Non-single Crystal, Or Recrystallized, Material Containing Non-dopant Additive, Or Alloy Of Semiconductor Materials (e.g., Ge X Si 1- X, Polycrystalline Silicon With Dangling Bond Modifier) Patents (Class 257/65)
  • Patent number: 12074036
    Abstract: In some embodiments, the present disclosure relates to a high-resistivity silicon-on-insulator (SOI) substrate, including a first polysilicon layer arranged over a semiconductor substrate. A second polysilicon layer is arranged over the first polysilicon layer, and a third polysilicon layer is arranged over the second polysilicon layer. An active semiconductor layer over an insulator layer may be arranged over the third polysilicon layer. The second polysilicon layer has an elevated concentration of oxygen compared to the first and third polysilicon layers.
    Type: Grant
    Filed: November 5, 2021
    Date of Patent: August 27, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Hung Cheng, Cheng-Ta Wu, Chen-Hao Chiang, Alexander Kalnitsky, Yeur-Luen Tu, Eugene Chen
  • Patent number: 11935928
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a bipolar transistor with self-aligned asymmetric spacer and methods of manufacture. The structure includes: a base formed on a semiconductor substrate; an asymmetrical spacer surrounding the base; an emitter on a first side of the base and separated from the base by the asymmetrical spacer; and a collector on a second side of the base and separated from the base by the asymmetrical spacer.
    Type: Grant
    Filed: May 18, 2022
    Date of Patent: March 19, 2024
    Assignee: GLOBALFOUNDRIES U.S. Inc.
    Inventors: Hong Yu, Jianwei Peng, Vibhor Jain
  • Patent number: 11837678
    Abstract: A photodiode includes an active area formed by intrinsic germanium. The active area is located within a cavity formed in a silicon layer. The cavity is defined by opposed side walls which are angled relative to a direction perpendicular to a bottom surface of the silicon layer. The angled side walls support epitaxial growth of the intrinsic germanium with minimal lattice defects.
    Type: Grant
    Filed: September 27, 2021
    Date of Patent: December 5, 2023
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventors: Charles Baudot, Sebastien Cremer, Nathalie Vulliet, Denis Pellissier-Tanon
  • Patent number: 11769806
    Abstract: Structures for a bipolar junction transistor and methods of forming a structure for a bipolar junction transistor. The structure includes a first terminal having a first raised semiconductor layer having a top surface and a side surface, a second terminal having a second raised semiconductor layer, and a base layer positioned in a lateral direction between the first raised semiconductor layer of the first terminal and the second raised semiconductor layer of the second terminal. The structure further includes a contact positioned to overlap with the top surface and the side surface of the first raised semiconductor layer.
    Type: Grant
    Filed: November 12, 2021
    Date of Patent: September 26, 2023
    Assignee: GlobalFoundries U.S. Inc.
    Inventors: Hong Yu, Jagar Singh
  • Patent number: 11658032
    Abstract: A method includes providing a semiconductor structure having an active region and an isolation structure adjacent to the active region, the active region having source and drain regions sandwiching a channel region for a transistor, the semiconductor structure further having a gate structure over the channel region. The method further includes etching a trench in one of the source and drain regions, wherein the trench exposes a portion of a sidewall of the isolation structure, epitaxially growing a first semiconductor layer in the trench, epitaxially growing a second semiconductor layer over the first semiconductor layer, changing a crystalline facet orientation of a portion of a top surface of the second semiconductor layer by an etching process, and epitaxially growing a third semiconductor layer over the second semiconductor layer after the changing of the crystalline facet orientation.
    Type: Grant
    Filed: March 18, 2021
    Date of Patent: May 23, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Wen-Chin Chen, Cheng-Yi Wu, Yu-Hung Cheng, Ren-Hua Guo, Hsiang Liu, Chin-Szu Lee
  • Patent number: 11532633
    Abstract: The present disclosure is directed to a circuit layout of a dual port static random-access-memory (SRAM) cell. The memory cell includes active regions in a substrate, with polysilicon gate electrodes on the active regions to define transistors of the memory cell. The eight transistor (8T) memory cell layout includes a reduced aspect ratio and non-polysilicon bit line discharge path routing by positioning an active region for the first port opposite an active region for the second port and consolidating power line nodes at a central portion of the memory cell.
    Type: Grant
    Filed: September 30, 2021
    Date of Patent: December 20, 2022
    Assignee: STMICROELECTRONICS INTERNATIONAL N.V.
