Solid-state Devices Adapted For Rectifying, Amplifying, Oscillating, Or Switching Without Potential-jump Barrier Or Surface Barrier, E.g., Dielectric Triodes; Ovshinsky-effect Devices, Processes, Or Apparatus Peculiar To Manufacture Or Treatment Thereof, Or Of Parts Thereof (epo) Patents (Class 257/E45.001)
  • Patent number: 11889776
    Abstract: A variable resistance non-volatile memory element includes first and second electrodes and a variable resistance layer between the electrodes. The layer has a resistance value reversibly variable based on an electrical signal. The layer includes a first variable resistance layer that includes an oxygen deficient first metal oxide containing a first metal element and oxygen, and a second variable resistance layer that includes a composite oxide containing the first metal element, a second metal element different from the first metal element, and oxygen, and having a different degree of oxygen deficiency from the first metal oxide. The composite oxide has a lower degree of oxygen deficiency than the first metal oxide. At room temperature, the composite oxide has a smaller oxygen diffusion coefficient than a second metal oxide containing the first metal element and oxygen, and having the degree of oxygen deficiency equal to that of the composite oxide.
    Type: Grant
    Filed: June 23, 2021
    Date of Patent: January 30, 2024
    Assignee: Nuvoton Technology Corporation Japan
    Inventors: Ryutaro Yasuhara, Satoru Fujii, Takumi Mikawa, Atsushi Himeno, Kengo Nishio, Takehide Miyazaki, Hiroyuki Akinaga, Yasuhisa Naitoh, Hisashi Shima
  • Patent number: 11783894
    Abstract: Disclosed herein are a Gaussian sampling apparatus and method based on resistive RAM. The Gaussian sampling apparatus based on resistive RAM includes Resistive RAM (RRAM) in which a resistive switching layer is disposed between an upper electrode and a lower electrode, and a sampling controller, wherein the sampling controller is configured to perform an operation corresponding to an erase command of applying a reset voltage to the RRAM when a Gaussian error request is received from an outside of the Gaussian sampling apparatus, perform an operation corresponding to a program command of applying a set voltage to the RRAM after the operation corresponding to the erase command has been completed, perform an operation of reading resistance data from the RRAM, and provide a response to the outside of the Gaussian sampling apparatus by transmitting the resistance data of the RRAM as Gaussian error data.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: October 10, 2023
    Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
    Inventors: Moon-Seok Kim, Bong-Soo Lee, Jun-Ki Kang, Ki-Hong Kim
  • Patent number: 11696454
    Abstract: The present disclosure includes three dimensional memory arrays. An embodiment includes a first plurality of conductive lines separated from one another by an insulation material, a second plurality of conductive lines arranged to extend substantially perpendicular to and pass through the first plurality of conductive lines and the insulation material, and a storage element material formed between the first and second plurality of conductive lines where the second plurality of conductive lines pass through the first plurality of conductive lines. The storage element material is between and in direct contact with a first portion of each respective one of the first plurality of conductive lines and a portion of a first one of the second plurality of conductive lines, and a second portion of each respective one of the first plurality of conductive lines and a portion of a second one of the second plurality of conductive lines.
    Type: Grant
    Filed: May 3, 2021
    Date of Patent: July 4, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Fabio Pellizzer, Russell L. Meyer, Agostino Pirovano, Lorenzo Fratin
  • Patent number: 11694957
    Abstract: In a semiconductor device, a device structure is positioned over a substrate, where the device structure includes devices. A wiring structure of the semiconductor device is positioned over the substrate and coupled to at least one of the devices. The wiring structure includes at least one of programmable lines and programmable vertical interconnects, where the programmable lines extend along a top surface of the substrate and the programmable vertical interconnects extend along a vertical direction perpendicular to the top surface of the substrate. The programmable lines and the programmable vertical interconnects include a programmable material having a modifiable resistivity in that the programmable lines and the programmable vertical interconnects change between being conductive and being non-conductive in responsive to a current pattern delivered to the programmable lines and the programmable vertical interconnects.
