Non-single Crystal, Or Recrystallized, Material Containing Non-dopant Additive, Or Alloy Of Semiconductor Materials (e.g., Ge X Si 1- X, Polycrystalline Silicon With Dangling Bond Modifier) Patents (Class 257/65)
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Patent number: 12074036Abstract: In some embodiments, the present disclosure relates to a high-resistivity silicon-on-insulator (SOI) substrate, including a first polysilicon layer arranged over a semiconductor substrate. A second polysilicon layer is arranged over the first polysilicon layer, and a third polysilicon layer is arranged over the second polysilicon layer. An active semiconductor layer over an insulator layer may be arranged over the third polysilicon layer. The second polysilicon layer has an elevated concentration of oxygen compared to the first and third polysilicon layers.Type: GrantFiled: November 5, 2021Date of Patent: August 27, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yu-Hung Cheng, Cheng-Ta Wu, Chen-Hao Chiang, Alexander Kalnitsky, Yeur-Luen Tu, Eugene Chen
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Patent number: 11935928Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a bipolar transistor with self-aligned asymmetric spacer and methods of manufacture. The structure includes: a base formed on a semiconductor substrate; an asymmetrical spacer surrounding the base; an emitter on a first side of the base and separated from the base by the asymmetrical spacer; and a collector on a second side of the base and separated from the base by the asymmetrical spacer.Type: GrantFiled: May 18, 2022Date of Patent: March 19, 2024Assignee: GLOBALFOUNDRIES U.S. Inc.Inventors: Hong Yu, Jianwei Peng, Vibhor Jain
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Patent number: 11837678Abstract: A photodiode includes an active area formed by intrinsic germanium. The active area is located within a cavity formed in a silicon layer. The cavity is defined by opposed side walls which are angled relative to a direction perpendicular to a bottom surface of the silicon layer. The angled side walls support epitaxial growth of the intrinsic germanium with minimal lattice defects.Type: GrantFiled: September 27, 2021Date of Patent: December 5, 2023Assignee: STMicroelectronics (Crolles 2) SASInventors: Charles Baudot, Sebastien Cremer, Nathalie Vulliet, Denis Pellissier-Tanon
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Patent number: 11769806Abstract: Structures for a bipolar junction transistor and methods of forming a structure for a bipolar junction transistor. The structure includes a first terminal having a first raised semiconductor layer having a top surface and a side surface, a second terminal having a second raised semiconductor layer, and a base layer positioned in a lateral direction between the first raised semiconductor layer of the first terminal and the second raised semiconductor layer of the second terminal. The structure further includes a contact positioned to overlap with the top surface and the side surface of the first raised semiconductor layer.Type: GrantFiled: November 12, 2021Date of Patent: September 26, 2023Assignee: GlobalFoundries U.S. Inc.Inventors: Hong Yu, Jagar Singh
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Patent number: 11658032Abstract: A method includes providing a semiconductor structure having an active region and an isolation structure adjacent to the active region, the active region having source and drain regions sandwiching a channel region for a transistor, the semiconductor structure further having a gate structure over the channel region. The method further includes etching a trench in one of the source and drain regions, wherein the trench exposes a portion of a sidewall of the isolation structure, epitaxially growing a first semiconductor layer in the trench, epitaxially growing a second semiconductor layer over the first semiconductor layer, changing a crystalline facet orientation of a portion of a top surface of the second semiconductor layer by an etching process, and epitaxially growing a third semiconductor layer over the second semiconductor layer after the changing of the crystalline facet orientation.Type: GrantFiled: March 18, 2021Date of Patent: May 23, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Wen-Chin Chen, Cheng-Yi Wu, Yu-Hung Cheng, Ren-Hua Guo, Hsiang Liu, Chin-Szu Lee
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Patent number: 11532633Abstract: The present disclosure is directed to a circuit layout of a dual port static random-access-memory (SRAM) cell. The memory cell includes active regions in a substrate, with polysilicon gate electrodes on the active regions to define transistors of the memory cell. The eight transistor (8T) memory cell layout includes a reduced aspect ratio and non-polysilicon bit line discharge path routing by positioning an active region for the first port opposite an active region for the second port and consolidating power line nodes at a central portion of the memory cell.Type: GrantFiled: September 30, 2021Date of Patent: December 20, 2022Assignee: STMICROELECTRONICS INTERNATIONAL N.V.Inventors: Tushar Sharma, Tanmoy Roy, Shishir Kumar