    Inventors: Tushar Sharma, Tanmoy Roy, Shishir Kumar
  • Patent number: 11437558
    Abstract: A thermoelectric conversion material has a composition represented by the chemical formula Li3-aBi1-bGeb, in which the range of values a and b is: 0?a?0.0003, and ?a+0.0003?b?0.108; 0.0003?a?0.003, and 0?b?0.108; or 0.003?a?0.085, and 0?b?exp[?0.157×(ln(a))2?2.22×ln(a)?9.81], and in which the thermoelectric conversion material has a BiF3-type crystal structure and has a p-type polarity.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: September 6, 2022
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Hiromasa Tamaki, Tsutomu Kanno, Hiroki Sato
  • Patent number: 11387630
    Abstract: An optical device includes a gallium and nitrogen containing substrate comprising a surface region configured in a (20-2-1) orientation, a (30-3-1) orientation, or a (30-31) orientation, within +/?10 degrees toward c-plane and/or a-plane from the orientation. Optical devices having quantum well regions overly the surface region are also disclosed.
    Type: Grant
    Filed: December 1, 2020
    Date of Patent: July 12, 2022
    Assignee: KYOCERA SLD Laser, Inc.
    Inventors: James W. Raring, You-Da Lin, Christiane Elsass
  • Patent number: 11355658
    Abstract: A method of manufacturing an imaging apparatus includes: preparing a substrate comprising a wafer and a silicon layer arranged on the wafer, the wafer including a first semiconductor region made of single crystal silicon with an oxygen concentration not less than 2×1016 atoms/cm3 and not greater than 4×1017 atoms/cm3, the silicon layer including a second semiconductor region made of single crystal silicon with an oxygen concentration lower than the oxygen concentration in the first semiconductor region; annealing the substrate in an atmosphere containing oxygen and setting the oxygen concentration in the second semiconductor region within the range not less than 2×1016 atoms/cm3 and not greater than 4×1017 atoms/cm3; and forming a photoelectric conversion element in the second semiconductor region after the annealing.
    Type: Grant
    Filed: May 11, 2020
    Date of Patent: June 7, 2022
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Toshihiro Shoyama, Hiroshi Takakusagi, Yasuo Yamazaki, Hideaki Ishino, Toshiyuki Ogawa
  • Patent number: 11133408
    Abstract: A passivated semiconductor device structure includes a III-nitride structure and a passivation layer. The III-nitride structure includes a high electron mobility transistor (HEMT). The passivation layer includes a dielectric, which is formed over the structure to provide passivation and forms an interface with the structure. The interface provides a transition between the structure and the dielectric having a thickness of at least two atomic layers. The interface also has a characteristic density of interface states less than a reference density of interface states that corresponds to a thickness of at most one atomic layer. The transition, which constitutes a rough interface, allows a relatively low density of interface states, and thus improves high-frequency performance of the device structure.
    Type: Grant
    Filed: August 6, 2019
    Date of Patent: September 28, 2021
    Assignee: IQE plc
    Inventors: Oleg Laboutin, Xiang Gao, Hugues Marchand
  • Patent number: 10868137
    Abstract: A method for forming a semiconductor device and a semiconductor device formed by the method are disclosed. In an embodiment, the method includes depositing a dummy dielectric layer on a fin extending from a substrate; depositing a dummy gate seed layer on the dummy dielectric layer; reflowing the dummy gate seed layer; etching the dummy gate seed layer; and selectively depositing a dummy gate material over the dummy gate seed layer, the dummy gate material and the dummy gate seed layer constituting a dummy gate.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: December 15, 2020
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: De-Wei Yu, Cheng-Po Chau, Yun Chen Teng
  • Patent number: 10811522
    Abstract: A semiconductor device is manufactured using a transistor in which an oxide semiconductor is included in a channel region and variation in electric characteristics due to a short-channel effect is less likely to be caused. The semiconductor device includes an oxide semiconductor film having a pair of oxynitride semiconductor regions including nitrogen and an oxide semiconductor region sandwiched between the pair of oxynitride semiconductor regions, a gate insulating film, and a gate electrode provided over the oxide semiconductor region with the gate insulating film positioned therebetween. Here, the pair of oxynitride semiconductor regions serves as a source region and a drain region of the transistor, and the oxide semiconductor region serves as the channel region of the transistor.
    Type: Grant
    Filed: December 4, 2018
    Date of Patent: October 20, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yuta Endo, Toshinari Sasaki, Kosei Noda
  • Patent number: 10644089
    Abstract: A display device includes a scan line that extends in a first direction on a substrate and that transmits a scan signal; a data line that extends in a second direction that intersects the first direction and that transmits a data signal; a driving voltage line that extends in the second direction and that transmits a driving voltage; a transistor that includes a second transistor connected to the scan line and the data line and a first transistor connected to the second transistor; a light emitting device connected to the transistor; and a conductive pattern disposed between the substrate and the first transistor, where each of the first and second transistors includes an active pattern with a stacked first semiconductor layer and a second semiconductor layer, which have different crystalline states.