    Type: Grant
    Filed: May 15, 2020
    Date of Patent: July 4, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Mark I. Gardner, H. Jim Fulford, Anton J. deVilliers
  • Patent number: 11683998
    Abstract: A semiconductor structure for a vertical phase change memory cell that includes a bottom electrode on a portion of a semiconductor substrate and a pair of vertical phase change bridge elements that are each on a portion of the bottom electrode. The semiconductor structure for the vertical phase change memory cell includes a dielectric material separating the pair of vertical phase change bridge elements and a top electrode over the pair of vertical phase change bridge elements.
    Type: Grant
    Filed: March 22, 2021
    Date of Patent: June 20, 2023
    Assignee: International Business Machines Corporation
    Inventors: Juntao Li, Kangguo Cheng, Carl Radens, Ruilong Xie
  • Patent number: 11616098
    Abstract: An example apparatus includes a three-dimensional (3D) memory array including a sense line and a plurality of vertical stacks. Each respective on of the vertical stacks includes a different respective portion of the sense line, a first memory cell coupled to that portion of the sense line, a second memory cell coupled to that portion of the sense line, a first access line coupled to the first memory cell and a second access line coupled to the second memory cell. The first and second access lines are perpendicular to the sense line.
    Type: Grant
    Filed: June 6, 2022
    Date of Patent: March 28, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Lingming Yang, Karthik Sarpatwari, Fabio Pellizzer, Nevil N. Gajera, Lei Wei
  • Patent number: 11581039
    Abstract: Various embodiments provide methods for configuring a phase-change random-access memory (PCRAM) structures, such as PCRAM operating in a single-level-cell (SLC) mode or a multi-level-cell (MLC) mode. Various embodiments may support a PCRAM structure being operating in a SLC mode for lower power and a MLC mode for lower variability. Various embodiments may support a PCRAM structure being operating in a SLC mode or a MLC mode based at least in part on an error tolerance for a neural network layer.
    Type: Grant
    Filed: January 18, 2021
    Date of Patent: February 14, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Win-San Khwa, Kerem Akarvardar, Yu-Sheng Chen
  • Patent number: 11581302
    Abstract: An ESD protection diode in a semiconductor device includes: a semiconductor substrate; a diode group that has a plurality of grouped VNW diodes, each of the VNW diodes having a VNW having a lower end and an upper end, that are formed on the semiconductor substrate and have a semiconductor material; and a top plate that is formed above the diode group and is a conductive layer electrically connected to the upper ends of the VNWs of the respective VNW diodes, and there is fabricated the semiconductor device that is capable of, even when large current flows through the VNW diode, suppressing current concentration and preventing damage of the VNW diode.
    Type: Grant
    Filed: August 21, 2020
    Date of Patent: February 14, 2023
    Assignee: SOCIONEXT INC.
    Inventor: Hidetoshi Tanaka
  • Patent number: 11563102
    Abstract: In a method of manufacturing a negative capacitance structure, a dielectric layer is formed over a substrate. A first metallic layer is formed over the dielectric layer. After the first metallic layer is formed, an annealing operation is performed, followed by a cooling operation. A second metallic layer is formed. After the cooling operation, the dielectric layer becomes a ferroelectric dielectric layer including an orthorhombic crystal phase. The first metallic film includes a oriented crystalline layer.
    Type: Grant
    Filed: September 21, 2020
    Date of Patent: January 24, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Chun-Chieh Lu, Carlos H. Diaz, Chih-Sheng Chang, Cheng-Yi Peng, Ling-Yen Yeh
  • Patent number: 11563174
    Abstract: A switching device includes first and second RF terminals disposed over a substrate, one or more strips of phase change material connected between the first and second RF terminals, a region of thermally insulating material that separates the one or more strips of phase change material from the substrate, and a heater structure comprising one or more heating elements that are configured to control a conductive connection between the first and second RF terminals by applying heat to the one or more strips of phase change material. Each of the one or more strips of phase change material includes a first outer face and a second outer face opposite from the first outer face. For each of the one or more strips of phase change material, at least portions of both of the first and second outer faces are disposed against one of the heating elements.
