positioned so as to face the partition wall with the diaphragm therebetween in the second state.

Abstract: A valve device with a built-in orifice is manufacturable with low-cost. The valve body defines an accommodation recess which opens at the surface of the valve body and contains a valve element therein, a primary flow path and a secondary flow path connected to the accommodation recess, the valve element having a sealing portion for blocking direct communication between the primary flow path and the secondary flow path through the accommodation recess, and a through flow passage for making the primary flow path and the secondary flow path communicate through the valve element, wherein an orifice is formed in the through flow passage.

Abstract: Example embodiments relate to microfluidic devices for controlling pneumatic microvalves. One embodiment includes a microfluidic device for independently controlling a plurality of pneumatic microvalves. The microfluidic device is couplable to a pressure source. The microfluidic device includes a first substrate. The microfluidic device also includes a flexible membrane covering the first substrate. Additionally, the microfluidic device includes a second substrate covering the flexible membrane. Further, the microfluidic device includes one or more fluidic channels at least partially defined in the first substrate. In addition, the microfluidic device includes a pressure couplable to the pressure source and branching into a plurality of pressure channels. Still further, the microfluidic device includes at least one pressure control switch per pressure channel.

Abstract: A valve device includes a valve body; a valve seat; an inner disk made of a metal alloy having an inner annular portion, outer annular portion and a connecting portion that connects the inner annular portion and the outer annular portion; a diaphragm made of a metal alloy covering the inner disk and the valve seat and moving between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat to enable and shuts off communication between the first flow path and the second flow paths; and a presser adapter that presses a peripheral edge portion of the diaphragm toward the outer annular portion; and the inner disk has a hardness higher than the valve seat and lower than both the valve body and the diaphragm.

Abstract: An electrical valve, comprising: a valve body component, the valve body component comprising a valve body and a valve cover body, the valve cover body being fixedly connected to the valve body; a valve seat component, the valve seat component comprising a valve seat body and a valve seat core, the valve seat body being fixedly connected to the valve body, the valve seat core being sleeved with a valve port protective sleeve. Due to a structurally optimised design, the electrical valve has a compact overall structure and a small size, and the positional accuracy between various functional parts is easily ensured, thereby increasing the reliability of the valve seat core.

Abstract: A fluid controller is provided having a flow path through which a fluid can flow, a closed space separated from the flow path by an isolation member, and a leak port capable of communicating the closed space with an external part. An anomaly detection device for detecting an anomaly has a pressure sensor detachably fixed to the leak port, a pressure sensor for detecting the pressure in the closed space, a processing module for executing a predetermined information processing, and an detachable mechanism for blocking the leak port from the external part in the state of being fixed. The processing module determines an anomaly of the fluid controller by comparing a detection value detected by the pressure sensor to a predetermined threshold, and transmits a discrimination result of the anomaly of the fluid controller to a server.

Abstract: The invention relates to a flap arrangement for a turbine of a turbocharger, in particular for a wastegate valve of the turbine, having a spindle for mounting the flap arrangement in a rotatable manner in a turbine housing, having a lever arm, wherein the lever arm is coupled to the spindle, and having a flap disk, wherein the flap disk is coupled to the lever arm. At least part of the lever arm is configured elastically such that applying a closing force to the flap arrangement, when the flap disk is in contact with a flap seat in the turbine housing, provides for relative movement of the flap disk in relation to the spindle, in order to compensate for thermal deformation of the turbine housing and/or wear.

Abstract: A valve having a housing, a solenoid arranged in the housing, a pin movable by the solenoid, a piston connected to the pin, a second housing part that bears against the housing and which partially surrounds the piston, and a seal for sealing off the valve. The second housing part is composed of metal, and the seal, which seals off the valve, is arranged on that side of the second housing which faces toward the housing.

Abstract: In a diaphragm valve comprising a tubular valve seat, a primary side passage located outside the valve seat, a secondary side passage located inside the valve seat, and pressing member which presses the diaphragm to a seating surface to change a valve opening, a supporting member which contacts with the diaphragm in a valve opening range that is at least one part of an entire opening range from a fully opened state to a fully closed state to obstruct deformation of the diaphragm to the secondary side passage side is disposed in a region between the seating surface and a center of the seating surface. Thereby, even when a pressure difference between both sides of the diaphragm is large, a reduction of a gap at the seating surface can be prevented, and gas can be flowed at a large flow rate.