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Patent number: 11437558Abstract: A thermoelectric conversion material has a composition represented by the chemical formula Li3-aBi1-bGeb, in which the range of values a and b is: 0?a?0.0003, and ?a+0.0003?b?0.108; 0.0003?a?0.003, and 0?b?0.108; or 0.003?a?0.085, and 0?b?exp[?0.157×(ln(a))2?2.22×ln(a)?9.81], and in which the thermoelectric conversion material has a BiF3-type crystal structure and has a p-type polarity.Type: GrantFiled: October 23, 2020Date of Patent: September 6, 2022Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Hiromasa Tamaki, Tsutomu Kanno, Hiroki Sato
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Patent number: 11387630Abstract: An optical device includes a gallium and nitrogen containing substrate comprising a surface region configured in a (20-2-1) orientation, a (30-3-1) orientation, or a (30-31) orientation, within +/?10 degrees toward c-plane and/or a-plane from the orientation. Optical devices having quantum well regions overly the surface region are also disclosed.Type: GrantFiled: December 1, 2020Date of Patent: July 12, 2022Assignee: KYOCERA SLD Laser, Inc.Inventors: James W. Raring, You-Da Lin, Christiane Elsass
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Patent number: 11355658Abstract: A method of manufacturing an imaging apparatus includes: preparing a substrate comprising a wafer and a silicon layer arranged on the wafer, the wafer including a first semiconductor region made of single crystal silicon with an oxygen concentration not less than 2×1016 atoms/cm3 and not greater than 4×1017 atoms/cm3, the silicon layer including a second semiconductor region made of single crystal silicon with an oxygen concentration lower than the oxygen concentration in the first semiconductor region; annealing the substrate in an atmosphere containing oxygen and setting the oxygen concentration in the second semiconductor region within the range not less than 2×1016 atoms/cm3 and not greater than 4×1017 atoms/cm3; and forming a photoelectric conversion element in the second semiconductor region after the annealing.Type: GrantFiled: May 11, 2020Date of Patent: June 7, 2022Assignee: CANON KABUSHIKI KAISHAInventors: Toshihiro Shoyama, Hiroshi Takakusagi, Yasuo Yamazaki, Hideaki Ishino, Toshiyuki Ogawa
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Patent number: 11133408Abstract: A passivated semiconductor device structure includes a III-nitride structure and a passivation layer. The III-nitride structure includes a high electron mobility transistor (HEMT). The passivation layer includes a dielectric, which is formed over the structure to provide passivation and forms an interface with the structure. The interface provides a transition between the structure and the dielectric having a thickness of at least two atomic layers. The interface also has a characteristic density of interface states less than a reference density of interface states that corresponds to a thickness of at most one atomic layer. The transition, which constitutes a rough interface, allows a relatively low density of interface states, and thus improves high-frequency performance of the device structure.Type: GrantFiled: August 6, 2019Date of Patent: September 28, 2021Assignee: IQE plcInventors: Oleg Laboutin, Xiang Gao, Hugues Marchand
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Patent number: 10868137Abstract: A method for forming a semiconductor device and a semiconductor device formed by the method are disclosed. In an embodiment, the method includes depositing a dummy dielectric layer on a fin extending from a substrate; depositing a dummy gate seed layer on the dummy dielectric layer; reflowing the dummy gate seed layer; etching the dummy gate seed layer; and selectively depositing a dummy gate material over the dummy gate seed layer, the dummy gate material and the dummy gate seed layer constituting a dummy gate.Type: GrantFiled: July 31, 2018Date of Patent: December 15, 2020Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: De-Wei Yu, Cheng-Po Chau, Yun Chen Teng
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Patent number: 10811522Abstract: A semiconductor device is manufactured using a transistor in which an oxide semiconductor is included in a channel region and variation in electric characteristics due to a short-channel effect is less likely to be caused. The semiconductor device includes an oxide semiconductor film having a pair of oxynitride semiconductor regions including nitrogen and an oxide semiconductor region sandwiched between the pair of oxynitride semiconductor regions, a gate insulating film, and a gate electrode provided over the oxide semiconductor region with the gate insulating film positioned therebetween. Here, the pair of oxynitride semiconductor regions serves as a source region and a drain region of the transistor, and the oxide semiconductor region serves as the channel region of the transistor.Type: GrantFiled: December 4, 2018Date of Patent: October 20, 2020Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Yuta Endo, Toshinari Sasaki, Kosei Noda
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Patent number: 10644089Abstract: A display device includes a scan line that extends in a first direction on a substrate and that transmits a scan signal; a data line that extends in a second direction that intersects the first direction and that transmits a data signal; a driving voltage line that extends in the second direction and that transmits a driving voltage; a transistor that includes a second transistor connected to the scan line and the data line and a first transistor connected to the second transistor; a light emitting device connected to the transistor; and a conductive pattern disposed between the substrate and the first transistor, where each of the first and second transistors includes an active pattern with a stacked first semiconductor layer and a second semiconductor layer, which have different crystalline states.Type: GrantFiled: June 1, 2017Date of Patent: May 5, 2020Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Jun Hee Lee, In Jun Bae, Kohei Ebisuno