    Type: Grant
    Filed: April 9, 2020
    Date of Patent: January 24, 2023
    Assignee: Infineon Technologies AG
    Inventors: Dominik Heiss, Martin Bartels, Christoph Glacer, Christoph Kadow, Matthias Markert, Hans Taddiken, Hans-Dieter Wohlmuth
  • Patent number: 11544541
    Abstract: An artificial neuron device according to an embodiment of the present disclosure includes a first resistor connected between an input terminal and a first node; a capacitor connected between the first node and a ground terminal; a threshold switch connected between the first node and a second node; and a second resistor connected between the second node and the ground terminal, wherein, when an input voltage of a certain level is applied to the input terminal by time, a membrane potential occurs at the first node and a spike current flows through the second node. According to present disclosure, the artificial neuron device expresses the Integrate-and-Fire function, the rate coding ability, the SFA characteristics, and the chaotic activity of the biological neuron, and therefore may be widely used for the artificial neuron network device, the large-scale brain-inspired computing system, and the artificial intelligence (AI) system.
    Type: Grant
    Filed: July 30, 2019
    Date of Patent: January 3, 2023
    Assignee: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
    Inventors: Suyoun Lee, Joon Young Kwak, Hyunsu Ju, Byung-Ki Cheong
  • Patent number: 11508734
    Abstract: Some embodiments include an integrated assembly having digit lines extending along a first direction, and rails over the digit lines. The rails include semiconductor-material pillars alternating with intervening insulative regions. The rails have upper, middle and lower segments. A first insulative material is along the upper and lower segments of the rails. A second insulative material is along the middle segments of the rails. The second insulative material differs from the first insulative material in one or both of thickness and composition. Conductive gate material is along the middle segments of the rails and is spaced from the middle segments by the second insulative material. Channel regions are within the middle segments of the pillars, upper source/drain regions are within the upper segments of the pillars and lower source/drain regions are within the lower segments of the pillars. Some embodiments include methods of forming integrated assemblies.
    Type: Grant
    Filed: December 11, 2020
    Date of Patent: November 22, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Amirhasan Nourbakhsh, John K. Zahurak, Sanh D. Tang, Silvia Borsari, Hong Li
  • Patent number: 11482492
    Abstract: Some embodiments include an integrated assembly having a base which includes first circuitry. Memory decks are over the base. Each of the memory decks has a sense/access line coupled with the first circuitry. The memory decks and base are vertically spaced from one another by gaps. The gaps alternate in a vertical direction between first gaps and second gaps. Overlapping conductive paths extend from the sense/access lines to the first circuitry. The conductive paths include first conductive interconnects within the first gaps and second conductive interconnects within the second gaps. The first and second conductive interconnects are laterally offset relative to one another.
    Type: Grant
    Filed: July 10, 2020
    Date of Patent: October 25, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Raju Ahmed, Radhakrishna Kotti, David A. Kewley, Dave Pratt
  • Patent number: 11456351
    Abstract: Disclosed are a thin film structure and an electronic device including the same. The disclosed thin film structure includes a dielectric material layer between a first material layer and a second material layer. The dielectric material layer includes a dopant in a matrix material having a fluorite structure. The dielectric material layer is uniformly doped with a low concentration of the dopant, and has ferroelectricity.
    Type: Grant
    Filed: February 9, 2021
    Date of Patent: September 27, 2022
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Taehwan Moon, Jinseong Heo, Sangwook Kim, Yunseong Lee
  • Patent number: 11380693
    Abstract: A structure includes a word line, a bit line, and an anti-fuse cell. The anti-fuse cell includes a reading device, a programming device, and a dummy device. The reading device includes a first gate coupled to the first word line, a first source/drain region coupled to the bit line, and a second source/drain region. The first source/drain region and the second source/drain region are on opposite sides of the first gate. The programming device includes a second gate, a third source/drain region coupled to the second source/drain region, and a fourth source/drain region. The third source/drain region and the fourth source/drain region are on opposite sides of the second gate. The dummy device includes a third gate, a fifth source/drain region coupled to the fourth source/drain region, and a sixth source/drain region. The fifth source/drain region and the sixth source/drain region are on opposite sides of the third gate.