    Type: Grant
    Filed: June 1, 2017
    Date of Patent: May 5, 2020
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jun Hee Lee, In Jun Bae, Kohei Ebisuno
  • Patent number: 10043897
    Abstract: A method of fabricating a semiconductor device may form a nitride semiconductor layer on a substrate, form a first insulator layer on the nitride semiconductor layer by steam oxidation of ALD, form a second insulator layer on the first insulator layer by oxygen plasma oxidation of ALD, form a gate electrode on the second insulator layer, and form a source and drain electrodes on the nitride semiconductor layer. The nitride semiconductor layer may include a first semiconductor layer on the substrate, and a second semiconductor layer on the first semiconductor layer.
    Type: Grant
    Filed: June 17, 2015
    Date of Patent: August 7, 2018
    Assignee: FUJITSU LIMITED
    Inventor: Shirou Ozaki
  • Patent number: 10014393
    Abstract: A method of manufacturing semiconductor device includes forming a plurality of sacrificial layers and a plurality of semiconductor layers repeatedly and alternately stacked on a substrate, partially removing the sacrificial layers, forming spacers in removed regions of the sacrificial layers, and replacing remaining portions of the sacrificial layers with a gate electrode. Each of the sacrificial layers includes first portions disposed adjacent to the plurality of semiconductor layers and a second portions disposed between the first portions. The second portion having a different composition from the first portions.
    Type: Grant
    Filed: November 25, 2016
    Date of Patent: July 3, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seung Min Song, Dong Chan Suh, Jung Gil Yang, Geum Jong Bae, Woo Bin Song
  • Patent number: 10014311
    Abstract: A method of forming poly silicon comprises forming a first polysilicon-comprising material over a substrate, with the first polysilicon-comprising material comprising at least one of elemental carbon and elemental nitrogen at a total of 0.1 to 20 atomic percent. A second polysilicon-comprising material is formed over the first poly silicon-comprising material. The second polysilicon-comprising material comprises less, if any, total elemental carbon and elemental nitrogen than the first polysilicon-comprising material. Other aspects and embodiments, including structure independent of method of manufacture, are disclosed.
    Type: Grant
    Filed: October 17, 2016
    Date of Patent: July 3, 2018
    Assignee: Micron Technology, Inc.
    Inventors: Dimitrios Pavlopoulos, Kunal Shrotri, Anish A. Khandekar
  • Patent number: 9899518
    Abstract: A semiconductor device includes a stressed substrate stressed by a first stress, a first stressed channel formed in the substrate and having the first stress, and a first strained gate electrode strained by a first strain generating element. A first strained gate electrode is formed over the first stressed channel, the first strained gate electrode including a first lattice-mismatched layer to induce a second stress to the first stressed channel.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: February 20, 2018
    Assignee: SK Hynix Inc.
    Inventor: Yun-Hyuck Ji
  • Patent number: 9564519
    Abstract: There is provided a method of manufacturing a non-volatile memory device including: alternatively stacking a plurality of insulating layers and a plurality of conductive layers on a top surface of a substrate; forming an opening that exposes the top surface of the substrate and lateral surfaces of the insulating layers and the conductive layers; forming an anti-oxidation layer on at least the exposed lateral surfaces of the conductive layers; forming a gate dielectric layer on the anti-oxidation layer, the gate dielectric layer including a blocking layer, an electric charge storage layer, and a tunneling layer that are sequentially formed on the anti-oxidation layer; and forming a channel region on the tunneling layer.
    Type: Grant
    Filed: August 12, 2014
    Date of Patent: February 7, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin Taek Park, Young Woo Park, Jae Duk Lee
  • Patent number: 9524898
    Abstract: Examples of the various techniques introduced here include, but not limited to, a mesa height adjustment approach during shallow trench isolation formation, a transistor via first approach, and a multiple absorption layer approach. As described further below, the techniques introduced herein include a variety of aspects that can individually and/or collectively resolve or mitigate one or more traditional limitations involved with manufacturing PDs and transistors on the same substrate, such as above discussed reliability, performance, and process temperature issues.
    Type: Grant
    Filed: November 24, 2015
    Date of Patent: December 20, 2016
    Assignee: ARTILUX, INC.