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Patent number: 10043897Abstract: A method of fabricating a semiconductor device may form a nitride semiconductor layer on a substrate, form a first insulator layer on the nitride semiconductor layer by steam oxidation of ALD, form a second insulator layer on the first insulator layer by oxygen plasma oxidation of ALD, form a gate electrode on the second insulator layer, and form a source and drain electrodes on the nitride semiconductor layer. The nitride semiconductor layer may include a first semiconductor layer on the substrate, and a second semiconductor layer on the first semiconductor layer.Type: GrantFiled: June 17, 2015Date of Patent: August 7, 2018Assignee: FUJITSU LIMITEDInventor: Shirou Ozaki
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Patent number: 10014393Abstract: A method of manufacturing semiconductor device includes forming a plurality of sacrificial layers and a plurality of semiconductor layers repeatedly and alternately stacked on a substrate, partially removing the sacrificial layers, forming spacers in removed regions of the sacrificial layers, and replacing remaining portions of the sacrificial layers with a gate electrode. Each of the sacrificial layers includes first portions disposed adjacent to the plurality of semiconductor layers and a second portions disposed between the first portions. The second portion having a different composition from the first portions.Type: GrantFiled: November 25, 2016Date of Patent: July 3, 2018Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seung Min Song, Dong Chan Suh, Jung Gil Yang, Geum Jong Bae, Woo Bin Song
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Patent number: 10014311Abstract: A method of forming poly silicon comprises forming a first polysilicon-comprising material over a substrate, with the first polysilicon-comprising material comprising at least one of elemental carbon and elemental nitrogen at a total of 0.1 to 20 atomic percent. A second polysilicon-comprising material is formed over the first poly silicon-comprising material. The second polysilicon-comprising material comprises less, if any, total elemental carbon and elemental nitrogen than the first polysilicon-comprising material. Other aspects and embodiments, including structure independent of method of manufacture, are disclosed.Type: GrantFiled: October 17, 2016Date of Patent: July 3, 2018Assignee: Micron Technology, Inc.Inventors: Dimitrios Pavlopoulos, Kunal Shrotri, Anish A. Khandekar
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Patent number: 9899518Abstract: A semiconductor device includes a stressed substrate stressed by a first stress, a first stressed channel formed in the substrate and having the first stress, and a first strained gate electrode strained by a first strain generating element. A first strained gate electrode is formed over the first stressed channel, the first strained gate electrode including a first lattice-mismatched layer to induce a second stress to the first stressed channel.Type: GrantFiled: December 29, 2016Date of Patent: February 20, 2018Assignee: SK Hynix Inc.Inventor: Yun-Hyuck Ji
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Patent number: 9564519Abstract: There is provided a method of manufacturing a non-volatile memory device including: alternatively stacking a plurality of insulating layers and a plurality of conductive layers on a top surface of a substrate; forming an opening that exposes the top surface of the substrate and lateral surfaces of the insulating layers and the conductive layers; forming an anti-oxidation layer on at least the exposed lateral surfaces of the conductive layers; forming a gate dielectric layer on the anti-oxidation layer, the gate dielectric layer including a blocking layer, an electric charge storage layer, and a tunneling layer that are sequentially formed on the anti-oxidation layer; and forming a channel region on the tunneling layer.Type: GrantFiled: August 12, 2014Date of Patent: February 7, 2017Assignee: Samsung Electronics Co., Ltd.Inventors: Jin Taek Park, Young Woo Park, Jae Duk Lee
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Patent number: 9524898Abstract: Examples of the various techniques introduced here include, but not limited to, a mesa height adjustment approach during shallow trench isolation formation, a transistor via first approach, and a multiple absorption layer approach. As described further below, the techniques introduced herein include a variety of aspects that can individually and/or collectively resolve or mitigate one or more traditional limitations involved with manufacturing PDs and transistors on the same substrate, such as above discussed reliability, performance, and process temperature issues.Type: GrantFiled: November 24, 2015Date of Patent: December 20, 2016Assignee: ARTILUX, INC.Inventors: Szu-Lin Cheng, Shu-Lu Chen