    Type: Grant
    Filed: August 6, 2019
    Date of Patent: July 5, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Meng-Sheng Chang, Yao-Jen Yang
  • Patent number: 11335730
    Abstract: A vertical resistive switching memory device is provided that includes a resistive random access memory (ReRAM) stack embedded in a material stack of alternating layers of an interlayer dielectric material and a recessed electrode material. A selector device encapsulates a portion of the ReRAM stack and is present in an undercut region that is laterally adjacent to each of the recessed electrode material layers of the material stack.
    Type: Grant
    Filed: December 3, 2019
    Date of Patent: May 17, 2022
    Assignee: International Business Machines Corporation
    Inventors: Takashi Ando, Praneet Adusumilli, Reinaldo Vega, Cheng Chi
  • Patent number: 9368750
    Abstract: A method for fabricating an intermediate member of an electronic element, comprises: preparing a glass substrate as a support substrate having a first surface; forming a first inorganic film that contains silicon and has a second surface and a third surface opposite to the second surface, in such a manner that the first surface of the support substrate is in contact with the second surface of the first inorganic film; forming a first polyimide film containing fluorine on the third surface of the first inorganic film; and forming a second inorganic film containing silicon on the first polyimide film.
    Type: Grant
    Filed: November 4, 2015
    Date of Patent: June 14, 2016
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventor: Yuka Isaji
  • Patent number: 9040960
    Abstract: The present invention relates to a heterojunction tunneling effect transistor (TFET), which comprises spaced apart source and drain regions with a channel region located therebetween and a gate stack located over the channel region. The drain region comprises a first semiconductor material and is doped with a first dopant species of a first conductivity type. The source region comprises a second, different semiconductor material and is doped with a second dopant species of a second, different conductivity type. The gate stack comprises at least a gate dielectric and a gate conductor. When the heterojunction TFET is an n-channel TFET, the drain region comprises n-doped silicon, while the source region comprises p-doped silicon germanium. When the heterojunction TFET is a p-channel TFET, the drain region comprises p-doped silicon, while the source region comprises n-doped silicon carbide.
    Type: Grant
    Filed: March 30, 2012
    Date of Patent: May 26, 2015
    Assignee: International Business Machines Corporation
    Inventors: Xiangdong Chen, Haining S. Yang
  • Patent number: 9035272
    Abstract: A memristor structure has two electrodes sandwiching an insulating region, and includes a nanoparticle providing a conducting path between the two electrodes, wherein either the insulating region comprises an inorganic material and nanoparticle comprises a solid nanoparticle or a core/shell nanoparticle or the insulating region comprises an inorganic or organic material and the nanoparticle comprises a core/shell nanoparticle.
    Type: Grant
    Filed: January 16, 2013
    Date of Patent: May 19, 2015
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Xia Sheng, Zhang-Lin Zhou, Richard H. Henze
  • Patent number: 9029248
    Abstract: A nano-ionic memory device is provided. The memory device includes a substrate, a chemically inactive lower electrode provided on the substrate, a solid electrolyte layer provided on the lower electrode and including a silver (Ag)-doped telluride (Te)-based nano-material, and an oxidizable upper electrode provided on the electrolyte layer.
    Type: Grant
    Filed: October 30, 2008
    Date of Patent: May 12, 2015
    Assignee: EWHA University-Industry Collaboration Foundation
    Inventors: William Jo, Ah-Reum Jeong
  • Patent number: 9012970
    Abstract: A memory array including a plurality of memory cells. In one embodiment, each memory cell is coupled to an electrically conductive gate material. A word line is coupled to the gate material at a contact interface level. A pair of pillars is comprised of an insulating material that extends below the contact interface level. Also, a method to prevent a gate contact from electrically connecting to a source contact for a plurality of memory cells on a substrate. The method includes depositing and etching gate material to partially fill a space between the pillars and to form a word line for the memory cells, forming a pair of pillars comprised of an insulating material and depositing a gate contact between the pair of pillars such that the gate contact electrically couples the gate material at a contact interface level and the insulating material extends below the contact interface level.