    Inventors: Szu-Lin Cheng, Shu-Lu Chen
  • Patent number: 9425267
    Abstract: Transistors and methods of fabricating are described herein. These transistors include a field plate (108) and a charged dielectric layer (106) overlapping at least a portion of a gate electrode (102). The field plate (108) and charged dielectric layer (106) provide the ability to modulate the electric field or capacitance in the transistor. For example, the charged dielectric layer (106) provides the ability to control the capacitance between the gate electrode (102) and field plate (108). Modulating such capacitances or the electric field in transistors can facilitate improved performance. For example, controlling gate electrode (102) to field plate (108) capacitance can be used to improve device linearity and/or breakdown voltage. Such control over gate electrode (102) to field plate (108) capacitance or electric fields provides for high speed and/or high voltage transistor operation.
    Type: Grant
    Filed: March 14, 2013
    Date of Patent: August 23, 2016
    Assignee: FREESCALE SEMICONDUCTOR, INC.
    Inventors: Jenn Hwa Huang, James A. Teplik
  • Patent number: 9306093
    Abstract: A scribed photovoltaic device, comprising a photovoltaic device configured for generating electrical energy responsive to receiving solar radiation, the photovoltaic device comprising a plurality of electrically connected photovoltaic sections comprising a photovoltaic light absorbing chalcopyrite semiconductor region (“PLACS region”) disposed between first and second electrode regions. The photovoltaic sections can each comprise a scribe channel extending along and into two of the regions, wherein the scribe channel can comprise a pair of spaced opposing sidewalls of one of the regions, a pair of terraces comprising a pair of spaced opposing terrace shoulders, and a second pair of spaced opposing sidewalls of another one of the regions, with the spacing of the second pair of sidewalls being different than the spacing of the first pair of sidewalls.
    Type: Grant
    Filed: September 6, 2011
    Date of Patent: April 5, 2016
    Assignee: Fianium Ltd.
    Inventors: Brian W. Baird, Timothy D. Gerke
  • Patent number: 9299562
    Abstract: Materials, methods, structures and device including the same can provide a semiconductor device such as an LED using an active region corresponding to a non-polar face or surface of III-V semiconductor crystalline material. In some embodiments, an active diode region contains more non-polar III-V material oriented to a non-polar plane than III-V material oriented to a polar plane. In other embodiments, a bottom region contains more non-polar m-plane or a-plane surface area GaN than polar c-plane surface area GaN facing an active region.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: March 29, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Anthony J. Lochtefeld
  • Patent number: 9293580
    Abstract: An integrated circuit device and method for fabricating the integrated circuit device is disclosed. The method involves providing a substrate; forming a gate structure over the substrate; forming an epitaxial layer in a source and drain region of the substrate that is interposed by the gate structure; and after forming the epitaxial layer, forming a lightly doped source and drain (LDD) feature in the source and drain region.
    Type: Grant
    Filed: December 30, 2013
    Date of Patent: March 22, 2016
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ka-Hing Fung, Haiting Wang, Han-Ting Tsai
  • Patent number: 9269841
    Abstract: A CIS-based thin film solar cell has a backside electrode layer that is divided by a pattern (P1), and a CIS-based light absorption layer, and a transparent conductive film are sequentially formed on a substrate. The backside electrode layer comprises an intermediate layer on the surface that is in contact with the CIS-based light absorption layer, the intermediate layer being composed of a compound of a metal that constitutes the backside electrode layer and a group VI element that constitutes the CIS-based light absorption layer; the intermediate layer comprises a first intermediate layer portion which is formed on the upper surface and a second intermediate layer portion which is formed on the lateral surface that and faces the pattern (P1); and the film thickness of the second intermediate layer portion is larger than the film thickness of the first intermediate layer portion.
    Type: Grant
    Filed: June 16, 2011
    Date of Patent: February 23, 2016
    Assignee: SOLAR FRONTIER K.K.
    Inventors: Takuya Morimoto, Hiroki Sugimoto, Hideki Hakuma
  • Patent number: 9117946
    Abstract: A method of forming an integrated photonic semiconductor structure having a photodetector and a CMOS device may include forming the CMOS device on a first silicon-on-insulator region, forming a silicon optical waveguide on a second silicon-on-insulator region, and forming a shallow trench isolation (STI) region surrounding the silicon optical waveguide such that the shallow trench isolation electrically isolating the first and second silicon-on-insulator region. Within a first region of the STI region, a first germanium material is deposited adjacent a first side wall of the semiconductor optical waveguide. Within a second region of the STI region, a second germanium material is deposited adjacent a second side wall of the semiconductor optical waveguide, whereby the second side wall opposes the first side wall. The first and second germanium material form an active region that evanescently receives propagating optical signals from the first and second side wall of the semiconductor optical waveguide.