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Patent number: 9425267Abstract: Transistors and methods of fabricating are described herein. These transistors include a field plate (108) and a charged dielectric layer (106) overlapping at least a portion of a gate electrode (102). The field plate (108) and charged dielectric layer (106) provide the ability to modulate the electric field or capacitance in the transistor. For example, the charged dielectric layer (106) provides the ability to control the capacitance between the gate electrode (102) and field plate (108). Modulating such capacitances or the electric field in transistors can facilitate improved performance. For example, controlling gate electrode (102) to field plate (108) capacitance can be used to improve device linearity and/or breakdown voltage. Such control over gate electrode (102) to field plate (108) capacitance or electric fields provides for high speed and/or high voltage transistor operation.Type: GrantFiled: March 14, 2013Date of Patent: August 23, 2016Assignee: FREESCALE SEMICONDUCTOR, INC.Inventors: Jenn Hwa Huang, James A. Teplik
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Patent number: 9306093Abstract: A scribed photovoltaic device, comprising a photovoltaic device configured for generating electrical energy responsive to receiving solar radiation, the photovoltaic device comprising a plurality of electrically connected photovoltaic sections comprising a photovoltaic light absorbing chalcopyrite semiconductor region (“PLACS region”) disposed between first and second electrode regions. The photovoltaic sections can each comprise a scribe channel extending along and into two of the regions, wherein the scribe channel can comprise a pair of spaced opposing sidewalls of one of the regions, a pair of terraces comprising a pair of spaced opposing terrace shoulders, and a second pair of spaced opposing sidewalls of another one of the regions, with the spacing of the second pair of sidewalls being different than the spacing of the first pair of sidewalls.Type: GrantFiled: September 6, 2011Date of Patent: April 5, 2016Assignee: Fianium Ltd.Inventors: Brian W. Baird, Timothy D. Gerke
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Patent number: 9299562Abstract: Materials, methods, structures and device including the same can provide a semiconductor device such as an LED using an active region corresponding to a non-polar face or surface of III-V semiconductor crystalline material. In some embodiments, an active diode region contains more non-polar III-V material oriented to a non-polar plane than III-V material oriented to a polar plane. In other embodiments, a bottom region contains more non-polar m-plane or a-plane surface area GaN than polar c-plane surface area GaN facing an active region.Type: GrantFiled: December 13, 2013Date of Patent: March 29, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Anthony J. Lochtefeld
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Patent number: 9293580Abstract: An integrated circuit device and method for fabricating the integrated circuit device is disclosed. The method involves providing a substrate; forming a gate structure over the substrate; forming an epitaxial layer in a source and drain region of the substrate that is interposed by the gate structure; and after forming the epitaxial layer, forming a lightly doped source and drain (LDD) feature in the source and drain region.Type: GrantFiled: December 30, 2013Date of Patent: March 22, 2016Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Ka-Hing Fung, Haiting Wang, Han-Ting Tsai
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Patent number: 9269841Abstract: A CIS-based thin film solar cell has a backside electrode layer that is divided by a pattern (P1), and a CIS-based light absorption layer, and a transparent conductive film are sequentially formed on a substrate. The backside electrode layer comprises an intermediate layer on the surface that is in contact with the CIS-based light absorption layer, the intermediate layer being composed of a compound of a metal that constitutes the backside electrode layer and a group VI element that constitutes the CIS-based light absorption layer; the intermediate layer comprises a first intermediate layer portion which is formed on the upper surface and a second intermediate layer portion which is formed on the lateral surface that and faces the pattern (P1); and the film thickness of the second intermediate layer portion is larger than the film thickness of the first intermediate layer portion.Type: GrantFiled: June 16, 2011Date of Patent: February 23, 2016Assignee: SOLAR FRONTIER K.K.Inventors: Takuya Morimoto, Hiroki Sugimoto, Hideki Hakuma
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Patent number: 9117946Abstract: A method of forming an integrated photonic semiconductor structure having a photodetector and a CMOS device may include forming the CMOS device on a first silicon-on-insulator region, forming a silicon optical waveguide on a second silicon-on-insulator region, and forming a shallow trench isolation (STI) region surrounding the silicon optical waveguide such that the shallow trench isolation electrically isolating the first and second silicon-on-insulator region. Within a first region of the STI region, a first germanium material is deposited adjacent a first side wall of the semiconductor optical waveguide. Within a second region of the STI region, a second germanium material is deposited adjacent a second side wall of the semiconductor optical waveguide, whereby the second side wall opposes the first side wall. The first and second germanium material form an active region that evanescently receives propagating optical signals from the first and second side wall of the semiconductor optical waveguide.Type: GrantFiled: January 15, 2013Date of Patent: August 25, 2015Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Solomon Assefa, William M. Green, Steven M. Shank, Yurii A. Vlasov