    Type: Grant
    Filed: August 16, 2012
    Date of Patent: April 21, 2015
    Assignee: International Business Machines Corporation
    Inventors: Matthew J. BrightSky, Chung H. Lam, Gen P. Lauer
  • Patent number: 9000412
    Abstract: A switching device and an operating method for the same and a memory array are provided. The switching device comprises a first solid electrolyte, a second solid electrolyte and a switching layer. The switching layer is adjoined between the first solid electrolyte and the second solid electrolyte.
    Type: Grant
    Filed: July 30, 2012
    Date of Patent: April 7, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Wei-Chih Chien, Feng-Ming Lee, Ming-Hsiu Lee
  • Patent number: 9000409
    Abstract: The present application discloses a 3D semiconductor memory device having 1T1R memory configuration based on a vertical-type gate-around transistor, and a manufacturing method thereof. A on/off current ratio can be well controlled by changing a width and a length of a channel of the gate-around transistor, so as to facilitate multi-state operation of the 1T1R memory cell. Moreover, the vertical transistor has a smaller layout size than a horizontal transistor, so as to reduce the layout size effectively. Thus, the 3D semiconductor memory device can be integrated into an array with a high density.
    Type: Grant
    Filed: June 30, 2011
    Date of Patent: April 7, 2015
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Zongliang Huo, Ming Liu
  • Patent number: 8999733
    Abstract: An RRAM includes a resistive layer including a dielectric layer and surplus oxygen ions or nitrogen ions from a treatment on the dielectric layer after the dielectric layer is formed. When the RRAM is applied with a voltage, the oxygen ions or nitrogen ions occupy vacancies in the dielectric layer to increase resistance of the resistive layer. When the RRAM is applied with another voltage, the oxygen ions or nitrogen ions are removed from the vacancies to lower the resistance of the resistive layer.
    Type: Grant
    Filed: October 28, 2014
    Date of Patent: April 7, 2015
    Assignee: Nanya Technology Corp.
    Inventors: Chun-I Hsieh, Chang-Rong Wu, Neng-Tai Shih
  • Patent number: 8993374
    Abstract: Memory cells and memory cell structures having a number of phase change material gradients, devices utilizing the same, and methods of forming the same are disclosed herein. One example of forming a memory cell includes forming a first electrode material, forming a phase change material gradient on the first electrode material, and forming a second electrode material on the phase change material gradient.
    Type: Grant
    Filed: August 3, 2012
    Date of Patent: March 31, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Davide Erbetta, Luca Fumagalli
  • Patent number: 8981328
    Abstract: A resistive random access memory cell formed in an integrated circuit includes first and second resistive random access memory devices, each including an anode and a cathode. The anode of the second resistive random access memory device is connected to the anode of the first resistive random access memory device. A programming transistor has a first source/drain terminal connected to a programming potential node, a second source/drain terminal connected to the anodes of the first and second resistive random access memory devices, and a gate connected to a program-enable node.
    Type: Grant
    Filed: May 9, 2014
    Date of Patent: March 17, 2015
    Assignee: Microsemi SoC Corporation
    Inventors: Jonathan Greene, Frank Hawley, John McCollum
  • Patent number: 8969846
    Abstract: A variable resistance memory according to the present embodiment includes a memory cell including an ion source electrode including metal atoms, an opposite electrode, an amorphous silicon film formed between the ion source electrode and the opposite electrode, and a polysilicon film formed between the amorphous silicon film and the ion source electrode.
    Type: Grant
    Filed: July 14, 2014
    Date of Patent: March 3, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Hirohisa Kawasaki
  • Patent number: 8969843
    Abstract: According to one embodiment, a memory device includes first and second conductive layers, a variable resistance portion, and a multiple tunnel junction portion. The variable resistance portion is provided between the first and second conductive layers. The multiple tunnel junction portion is provided between the first conductive layer and the variable resistance portion, and includes first, second, and third tunnel insulating films, and first and second nanocrystal layers. The first nanocrystal layer between the first and second tunnel insulating films includes first conductive minute particles. The second nanocrystal layer between the second and third tunnel insulating films includes second conductive minute particles.