Abstract: A fluid control valve includes a cover portion and a body portion. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet. The upper surface of the flexible member has a substantially smooth wall portion. The flexible member has an inverted position in which the upper surface conforms to at least a portion of the inner surface of the cover portion to define a passageway that permits communication between the inlet and the outlet.

Abstract: A fluid control valve includes a cover portion and a body portion. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet. The upper surface of the flexible member has a substantially smooth wall portion. The flexible member has an inverted position in which the upper surface conforms to at least a portion of the inner surface of the cover portion to define a passageway that permits communication between the inlet and the outlet.

Abstract: A fluid control valve includes a cover portion having a first channel and a body portion having a second channel. Inner surfaces of the cover and the body portion define a chamber that includes an inlet and an outlet in communication with the chamber. The fluid control valve also includes a diaphragm disposed between the cover portion and the body portion. The diaphragm has a flexible member that is disposed within the chamber for controlling communication between the inlet and the outlet and a lip member circumscribing the flexible member. When the cover portion and the body portion are joined, the first channel and the second channel define a cavity that circumscribes the chamber and the cavity is configured such that each channel receives a portion of the lip member and pinches the lip member to seal the fluid control valve and hold the diaphragm.

Abstract: The valve series includes a plurality of valve types (A, B, C) with valves of different size and type, wherein a plurality of valve types, preferably all valves types (A, B, C) of the valve series (11) have uniform valve actuators (21), wherein the valve closure members (19) of the valves (10, 12, 13) perform the same opening stroke, wherein they can be formed differently, however, and in particular can have different diameters. The closing springs (20) of the different valve types (A, B, C) can also have different characteristic curves and can be of different thicknesses.

Abstract: A valve arrangement comprising a valve housing, a valve inlet, a valve outlet and a diaphragm assembly for controlling a fluid flow through the valve housing from the valve inlet to the valve outlet, the diaphragm assembly comprising a diaphragm and a diaphragm plate at least partially covering the diaphragm, the diaphragm comprising one or more equalization holes passing through the diaphragm and the diaphragm plate comprising one or more equalization openings passing through the diaphragm plate, the equalization holes being aligned with the equalization openings. The diaphragm assembly comprises an engagement zone engaging the diaphragm in order to rotationally fix the diaphragm and the diaphragm plate with respect to each other so that the equalization holes will keep aligned with the equalization openings to ensure proper function of the valve arrangement at all times.

Abstract: A diaphragm valve includes a valve body including a valve cavity and first and second ports, and a valve assembly disposed to seal the valve cavity. The valve assembly includes a valve seat, a seat carrier and a diaphragm, with the valve seat being retained with said seat carrier and disposed to surround the first port and including a flow passage in fluid communication with the first port. The seat carrier includes an annular body having an outer rim and a web that extends radially inward from the outer rim to a central opening, the central opening being aligned with the first port. The web includes a plurality of flow passages separated by lands about said central opening. Each land has a surface area that is less than a cross-sectional area of said second port so as to reduce obstruction of flow when the land overlays the second port.

Abstract: A channel control apparatus includes: a diaphragm portion displaceable between an opening position to open a channel and a closing position to close the channel; an abutment portion for moving in a first direction and a second direction opposite to the first direction by a driving source; and a gripping member that has an inclined surface portion for abutting against the abutment portion and grips the diaphragm portion, wherein when the abutment portion moves in the first direction, the gripping member displaces the diaphragm portion to the opening position by the abutment portion abutting against the inclined surface portion, and wherein when the abutment portion moves in the second direction, the gripping member displaces the diaphragm portion to the closing position by the abutment portion being separated from the inclined surface portion.

Abstract: The invention relates to a valve body including a membrane which cooperates with a valve seat, wherein the valve body and the membrane are connected to each other in the region of a laser weld seam in a bonded and fluid-tight manner.

Abstract: A diaphragm for a diaphragm valve comprises a base body made from an elastomer, the base body having a side facing towards the media and a side facing away from the media. A force transmission component is disposed at the base body on the side facing away from the media for the attachment of a spindle drive for a diaphragm valve. Furthermore, the base body has a reinforcement area, the reinforcement area being disposed on the outside of the base body on the side of the base body facing away from the media.