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Patent number: 9048180Abstract: A low stress sacrificial cap layer 120 having a silicon oxide liner film 130, a low stress silicon film 140, and a silicon nitride film Alternatively, a low stress sacrificial cap layer 410 having a silicon oxide liner film 130 and a graded silicon nitride film 420. Also, methods 300, 500 for fabricating a transistor 20, 400 having a low stress sacrificial cap layer 120, 410.Type: GrantFiled: May 16, 2006Date of Patent: June 2, 2015Assignee: Texas Instruments IncorporatedInventors: Jiong-Ping Lu, Periannan Chidambaram, Srinivasan Chakravarthi
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Patent number: 9029860Abstract: A structure includes a silicon substrate, a plurality of silicon rods on the silicon substrate, a silicon layer on the plurality of silicon rods, and a GaN substrate on the silicon layer.Type: GrantFiled: March 21, 2013Date of Patent: May 12, 2015Assignee: Samsung Electronics Co., Ltd.Inventors: Xianyu Wenxu, Yeon-hee Kim, Chang-youl Moon, Yong-young Park
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Patent number: 8975634Abstract: An object is to suppress occurrence of oxygen deficiency. An oxide semiconductor film is formed using germanium (Ge) instead of part of or all of gallium (Ga) or tin (Sn). At least one of bonds between a germanium (Ge) atom and oxygen (O) atoms has a bond energy higher than at least one of bonds between a tin (Sn) atom and oxygen (O) atoms or a gallium (Ga) atom and oxygen (O) atoms. Thus, a crystal of an oxide semiconductor formed using germanium (Ge) has a low possibility of occurrence of oxygen deficiency. Accordingly, an oxide semiconductor film is formed using germanium (Ge) in order to suppress occurrence of oxygen deficiency.Type: GrantFiled: September 27, 2012Date of Patent: March 10, 2015Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Motoki Nakashima
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Patent number: 8963157Abstract: A thin film transistor, an array substrate, and a manufacturing method thereof. The manufacturing method comprises: forming a buffer layer and an active layer sequentially on a substrate, and forming an active region through a patterning process; forming a gate insulating layer and a gate electrode sequentially; forming Ni deposition openings; forming a dielectric layer having source/drain contact holes in a one-to-one correspondence with the Ni deposition openings; and forming source/drain electrodes which are connected with the active region via the source/drain contact holes and the Ni deposition openings.Type: GrantFiled: November 13, 2012Date of Patent: February 24, 2015Assignee: BOE Technology Group Co., Ltd.Inventor: Yinan Liang
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Patent number: 8963124Abstract: At least first and second Si1-xGex (0?x?1) layers are formed on an insulating film. At least first and second material layers are formed correspondingly to the at least first and second Si1-xGex (0?x?1) layers. A lattice constant of the first Si1-xGex (0?x?1) layer is matched with a lattice constant of the first material layer. A lattice constant of the second Si1-xGex (0?x?1) layer is matched with a lattice constant of the second material layer.Type: GrantFiled: March 17, 2009Date of Patent: February 24, 2015Assignee: Semiconductor Technology Academic Research CenterInventors: Masanobu Miyao, Hiroshi Nakashima, Taizoh Sadoh, Ichiro Mizushima, Masaki Yoshimaru
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Patent number: 8889529Abstract: Heterojunction bipolar transistors are provided that include at least one contact (e.g., collector, and/or emitter, and/or base) formed by a heterojunction between a crystalline semiconductor material and a doped non-crystalline semiconductor material layer. A highly doped epitaxial semiconductor layer comprising a highly doped hydrogenated crystalline semiconductor material layer portion is present at the heterojunction between the crystalline semiconductor material and the doped non-crystalline semiconductor material layer. Minority carriers within the highly doped epitaxial semiconductor layer have a diffusion length that is larger than a thickness of the highly doped epitaxial semiconductor layer.Type: GrantFiled: March 15, 2013Date of Patent: November 18, 2014Assignee: International Business Machines CorporationInventors: Bahman Hekmatshoar-Tabari, Tak H. Ning, Devendra K. Sadana, Ghavam G. Shahidi, Davood Shahrjerdi
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Patent number: 8878176Abstract: A thin-film transistor with a fluorinated channel and fluorinated source and drain regions and methods of fabrication are provided. The thin-film transistor includes: a substrate; a semiconductor active layer of fluorine-doped metal-oxide formed on the substrate; fluorine-doped source and drain regions disposed adjacent to the semiconductor active layer; a gate electrode disposed over the semiconductor active layer, configured to induce a continuous conduction channel between the source and drain regions; and a gate dielectric material separating the gate electrode and the channel.Type: GrantFiled: August 10, 2012Date of Patent: November 4, 2014Assignee: The Hong Kong University of Science and TechnologyInventors: Man Wong, Hoi Sing Kwok, Zhi Ye