    Type: Grant
    Filed: May 29, 2013
    Date of Patent: March 3, 2015
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Ryuji Ohba
  • Patent number: 8962466
    Abstract: A metal oxide formed by in situ oxidation assisted by radiation induced photo-acid is described. The method includes depositing a photosensitive material over a metal surface of an electrode. Upon exposure to radiation (for example ultraviolet light), a component, such as a photo-acid generator, of the photosensitive material forms an oxidizing reactant, such as a photo acid, which causes oxidation of the metal at the metal surface. As a result of the oxidation, a layer of metal oxide is formed. The photosensitive material can then be removed, and subsequent elements of the component can be formed in contact with the metal oxide layer. The metal oxide can be a transition metal oxide by oxidation of a transition metal. The metal oxide layer can be applied as a memory element in a programmable resistance memory cell. The metal oxide can be an element of a programmable metallization cell.
    Type: Grant
    Filed: May 15, 2013
    Date of Patent: February 24, 2015
    Assignee: Macronix International Co., Ltd.
    Inventors: Feng-Min Lee, Erh-Kun Lai, Wei-Chih Chien, Ming-Hsiu Lee, Chih-Chieh Yu
  • Patent number: 8946672
    Abstract: A resistance changing element according to the present invention comprises a first electrode (101) and a second electrode (103); and an ion conducting layer (102) that is formed between the first electrode (101) and the second electrode (103) and that contains at least oxygen and carbon.
    Type: Grant
    Filed: November 8, 2010
    Date of Patent: February 3, 2015
    Assignee: NEC Corporation
    Inventors: Munehiro Tada, Koichiro Okamoto, Toshitsugu Sakamoto, Hiromitsu Hada
  • Patent number: 8921819
    Abstract: A resistive random access memory (RRAM) unit includes at least one bit line extending along a first direction, at least one word line disposed on a substrate and extending along a second direction so as to intersect the bit line, a hard mask layer on the word line to isolate the word line from the bit line, a first memory cell on a sidewall of the word line, and a second memory cell on the other sidewall of the word line.
    Type: Grant
    Filed: November 13, 2012
    Date of Patent: December 30, 2014
    Assignee: Powerchip Technology Corporation
    Inventors: Chan-Ching Lin, Chen-Hao Huang, Tzung-Bin Huang, Chun-Cheng Chen, Ching-Hua Chen
  • Patent number: 8921821
    Abstract: Some embodiments include a method of forming a memory cell. A first portion of a switching region is formed over a first electrode. A second portion of the switching region is formed over the first portion using atomic layer deposition. The second portion is a different composition than the first portion. An ion source region is formed over the switching region. A second electrode is formed over the ion source region. Some embodiments include a memory cell having a switching region between a pair of electrodes. The switching region is configured to be reversibly transitioned between a low resistive state and a high resistive state. The switching region includes two or more discrete portions, with one of the portions not having a non-oxygen component in common with any composition directly against it in the high resistive state.
    Type: Grant
    Filed: January 10, 2013
    Date of Patent: December 30, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Shuichiro Yasuda, Noel Rocklein, Scott E. Sills, D. V. Nirmal Ramaswamy, Qian Tao
  • Patent number: 8916949
    Abstract: A resistive memory device and a method for manufacturing the same are provided. The resistive memory device includes a lower electrode, a variable resistive layer formed on the lower electrode and configured so that the volume thereof is contracted or expanded according to temperature, and an upper electrode formed on the variable resistive layer. At least a portion of the lower electrode is configured to be electrically connected to the upper electrode.
    Type: Grant
    Filed: December 18, 2012
    Date of Patent: December 23, 2014
    Assignee: SK Hynix Inc.