    Type: Grant
    Filed: January 15, 2013
    Date of Patent: August 25, 2015
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Solomon Assefa, William M. Green, Steven M. Shank, Yurii A. Vlasov
  • Patent number: 9048180
    Abstract: A low stress sacrificial cap layer 120 having a silicon oxide liner film 130, a low stress silicon film 140, and a silicon nitride film Alternatively, a low stress sacrificial cap layer 410 having a silicon oxide liner film 130 and a graded silicon nitride film 420. Also, methods 300, 500 for fabricating a transistor 20, 400 having a low stress sacrificial cap layer 120, 410.
    Type: Grant
    Filed: May 16, 2006
    Date of Patent: June 2, 2015
    Assignee: Texas Instruments Incorporated
    Inventors: Jiong-Ping Lu, Periannan Chidambaram, Srinivasan Chakravarthi
  • Patent number: 9029860
    Abstract: A structure includes a silicon substrate, a plurality of silicon rods on the silicon substrate, a silicon layer on the plurality of silicon rods, and a GaN substrate on the silicon layer.
    Type: Grant
    Filed: March 21, 2013
    Date of Patent: May 12, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Xianyu Wenxu, Yeon-hee Kim, Chang-youl Moon, Yong-young Park
  • Patent number: 8975634
    Abstract: An object is to suppress occurrence of oxygen deficiency. An oxide semiconductor film is formed using germanium (Ge) instead of part of or all of gallium (Ga) or tin (Sn). At least one of bonds between a germanium (Ge) atom and oxygen (O) atoms has a bond energy higher than at least one of bonds between a tin (Sn) atom and oxygen (O) atoms or a gallium (Ga) atom and oxygen (O) atoms. Thus, a crystal of an oxide semiconductor formed using germanium (Ge) has a low possibility of occurrence of oxygen deficiency. Accordingly, an oxide semiconductor film is formed using germanium (Ge) in order to suppress occurrence of oxygen deficiency.
    Type: Grant
    Filed: September 27, 2012
    Date of Patent: March 10, 2015
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Motoki Nakashima
  • Patent number: 8963157
    Abstract: A thin film transistor, an array substrate, and a manufacturing method thereof. The manufacturing method comprises: forming a buffer layer and an active layer sequentially on a substrate, and forming an active region through a patterning process; forming a gate insulating layer and a gate electrode sequentially; forming Ni deposition openings; forming a dielectric layer having source/drain contact holes in a one-to-one correspondence with the Ni deposition openings; and forming source/drain electrodes which are connected with the active region via the source/drain contact holes and the Ni deposition openings.
    Type: Grant
    Filed: November 13, 2012
    Date of Patent: February 24, 2015
    Assignee: BOE Technology Group Co., Ltd.
    Inventor: Yinan Liang
  • Patent number: 8963124
    Abstract: At least first and second Si1-xGex (0?x?1) layers are formed on an insulating film. At least first and second material layers are formed correspondingly to the at least first and second Si1-xGex (0?x?1) layers. A lattice constant of the first Si1-xGex (0?x?1) layer is matched with a lattice constant of the first material layer. A lattice constant of the second Si1-xGex (0?x?1) layer is matched with a lattice constant of the second material layer.
    Type: Grant
    Filed: March 17, 2009
    Date of Patent: February 24, 2015
    Assignee: Semiconductor Technology Academic Research Center
    Inventors: Masanobu Miyao, Hiroshi Nakashima, Taizoh Sadoh, Ichiro Mizushima, Masaki Yoshimaru
  • Patent number: 8889529
    Abstract: Heterojunction bipolar transistors are provided that include at least one contact (e.g., collector, and/or emitter, and/or base) formed by a heterojunction between a crystalline semiconductor material and a doped non-crystalline semiconductor material layer. A highly doped epitaxial semiconductor layer comprising a highly doped hydrogenated crystalline semiconductor material layer portion is present at the heterojunction between the crystalline semiconductor material and the doped non-crystalline semiconductor material layer. Minority carriers within the highly doped epitaxial semiconductor layer have a diffusion length that is larger than a thickness of the highly doped epitaxial semiconductor layer.
    Type: Grant
    Filed: March 15, 2013
    Date of Patent: November 18, 2014
    Assignee: International Business Machines Corporation
    Inventors: Bahman Hekmatshoar-Tabari, Tak H. Ning, Devendra K. Sadana, Ghavam G. Shahidi, Davood Shahrjerdi
  • Patent number: 8878176
    Abstract: A thin-film transistor with a fluorinated channel and fluorinated source and drain regions and methods of fabrication are provided. The thin-film transistor includes: a substrate; a semiconductor active layer of fluorine-doped metal-oxide formed on the substrate; fluorine-doped source and drain regions disposed adjacent to the semiconductor active layer; a gate electrode disposed over the semiconductor active layer, configured to induce a continuous conduction channel between the source and drain regions; and a gate dielectric material separating the gate electrode and the channel.