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Patent number: 8860031Abstract: A non-volatile semiconductor memory device according to an embodiment includes a semiconductor substrate and a transistor provided on the semiconductor substrate. The transistor includes a conductive layer, a gate insulating layer, a semiconductor layer, and an oxidation layer. The conductive layer functions as a gate of the transistor. The gate insulating layer contacts with a side surface of the conductive layer. The semiconductor layer has a side surface sandwiching the gate insulating layer with the conductive layer, extends a direction perpendicular to the semiconductor substrate, and functions as a body of the transistor. The oxidation layer contacts with the other side surface of the semiconductor layer. The semiconductor layer is made of silicon germanium. The oxidation layer is made of a silicon oxide.Type: GrantFiled: March 19, 2012Date of Patent: October 14, 2014Assignee: Kabushiki Kaisha ToshibaInventor: Shinji Mori
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Patent number: 8853673Abstract: A semiconductor device includes a gate electrode formed on a silicon substrate via a gate insulation film in correspondence to a channel region, source and drain regions of a p-type diffusion region formed in the silicon substrate at respective outer sides of sidewall insulation films of the gate electrode, and a pair of SiGe mixed crystal regions formed in the silicon substrate at respective outer sides of the sidewall insulation films in epitaxial relationship to the silicon substrate, the SiGe mixed crystal regions being defined by respective sidewall surfaces facing with each other, wherein, in each of the SiGe mixed crystal regions, the sidewall surface is defined by a plurality of facets forming respective, mutually different angles with respect to a principal surface of the silicon substrate.Type: GrantFiled: May 15, 2013Date of Patent: October 7, 2014Assignee: Fujitsu Semiconductor LimitedInventors: Yosuke Shimamune, Akira Katakami, Akiyoshi Hatada, Masashi Shima, Naoyoshi Tamura
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Patent number: 8841701Abstract: The present disclosure provides a FinFET device. The FinFET device comprises a semiconductor substrate of a first semiconductor material; a fin structure of the first semiconductor material overlying the semiconductor substrate, wherein the fin structure has a top surface of a first crystal plane orientation; a diamond-like shape structure of a second semiconductor material disposed over the top surface of the fin structure, wherein the diamond-like shape structure has at least one surface of a second crystal plane orientation; a gate structure disposed over the diamond-like shape structure, wherein the gate structure separates a source region and a drain region; and a channel region defined in the diamond-like shape structure between the source and drain regions.Type: GrantFiled: August 30, 2011Date of Patent: September 23, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: You-Ru Lin, Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
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Patent number: 8829532Abstract: Semiconductor layer structure and a method for producing a structure are provided, including a substrate made of semiconductor material, on which a layer made of a second semiconductor material is situated, furthermore a region (3) enriched with impurity atoms, which region is situated either in layer (2) or at a specific depth below the interface between layer (2) and substrate (1), additionally a layer (4) within the region (3) enriched with impurity atoms, which layer comprises cavities produced by ion implantation, furthermore at least one epitaxial layer (6) applied to layer (2) and also a defect region (5) comprising dislocations and stacking faults within the layer (4) comprising cavities, the at least one epitaxial layer (6) being largely crack-free, and a residual strain of the at least one epitaxial layer (6) being less than or equal to 1 GPa.Type: GrantFiled: February 2, 2007Date of Patent: September 9, 2014Assignee: Siltronic AGInventors: Brian Murphy, Maik Häberlen, Jörg Lindner, Bernd Stritzker
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Patent number: 8803156Abstract: A method of manufacturing a heterojunction bipolar transistor, including providing a substrate comprising an active region bordered by shallow trench insulation regions; depositing a stack of a dielectric layer and a polysilicon layer over the substrate; forming a base window in the stack, the base window extending over the active region and part of the shallow trench insulation regions, the base window having a trench extending vertically between the active region and one of the shallow trench insulation regions; growing an epitaxial base material inside the base window; forming a spacer on the exposed side walls of the base material; and filling the base window with an emitter material. A HBT manufactured in this manner and an IC including such an HBT.Type: GrantFiled: August 9, 2011Date of Patent: August 12, 2014Assignee: NXP, B.V.Inventors: Tony Vanhoucke, Johannes Josephus Theodorus Marinus Donkers, Hans Mertens, Blandine Duriez, Evelyne Marie Josephe Fabienne Gridelet