    Inventors: Hyo Seob Yoon, Han Woo Cho
  • Patent number: 8912519
    Abstract: Provided are a variable resistive memory device and a method of fabricating the same. The variable resistive memory device includes an interlayer insulating film having an opening therein, the opening exposing a surface of a first electrode which is disposed at a bottom of the opening. A variable resistive layer is formed in the opening and a second electrode is formed on the variable resistive layer. The variable resistive layer has a sidewall that is separated from an inner side surface of the opening to define a gap between the sidewall of the variable resistive layer and the inner side surface of the opening.
    Type: Grant
    Filed: February 13, 2013
    Date of Patent: December 16, 2014
    Assignee: SK Hynix Inc.
    Inventor: Keun Lee
  • Patent number: 8912524
    Abstract: Embodiments of the present invention generally relate to a resistive switching nonvolatile memory element that is formed in a resistive switching memory device that may be used in a memory array to store digital data. The memory element is generally constructed as a metal-insulator-metal stack. The resistive switching portion of the memory element includes a getter and/or a defect portion. In general, the getter portion is an area of the memory element that is used to help form, during the resistive switching memory device's fabrication process, a region of the resistive switching layer that has a greater number of vacancies or defects compared to the remainder of resistive switching layer. The defect portion is an area of the memory element that has a greater number of vacancies or defects compared to the remainder of the resistive switching layer, and is formed during the resistive switching memory device's fabrication process.
    Type: Grant
    Filed: November 8, 2013
    Date of Patent: December 16, 2014
    Assignees: SanDisk 3D LLC, Kabushiki Kaisha Toshiba
    Inventors: Yun Wang, Tony Chiang, Imran Hashim
  • Patent number: 8912515
    Abstract: A method for manufacturing a memory cell device includes forming a bottom electrode comprising a pipe-shaped member, a top, a bottom and sidewalls having thickness in a dimension orthogonal to the axis of the pipe-shaped member, and having a ring-shaped top surface. A disc shaped member is formed on the bottom of the pipe-shaped member having a thickness in a dimension coaxial with the pipe-shaped member that is not dependent on the thickness of the sidewalls of the pipe-shaped member. A layer of phase change material is deposited in contact with the top surface of the pipe-shaped member. A top electrode in contact with the layer of programmable resistive material. An integrated circuit including an array of such memory cells is described.
    Type: Grant
    Filed: March 10, 2011
    Date of Patent: December 16, 2014
    Assignee: Macronix International Co., Ltd.
    Inventor: Hsiang-Lan Lung
  • Patent number: 8901527
    Abstract: An RRAM includes a resistive layer including a dielectric layer and surplus oxygen ions or nitrogen ions from a treatment on the dielectric layer after the dielectric layer is formed. When the RRAM is applied with a voltage, the oxygen ions or nitrogen ions occupy vacancies in the dielectric layer to increase resistance of the resistive layer. When the RRAM is applied with another voltage, the oxygen ions or nitrogen ions are removed from the vacancies to lower the resistance of the resistive layer.
    Type: Grant
    Filed: July 2, 2010
    Date of Patent: December 2, 2014
    Assignee: Nanya Technology Corp.
    Inventors: Chun-I Hsieh, Chang-Rong Wu, Neng-Tai Shih
  • Patent number: 8895953
    Abstract: A programmable memory element can include an insulating layer formed over a bottom structure; an opening formed in the insulating layer; a sidewall structure formed next to side surfaces of the opening; a tapered structure formed within the opening adjacent to the sidewall structure; and a solid electrolyte forming at least a portion of a structure selected from: the bottom structure, the sidewall structure, and the tapered structure.
    Type: Grant
    Filed: July 10, 2012
    Date of Patent: November 25, 2014
    Assignee: Adesto Technologies Corporation
    Inventors: Jeffrey Allan Shields, John Ross Jameson, Wei Ti Lee
  • Patent number: 8895948
    Abstract: According to one embodiment, a memory device includes a first electrode, a second electrode and a resistance change film. The resistance change film is connected between the first electrode and the second electrode. An ion metal is introduced in a matrix material in the resistance change film. A concentration of the ion metal in a first region on the first electrode side of the resistance change film is higher than a concentration of the ion metal in a second region on the second electrode side of the resistance change film A layer made of only the ion metal is not provided in the memory device.