    Type: Grant
    Filed: August 10, 2012
    Date of Patent: November 4, 2014
    Assignee: The Hong Kong University of Science and Technology
    Inventors: Man Wong, Hoi Sing Kwok, Zhi Ye
  • Patent number: 8860031
    Abstract: A non-volatile semiconductor memory device according to an embodiment includes a semiconductor substrate and a transistor provided on the semiconductor substrate. The transistor includes a conductive layer, a gate insulating layer, a semiconductor layer, and an oxidation layer. The conductive layer functions as a gate of the transistor. The gate insulating layer contacts with a side surface of the conductive layer. The semiconductor layer has a side surface sandwiching the gate insulating layer with the conductive layer, extends a direction perpendicular to the semiconductor substrate, and functions as a body of the transistor. The oxidation layer contacts with the other side surface of the semiconductor layer. The semiconductor layer is made of silicon germanium. The oxidation layer is made of a silicon oxide.
    Type: Grant
    Filed: March 19, 2012
    Date of Patent: October 14, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Shinji Mori
  • Patent number: 8853673
    Abstract: A semiconductor device includes a gate electrode formed on a silicon substrate via a gate insulation film in correspondence to a channel region, source and drain regions of a p-type diffusion region formed in the silicon substrate at respective outer sides of sidewall insulation films of the gate electrode, and a pair of SiGe mixed crystal regions formed in the silicon substrate at respective outer sides of the sidewall insulation films in epitaxial relationship to the silicon substrate, the SiGe mixed crystal regions being defined by respective sidewall surfaces facing with each other, wherein, in each of the SiGe mixed crystal regions, the sidewall surface is defined by a plurality of facets forming respective, mutually different angles with respect to a principal surface of the silicon substrate.
    Type: Grant
    Filed: May 15, 2013
    Date of Patent: October 7, 2014
    Assignee: Fujitsu Semiconductor Limited
    Inventors: Yosuke Shimamune, Akira Katakami, Akiyoshi Hatada, Masashi Shima, Naoyoshi Tamura
  • Patent number: 8841701
    Abstract: The present disclosure provides a FinFET device. The FinFET device comprises a semiconductor substrate of a first semiconductor material; a fin structure of the first semiconductor material overlying the semiconductor substrate, wherein the fin structure has a top surface of a first crystal plane orientation; a diamond-like shape structure of a second semiconductor material disposed over the top surface of the fin structure, wherein the diamond-like shape structure has at least one surface of a second crystal plane orientation; a gate structure disposed over the diamond-like shape structure, wherein the gate structure separates a source region and a drain region; and a channel region defined in the diamond-like shape structure between the source and drain regions.
    Type: Grant
    Filed: August 30, 2011
    Date of Patent: September 23, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: You-Ru Lin, Cheng-Hsien Wu, Chih-Hsin Ko, Clement Hsingjen Wann
  • Patent number: 8829532
    Abstract: Semiconductor layer structure and a method for producing a structure are provided, including a substrate made of semiconductor material, on which a layer made of a second semiconductor material is situated, furthermore a region (3) enriched with impurity atoms, which region is situated either in layer (2) or at a specific depth below the interface between layer (2) and substrate (1), additionally a layer (4) within the region (3) enriched with impurity atoms, which layer comprises cavities produced by ion implantation, furthermore at least one epitaxial layer (6) applied to layer (2) and also a defect region (5) comprising dislocations and stacking faults within the layer (4) comprising cavities, the at least one epitaxial layer (6) being largely crack-free, and a residual strain of the at least one epitaxial layer (6) being less than or equal to 1 GPa.
    Type: Grant
    Filed: February 2, 2007
    Date of Patent: September 9, 2014
    Assignee: Siltronic AG
    Inventors: Brian Murphy, Maik Häberlen, Jörg Lindner, Bernd Stritzker
  • Patent number: 8803156
    Abstract: A method of manufacturing a heterojunction bipolar transistor, including providing a substrate comprising an active region bordered by shallow trench insulation regions; depositing a stack of a dielectric layer and a polysilicon layer over the substrate; forming a base window in the stack, the base window extending over the active region and part of the shallow trench insulation regions, the base window having a trench extending vertically between the active region and one of the shallow trench insulation regions; growing an epitaxial base material inside the base window; forming a spacer on the exposed side walls of the base material; and filling the base window with an emitter material. A HBT manufactured in this manner and an IC including such an HBT.
    Type: Grant
    Filed: August 9, 2011
    Date of Patent: August 12, 2014
    Assignee: NXP, B.V.