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Patent number: 8796687Abstract: A method of treating a sheet of semiconducting material comprises forming a sinterable first layer over each major surface of a sheet of semiconducting material, forming a second layer over each of the first layers to form a particle-coated semiconductor sheet, placing the particle-coated sheet between end members, heating the particle-coated sheet to a temperature effective to at least partially sinter the first layer and at least partially melt the semiconducting material, and cooling the particle-coated sheet to solidify the semiconducting material and form a treated sheet of semiconducting material.Type: GrantFiled: September 19, 2011Date of Patent: August 5, 2014Assignee: Corning IncorporatedInventors: Glen Bennett Cook, Prantik Mazumder, Mallanagouda Dyamanagouda Patil, Lili Tian, Natesan Venkataraman
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Patent number: 8766273Abstract: It is possible to manufacture a large-size, high-accuracy organic EL display using a plastic substrate and an organic EL display using a roll-shaped long plastic substrate. The organic EL display includes an organic EL device A having at least a lower electrode 300, an organic layer including at least a light emitting layer, and an upper electrode 305 and a thin film transistor B on a transparent plastic substrate 100, a source electrode or drain electrode of the thin film transistor B is connected to the lower electrode 300, the plastic substrate 100 has a gas barrier layer 101a, the thin film transistor B is formed on the gas barrier layer 101a, the thin film transistor B includes an active layer 203 containing a non-metallic element which a mixture of oxygen (O) and nitrogen (N) and has a ratio of N to O (N number density/O number density) from 0 to 2, and the organic EL device A is formed at least on the gas barrier layer 101a or one the thin film transistor B.Type: GrantFiled: March 4, 2010Date of Patent: July 1, 2014Assignees: Sumitomo Chemical Company, Limited, Sumitomo Bakelite Co., Ltd.Inventors: Shigeyoshi Otsuki, Toshimasa Eguchi, Shinya Yamaguchi, Mamoru Okamoto
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Patent number: 8759205Abstract: According to one embodiment, a method for manufacturing a semiconductor device, wherein an amorphous semiconductor film comprising a microcrystal is annealed using a microwave, to crystallize the amorphous semiconductor film comprising the microcrystal using the microcrystal as a nucleus.Type: GrantFiled: September 16, 2010Date of Patent: June 24, 2014Assignee: Kabushiki Kaisha ToshibaInventors: Tomonori Aoyama, Yusuke Oshiki, Kiyotaka Miyano
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Patent number: 8735894Abstract: The invention provides a light emitting diode package structure, including: a light emitting diode chip formed on a substrate; a composite coating layer formed on the light emitting diode chip, wherein the composite coating layer comprises a first coating layer and a second coating layer, and the composite coating layer has a reflectivity greater than 95% at the wavelength of 500-800 nm; a cup body formed on the substrate, wherein the cup body surrounds the light emitting diode chip; and an encapsulation housing covering the light emitting diode chip, wherein the encapsulation housing comprises a wavelength transformation material.Type: GrantFiled: March 15, 2012Date of Patent: May 27, 2014Assignee: Lextar Electronics CorporationInventors: Pei-Song Cai, Tzu-Pu Lin, Szu-Wei Fu
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Patent number: 8736952Abstract: A photonic crystal device comprising: a photonic crystal material having an initial ordered structure and a viewing surface, the initial ordered structure giving rise to a first optical effect detectable from the viewing surface; and a removal layer removably attached with the viewing surface or an opposing surface of the photonic crystal material opposite to the viewing surface; wherein mechanical removal of at least a portion of the removal layer results in a structural change in at least a portion of the initial ordered structure of at least a portion of the photonic crystal material respective to the portion of the removed removal layer, thereby resulting in a changed portion different from the initial ordered structure, the changed portion giving rise to a second optical effect detectable from the viewing surface and detectably different from the first optical effect.Type: GrantFiled: August 20, 2009Date of Patent: May 27, 2014Assignee: Opalux IncorporatedInventor: Andre Arsenault
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Publication number: 20140110717Abstract: A structure includes a silicon substrate, a plurality of silicon rods on the silicon substrate, a silicon layer on the plurality of silicon rods, and a GaN substrate on the silicon layer.Type: ApplicationFiled: March 21, 2013Publication date: April 24, 2014Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Xianyu WENXU, Yeon-hee KIM, Chang-youl MOON, Yong-young PARK
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Patent number: 8659023Abstract: A monocrystalline layer having a first lattice constant on a monocrystalline substrate having a second lattice constant at least in a near-surface region, wherein the second lattice constant is different from the first lattice constant. Lattice matching atoms are implanted into the near-surface region. The near-surface region is momentarily melted. A layer is epitaxially deposited on the near-surface region that has solidified in monocrystalline fashion.Type: GrantFiled: September 11, 2012Date of Patent: February 25, 2014Assignee: Infineon Technologies Austria AGInventors: Franz Hirler, Hans-Joachim Schulze