Abstract: A valve for controlling delivery of fluid includes a valve seat comprising a fluid inlet, a fluid outlet and a conical well having an opening, a beveled surface and a bottom, and a valve membrane comprising a conical potion having a base and a tip. The conical portion is configured to fit within the conical well of the valve seat. The valve membrane is configured to fluidly connect the fluid inlet to the fluid outlet when the valve membrane is in an undeformed position and fluidly disconnect the fluid inlet from the fluid outlet when the valve membrane is in a radially deformed position.

Abstract: A pressure control valve is provided with a pressure control block. The pressure control block has a pressure control block having an opening portion provided on one outer surface, a pressure control surface provided as a plane at a bottom portion of the opening portion, and two internal channels having openings at the respective end portions of the pressure control surface. A sheet-like valve body having elasticity and arranged so as to cover the pressure control surface is provided in the opening portion of the pressure control block. A valve body driving portion is provided on a side opposite to the pressure control surface with the valve body interposed therebetween that adjusts an amount of a gap between the valve body and the pressure control surface by pressing the valve body in a direction perpendicular to the pressure control surface. The pressure control surface has higher hardness than a hard material.

Abstract: An irrigation valve incorporates a valve body with an inlet, an outlet, a pressure chamber and a standpipe in fluid communication with the inlet. A solenoid operated valve train has a flow control inlet fitting, a solenoid actuating element movable between in inactivated position and an activated position responsive to a solenoid coil, and a threaded manual actuator rotatably movable between a first sealing position and a second open position. The valve train is operable in a first position with the solenoid actuating element in the inactivated position to produce hydraulic interconnection between the standpipe and the pressure chamber, a second position with the solenoid actuating element in the activated position producing hydraulic interconnection between the pressure chamber and an outlet port, and a third position with the threaded manual actuator in the second open position producing hydraulic interconnection between the pressure camber and the outlet port.

Abstract: A vehicle flooring system including a floor. A flooring component is positioned above the floor to define a gap. A drain assembly is coupled with the flooring component which includes a plug having a one-way valve and defining a plug opening. A drain defines a drain aperture to accept the plug. The drain defines a drain opening in alignment with the gap.

Abstract: A valve device (1) for a medical system comprises a valve housing (10), an inlet port (102) arranged on the valve housing (10), an outlet port (103) arranged on the valve housing (10), a flow duct (12) extending through the valve housing (10) connecting the inlet port (102) and the outlet port (103) to allow for a fluid flow (P) through the valve housing between the inlet port (102) and the outlet port (103), and a closure element (11) arranged on the valve housing (10) for selectively opening and closing the flow duct (12).

Abstract: A valve includes a valve mechanism capable of switching a communication state between a first port and a second port of a body. A diaphragm is held between a valve plug and a holder member, at a central portion of the valve mechanism. An outer marginal portion of the diaphragm is held between the body and the bonnet. A pilot channel through which a communication chamber in the body and a pilot chamber in the bonnet communicate with each other is formed in the valve plug. A first hole communicating with the pilot channel is formed at a central portion of the diaphragm. Pressurized fluid in the communication chamber flows into the pilot chamber through the pilot channel and the first hole to thereby bias the valve plug toward a valve seat, by the pressure of the pressurized fluid in combination with an elastic force of a spring.

Abstract: A diaphragm valve including an axially driven valve spindle provides a pressure member, which allows to directly couple the diaphragm to the valve spindle. The same pressure member may always be used for coupling, irrespectively of the type of fastener, which is integrated in the diaphragm.

Abstract: An oblong diaphragm valve has curved surfaces carved into faces of a body and a plate. The curved surfaces have an oblong shape and define an oval or egg-shaped valve chamber when the body and the plate are joined and secured to each other, with a diaphragm sandwiched there-between. An inlet and an outlet are defined in the curved surface of the body at opposite ends defined by a length of the valve chamber. A flow passage is defined in the curved surface of the plate and has an opening centrally located relative to the valve chamber for actuation of the diaphragm to close or open the oblong diaphragm valve with minimal or no stress, ensuring durability and longevity of the oblong diaphragm valve with increased precision, while reducing fluid waste and pressure spikes in pumping operations.

Abstract: Described is a method for manufacturing a diaphragm assembly through the use of injection molding. The method can avoid the use of PTFE as a chemically resistant coating. Further, the method can increase overall adherence of a polymer diaphragm to an insert through the use of an interference surface on at least the surface of a head of the insert.