    Inventors: Tony Vanhoucke, Johannes Josephus Theodorus Marinus Donkers, Hans Mertens, Blandine Duriez, Evelyne Marie Josephe Fabienne Gridelet
  • Patent number: 8796687
    Abstract: A method of treating a sheet of semiconducting material comprises forming a sinterable first layer over each major surface of a sheet of semiconducting material, forming a second layer over each of the first layers to form a particle-coated semiconductor sheet, placing the particle-coated sheet between end members, heating the particle-coated sheet to a temperature effective to at least partially sinter the first layer and at least partially melt the semiconducting material, and cooling the particle-coated sheet to solidify the semiconducting material and form a treated sheet of semiconducting material.
    Type: Grant
    Filed: September 19, 2011
    Date of Patent: August 5, 2014
    Assignee: Corning Incorporated
    Inventors: Glen Bennett Cook, Prantik Mazumder, Mallanagouda Dyamanagouda Patil, Lili Tian, Natesan Venkataraman
  • Patent number: 8766273
    Abstract: It is possible to manufacture a large-size, high-accuracy organic EL display using a plastic substrate and an organic EL display using a roll-shaped long plastic substrate. The organic EL display includes an organic EL device A having at least a lower electrode 300, an organic layer including at least a light emitting layer, and an upper electrode 305 and a thin film transistor B on a transparent plastic substrate 100, a source electrode or drain electrode of the thin film transistor B is connected to the lower electrode 300, the plastic substrate 100 has a gas barrier layer 101a, the thin film transistor B is formed on the gas barrier layer 101a, the thin film transistor B includes an active layer 203 containing a non-metallic element which a mixture of oxygen (O) and nitrogen (N) and has a ratio of N to O (N number density/O number density) from 0 to 2, and the organic EL device A is formed at least on the gas barrier layer 101a or one the thin film transistor B.
    Type: Grant
    Filed: March 4, 2010
    Date of Patent: July 1, 2014
    Assignees: Sumitomo Chemical Company, Limited, Sumitomo Bakelite Co., Ltd.
    Inventors: Shigeyoshi Otsuki, Toshimasa Eguchi, Shinya Yamaguchi, Mamoru Okamoto
  • Patent number: 8759205
    Abstract: According to one embodiment, a method for manufacturing a semiconductor device, wherein an amorphous semiconductor film comprising a microcrystal is annealed using a microwave, to crystallize the amorphous semiconductor film comprising the microcrystal using the microcrystal as a nucleus.
    Type: Grant
    Filed: September 16, 2010
    Date of Patent: June 24, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Tomonori Aoyama, Yusuke Oshiki, Kiyotaka Miyano
  • Patent number: 8735894
    Abstract: The invention provides a light emitting diode package structure, including: a light emitting diode chip formed on a substrate; a composite coating layer formed on the light emitting diode chip, wherein the composite coating layer comprises a first coating layer and a second coating layer, and the composite coating layer has a reflectivity greater than 95% at the wavelength of 500-800 nm; a cup body formed on the substrate, wherein the cup body surrounds the light emitting diode chip; and an encapsulation housing covering the light emitting diode chip, wherein the encapsulation housing comprises a wavelength transformation material.
    Type: Grant
    Filed: March 15, 2012
    Date of Patent: May 27, 2014
    Assignee: Lextar Electronics Corporation
    Inventors: Pei-Song Cai, Tzu-Pu Lin, Szu-Wei Fu
  • Patent number: 8736952
    Abstract: A photonic crystal device comprising: a photonic crystal material having an initial ordered structure and a viewing surface, the initial ordered structure giving rise to a first optical effect detectable from the viewing surface; and a removal layer removably attached with the viewing surface or an opposing surface of the photonic crystal material opposite to the viewing surface; wherein mechanical removal of at least a portion of the removal layer results in a structural change in at least a portion of the initial ordered structure of at least a portion of the photonic crystal material respective to the portion of the removed removal layer, thereby resulting in a changed portion different from the initial ordered structure, the changed portion giving rise to a second optical effect detectable from the viewing surface and detectably different from the first optical effect.
    Type: Grant
    Filed: August 20, 2009
    Date of Patent: May 27, 2014
    Assignee: Opalux Incorporated
    Inventor: Andre Arsenault
  • Publication number: 20140110717
    Abstract: A structure includes a silicon substrate, a plurality of silicon rods on the silicon substrate, a silicon layer on the plurality of silicon rods, and a GaN substrate on the silicon layer.
    Type: Application
    Filed: March 21, 2013
    Publication date: April 24, 2014
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Xianyu WENXU, Yeon-hee KIM, Chang-youl MOON, Yong-young PARK
  • Patent number: 8659023
    Abstract: A monocrystalline layer having a first lattice constant on a monocrystalline substrate having a second lattice constant at least in a near-surface region, wherein the second lattice constant is different from the first lattice constant. Lattice matching atoms are implanted into the near-surface region. The near-surface region is momentarily melted. A layer is epitaxially deposited on the near-surface region that has solidified in monocrystalline fashion.