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Patent number: 8648391Abstract: The product of the breakdown voltage (BVCEO) and the cutoff frequency (fT) of a SiGe heterojunction bipolar transistor (HBT) is increased beyond the Johnson limit by utilizing a doped region with a hollow core that extends down from the base to the heavily-doped buried collector region. The doped region and the buried collector region have opposite dopant types.Type: GrantFiled: March 23, 2012Date of Patent: February 11, 2014Assignee: Texas Instruments IncorporatedInventors: Jeffrey A. Babcock, Alexei Sadovnikov
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Patent number: 8629446Abstract: Materials, methods, structures and device including the same can provide a semiconductor device such as an LED using an active region corresponding to a non-polar face or surface of III-V semiconductor crystalline material. In some embodiments, an active diode region contains more non-polar III-V material oriented to a non-polar plane than III-V material oriented to a polar plane. In other embodiments, a bottom region contains more non-polar m-plane or a-plane surface area GaN than polar c-plane surface area GaN facing an active region.Type: GrantFiled: April 1, 2010Date of Patent: January 14, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventor: Anthony J. Lochtefeld
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Patent number: 8624295Abstract: A novel SRAM memory cell structure and method of making the same are provided. The SRAM memory cell structure comprises strained PMOS transistors formed in a semiconductor substrate. The PMOS transistors comprise epitaxial grown source/drain regions that result in significant PMOS transistor drive current increase. An insulation layer is formed atop an STI that is used to electrically isolate adjacent PMOS transistors. The insulation layer is substantially elevated from the semiconductor substrate surface. The elevated insulation layer facilitates the formation of desirable thick epitaxial source/drain regions, and prevents the bridging between adjacent epitaxial layers due to the epitaxial layer lateral extension during the process of growing epitaxial sour/drain regions. The processing steps of forming the elevated insulation layer are compatible with a conventional CMOS process flow.Type: GrantFiled: March 20, 2008Date of Patent: January 7, 2014Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Harry Chuang, Hung-Chih Tsai, Kong-Beng Thei, Mong-Song Liang
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Patent number: 8611146Abstract: Non-volatile memory devices with two stacked layers of chalcogenide materials comprising the active memory device have been investigated for their potential as phase-change memories. The devices tested included GeTe/SnTe, Ge2Se3/SnTe, and Ge2Se3/SnSe stacks. All devices exhibited resistance switching behavior. The polarity of the applied voltage with respect to the SnTe or SnSe layer was critical to the memory switching properties, due to the electric field induced movement of either Sn or Te into the Ge-chalcogenide layer. One embodiment of the invention is a device comprising a stack of chalcogenide-containing layers which exhibit phase-change switching only after a reverse polarity voltage potential is applied across the stack causing ion movement into an adjacent layer and thus “activating” the device to act as a phase-change random access memory device or a reconfigurable electronics device when the applied voltage potential is returned to the normal polarity.Type: GrantFiled: October 22, 2012Date of Patent: December 17, 2013Assignee: Boise State UniversityInventor: Kristy A Campbell
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Patent number: 8546249Abstract: A method of depositing polycrystalline silicon exclusively on monocrystalline first silicon surface portions of a substrate surface which besides the first surface portions additionally has insulator surface portions, comprising the steps of depositing boron on the first silicon surface portions in an amount which in relation to the first silicon surface portions respectively corresponds to more than a monolayer of boron, and depositing silicon on the first silicon surface portions treated in that way.Type: GrantFiled: February 15, 2008Date of Patent: October 1, 2013Assignee: IHP GmbH—Innovations for High PerformanceInventors: Bernd Tillack, Bernd Heinemann, Yuji Yamamoto
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Patent number: 8530907Abstract: A light source includes a hot electron source comprising a cathode that generates an electron beam and an anode comprising a germanium containing material positioned adjacent to the cathode. The anode is biased so that the electron beam accelerates towards the anode where some electrons are absorbed and then relax to both direct energy bands and indirect energy bands causing stimulation of low energy electrons from the indirect energy band to the direct energy band, thereby creating electroluminescence.Type: GrantFiled: June 29, 2011Date of Patent: September 10, 2013Assignee: Photonic Systems, Inc.Inventors: Jianxiao Chen, Charles H. Cox