Abstract: Provided is a diaphragm valve in which seat leak occurrence is drastically decreased. A depression 14 is provided at a radially middle part of a top of the seat 11. A first seal portion 17 is provided between a diaphragm 6 and a radially inward part 15 of the top of the seat 11. A second seal portion 18 is provided between a diaphragm 6 and a radially outward part 16 of the top of the seat 11. An outer circumferential surface 14b of the depression 14 has a cylindrical surface.

Abstract: A diaphragm valve includes a valve body, a valve assembly disposed to seal the valve cavity and including a diaphragm and a valve seat retained with a seat carrier, a threaded member assembled with the valve body, and a valve actuator assembled with the valve body and operable to move a surface of the diaphragm into and out of contact with the valve seat. The valve body includes a valve cavity, a first port and a second port, with the first port and the second port being open to the valve cavity. The threaded member includes an annular bead that directly contacts the diaphragm to apply a compressive load to the diaphragm against a first side of the seat carrier. The valve actuator is separate from the threaded member, and is removable from the valve body without removing the threaded member from the valve body.

Abstract: Provided is a diaphragm valve that is capable of increasing its flow rate and is capable of suppressing variation among the diaphragm valves in the flow rates. In a diaphragm valve 1, a fluid that has flown into the fluid inflow channel 2a enters a fluid outflow channel 2b via through holes 22a of a seat holder 5. On a bottom surface 13 of a depression 2c of a body 2, a seat receiving surface 13a that receives a seat 4 is flush with a seat-holder receiving surface 13b that receives a seat holder 5. In the bottom surface of the depression 2c of the body 2, an annular groove 14 facing through holes 22 of the seat holder 5 is formed.

Abstract: Provided is a fluid controller which enables precise flow-rate adjustment while securing the durability. The fluid controller includes a stem vertical-movement-amount upper-limit-value setting means 10 which sets an upper limit value of a vertical movement amount of a stem 8 associated with opening and closing operations. The fluid controller further includes a stem vertical-movement-amount fine-adjustment means 11 which changes the vertical movement amount of the stem 8 associated with the opening and closing operations, within a range of not greater than the upper limit value.

Abstract: The invention concerns a circuit comprising a bag (11) comprising two flexible films (45, 46) and a press (10) comprising a first (14) and a second (13) shell clamping the bag to form pipes having a passage and edges (41); the first shell comprising a valve (20) which comprises a movable member (24) and a pad (31), which pad has a resting configuration in which a second face (33) of the pad is concave and locally delimits a channel (18) and a pinching configuration in which the second face (33) is convex; said movable member and said pad being configured so that, when said valve is in closed position and said pad in pinching configuration, said passage is pinched by said movable member against said second shell channel and said edges (41) are pinched flat by said movable member against said second shell (13).

Abstract: An intermediate piece for a stop valve, in particular a membrane valve, for fluids including a pressure piece. The pressure piece has at least two locking slides for locking a locking member of a closure element. The intermediate piece includes a cylinder in which the pressure piece can be guided in axial manner. The intermediate piece has a recess, which is arranged in such a way that in mounting position of the pressure piece the locking slide can be shifted into the recess, thus releasing the locking member.

Abstract: The invention concerns a circuit comprising a bag (11) comprising two flexible films (45, 46) and a press (10) comprising a first (14) and a second (13) shell clamping the bag to form pipes having a passage and edges (41); the first shell comprising a valve (20) which comprises a movable member (24) and a pad (31), which pad has a resting configuration in which a second face (33) of the pad is concave and locally delimits a channel (18) and a pinching configuration in which the second face (33) is convex; said movable member and said pad being configured so that, when said valve is in closed position and said pad in pinching configuration, said passage is pinched by said movable member against said second shell channel and said edges (41) are pinched flat by said movable member against said second shell (13).

Abstract: A pressure relief valve having a housing with an inlet port, an outlet port and a curvilinearly extending housing interior sidewall that defines a flow passageway through the housing from the inlet port to the outlet port. A piston assembly that is moveable between a closed position to establish a fluid-tight seal between the inlet port and the outlet port, and an open position to permit fluidic flow of pressurized fluid from the inlet port to the outlet port. The piston assembly has a piston head having a parabolically shaped piston face and elliptical perimeter that, when the inlet piston assembly is moved to the open position, aligns with the housing interior sidewall to provide a continuous transition from a position immediately upstream of the piston to a position immediately downstream of the piston.