    Type: Grant
    Filed: September 11, 2012
    Date of Patent: February 25, 2014
    Assignee: Infineon Technologies Austria AG
    Inventors: Franz Hirler, Hans-Joachim Schulze
  • Patent number: 8648391
    Abstract: The product of the breakdown voltage (BVCEO) and the cutoff frequency (fT) of a SiGe heterojunction bipolar transistor (HBT) is increased beyond the Johnson limit by utilizing a doped region with a hollow core that extends down from the base to the heavily-doped buried collector region. The doped region and the buried collector region have opposite dopant types.
    Type: Grant
    Filed: March 23, 2012
    Date of Patent: February 11, 2014
    Assignee: Texas Instruments Incorporated
    Inventors: Jeffrey A. Babcock, Alexei Sadovnikov
  • Patent number: 8629446
    Abstract: Materials, methods, structures and device including the same can provide a semiconductor device such as an LED using an active region corresponding to a non-polar face or surface of III-V semiconductor crystalline material. In some embodiments, an active diode region contains more non-polar III-V material oriented to a non-polar plane than III-V material oriented to a polar plane. In other embodiments, a bottom region contains more non-polar m-plane or a-plane surface area GaN than polar c-plane surface area GaN facing an active region.
    Type: Grant
    Filed: April 1, 2010
    Date of Patent: January 14, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: Anthony J. Lochtefeld
  • Patent number: 8624295
    Abstract: A novel SRAM memory cell structure and method of making the same are provided. The SRAM memory cell structure comprises strained PMOS transistors formed in a semiconductor substrate. The PMOS transistors comprise epitaxial grown source/drain regions that result in significant PMOS transistor drive current increase. An insulation layer is formed atop an STI that is used to electrically isolate adjacent PMOS transistors. The insulation layer is substantially elevated from the semiconductor substrate surface. The elevated insulation layer facilitates the formation of desirable thick epitaxial source/drain regions, and prevents the bridging between adjacent epitaxial layers due to the epitaxial layer lateral extension during the process of growing epitaxial sour/drain regions. The processing steps of forming the elevated insulation layer are compatible with a conventional CMOS process flow.
    Type: Grant
    Filed: March 20, 2008
    Date of Patent: January 7, 2014
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Harry Chuang, Hung-Chih Tsai, Kong-Beng Thei, Mong-Song Liang
  • Patent number: 8611146
    Abstract: Non-volatile memory devices with two stacked layers of chalcogenide materials comprising the active memory device have been investigated for their potential as phase-change memories. The devices tested included GeTe/SnTe, Ge2Se3/SnTe, and Ge2Se3/SnSe stacks. All devices exhibited resistance switching behavior. The polarity of the applied voltage with respect to the SnTe or SnSe layer was critical to the memory switching properties, due to the electric field induced movement of either Sn or Te into the Ge-chalcogenide layer. One embodiment of the invention is a device comprising a stack of chalcogenide-containing layers which exhibit phase-change switching only after a reverse polarity voltage potential is applied across the stack causing ion movement into an adjacent layer and thus “activating” the device to act as a phase-change random access memory device or a reconfigurable electronics device when the applied voltage potential is returned to the normal polarity.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: December 17, 2013
    Assignee: Boise State University
    Inventor: Kristy A Campbell
  • Patent number: 8546249
    Abstract: A method of depositing polycrystalline silicon exclusively on monocrystalline first silicon surface portions of a substrate surface which besides the first surface portions additionally has insulator surface portions, comprising the steps of depositing boron on the first silicon surface portions in an amount which in relation to the first silicon surface portions respectively corresponds to more than a monolayer of boron, and depositing silicon on the first silicon surface portions treated in that way.
    Type: Grant
    Filed: February 15, 2008
    Date of Patent: October 1, 2013
    Assignee: IHP GmbH—Innovations for High Performance
    Inventors: Bernd Tillack, Bernd Heinemann, Yuji Yamamoto
  • Patent number: 8530907
    Abstract: A light source includes a hot electron source comprising a cathode that generates an electron beam and an anode comprising a germanium containing material positioned adjacent to the cathode. The anode is biased so that the electron beam accelerates towards the anode where some electrons are absorbed and then relax to both direct energy bands and indirect energy bands causing stimulation of low energy electrons from the indirect energy band to the direct energy band, thereby creating electroluminescence.
    Type: Grant
    Filed: June 29, 2011
    Date of Patent: September 10, 2013
    Assignee: Photonic Systems, Inc.
    Inventors: Jianxiao Chen, Charles H. Cox