Abstract: Apparatus is provided featuring a spindle having extending spindle portions configured with spindle glands; a compressor having extending compressor portions configured with compressor glands, and a snap ring configured to engage the spindle glands and the compressor glands in order to attach the spindle and compressor together, so that the compressor may be quickly released from the spindle by releasing an engagement between the snap ring, the spindle glands and/or the compressor glands.

Abstract: A joint that connects pipelines, a pipeline with a fluid control device, or a pair of fluid control devices is provided therein with a pipe functional component. Examples of the pipe functional component include various valves such as a diaphragm valve, a check valve, a branch valve, a relief valve, a ball valve and a bellows valve, or a filter.

Abstract: A diaphragm valve has a valve housing and a valve member movable relative to said housing. The valve member includes a diaphragm carrier that can be driven to execute a switchover motion having a sealing diaphragm mounted thereon, which delimits a valve chamber in which a valve seat is found. The sealing diaphragm has a sealing section opposite said valve seat belonging at least partially to a loose diaphragm section of the sealing diaphragm, which can lift from the diaphragm carrier to reduce the stress on the sealing diaphragm when said diaphragm carrier is removed from the valve seat during switching.

Abstract: A membrane valve for fluid media, comprising a valve body, a membrane, a pressure piece, and a drive) for the pressure piece. The membrane is coupled to the pressure piece by a connecting element, having a wall which projects from the membrane in the direction of the pressure piece. A latching hook laterally protrudes from one side and a free space is provided on the other side such that the wall. The latch hook can be deflected in order to connect the latching hook to a corresponding receiving portion on the pressure piece. A stationary pin engages into the free space when the membrane is raised from the valve seat of the valve body and protrudes out of the free space when the membrane is resting on the valve seat.

Abstract: A microfluidic valve operable to semi-permanently close a channel of a microfluidic device defined between a thermoplastic elastomer (TPE) film and a substrate operates employs a surface contact bond between the TPE and a wall of the channel. Thermomechanical release of the valve, tristate functionality, and repeated semi-permanent closure and release are demonstrated.

Abstract: A valve body arrangement for a hydraulic or pneumatic valve comprises two elements between which a valve body is retained. The two elements are welded together in a first region, preferably by the laser transmission method, and clamp the valve body in a second region with a force.

Abstract: There is provided a fluid controller actuator which does not require a plurality of bolts for fixing an inner side spring presser to a casing, in which a configuration is simple and a biasing force of an biasing member can be adjusted from the outside after the assembly. An inner side spring presser includes a shaft portion and a cylinder portion provided at a lower edge portion of the shaft portion, and presses an upper side peripheral edge portion of a through hole of a biasing member by a lower end of the cylinder portion. The shaft portion penetrates an outer side spring presser and extends upwardly. An adjustment screw which positions the inner side spring presser as a lower end abuts against an upper surface of the shaft portion of the inner side spring presser, is screwed to a top wall of a casing.

Abstract: A two-way valve includes a valve body made of a resilient member and connected to a lower end of a shaft. The valve body is made up from a main body portion having an axial member connected to the shaft, and a thin film skirt portion formed on an outer circumferential side of the main body portion. An outer edge of the skirt portion is sandwiched and gripped between a small diameter part of a housing and a connector of a body. Further, lips that project in a downward direction are formed in a central portion of the main body portion. The lips are seated on a top portion of a partition wall in the body, so that the two-way valve is placed in a valve-closed state.

Abstract: A weir-type diaphragm valve includes a valve body having a spherically-shaped valve body sealing surface with a weir having a spherically-shaped weir sealing surface; and a diaphragm having a diaphragm sealing surface with a diaphragm weir sealing surface, the diaphragm responding to an applied force and providing sealing contact between the diaphragm weir sealing surface and the spherically-shaped weir sealing surface so as to stop the flow of fluid through a fluid flow channel of the valve body.

Abstract: A plasma reactor has an array of passages extending through its workpiece support pedestal from a bottom thereof that forms a two-dimensional array of openings in the support surface. The reactor further includes a plurality of optical fibers, each fiber extending through a respective one of the passages. Optical sensing apparatus is coupled to the output ends of the optical fibers and is responsive in the range of wavelengths. The reactor further includes a tunable element capable of changing a two-dimensional etch rate distribution across the surface of a workpiece supported on the pedestal, and a process controller connected to receive information from the optical sensing apparatus and to transmit control commands to the tunable element.