    Type: Grant
    Filed: February 25, 2013
    Date of Patent: November 25, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Yusuke Arayashiki
  • Patent number: 8895952
    Abstract: A nonvolatile storage device is formed by laminating a plurality of memory cell arrays, the memory cell array including a plurality of word lines, a plurality of bit lines, and memory cells. The memory cell includes a current rectifying device and a variable resistance device, the variable resistance device includes a lower electrode, an upper electrode, and a resistance change layer including a conductive nano material formed between the lower electrode and the upper electrode, one of the variable resistance devices provided adjacent to each other in the laminating direction has titanium oxide (TiOx) between the resistance change layer and the lower electrode serving as a cathode, the other of the variable resistance devices provided adjacent to each other in the laminating direction has titanium oxide (TiOx) between the resistance change layer and the upper electrode serving as a cathode.
    Type: Grant
    Filed: February 24, 2012
    Date of Patent: November 25, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Shigeki Kobayashi, Kazuhiko Yamamoto, Kenji Aoyama, Shigeto Oshino, Kei Watanabe, Shinichi Nakao, Satoshi Ishikawa, Takeshi Yamaguchi
  • Patent number: 8890109
    Abstract: Provided are resistive random access memory (ReRAM) cells including resistive switching layers and thermally isolating structures for limiting heat dissipation from the switching layers during operation. Thermally isolating structures may be positioned within a stack or adjacent to the stack. For example, a stack may include one or two thermally isolating structures. A thermally isolating structure may directly interface with a switching layer or may be separated by, for example, an electrode. Thermally isolating structures may be formed from materials having a thermal conductivity of less than 1 W/m*K, such as porous silica and mesoporous titanium oxide. A thermally isolating structure positioned in series with a switching layer generally has a resistance less than the low resistance state of the switching layer. A thermally isolating structure positioned adjacent to a switching layer may have a resistance greater than the high resistance state of the switching layer.
    Type: Grant
    Filed: December 20, 2012
    Date of Patent: November 18, 2014
    Assignees: Intermolecular, Inc., Kabushiki Kaisha Toshiba, SanDisk 3D LLC
    Inventors: Yun Wang, Tony P. Chiang, Tim Minvielle, Takeshi Yamaguchi
  • Patent number: 8889521
    Abstract: A method of depositing a silver layer includes forming a plurality of openings in a dielectric layer to expose a top surface of a structure comprising a resistive memory layer on top of a p-doped silicon-containing layer on top of a conductive structure, depositing a first metal layer comprising a tungsten layer overlying the top surface of the structure, wherein a first metal material of the first metal layer contacts a resistive memory material of the resistive memory layer and exposing the first metal layer in a bath comprising a solution of silver species having an alkaline pH for a predetermined time to form a silver metal layer from the silver species from the solution overlying the resistive memory material, wherein the silver species is reduced by the first metal material, and wherein the first metal material is solubilized while forming the silver metal layer.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: November 18, 2014
    Assignee: Crossbar, Inc.
    Inventors: Steven Patrick Maxwell, Sung-Hyun Jo
  • Patent number: 8872147
    Abstract: A method for manufacturing a nonvolatile semiconductor storage device according to an embodiment includes laminating a first wire extending in a first direction, and a film made into a variable resistance element made of a metallic material, which are laminated in order on a semiconductor substrate, dividing, into a plurality of pieces, the film made into the variable resistance element, in the first direction and a second direction, forming an interlayer insulating film between the plurality of pieces formed by dividing the film made into the variable resistance element in the second direction, and oxidizing the metallic material of the film made into the variable resistance element, and laminating an upper electrode and a second wire extending in the second direction, which are laminated in order on the film made into the variable resistance element and the interlayer insulating film.
    Type: Grant
    Filed: August 13, 2012
    Date of Patent: October 28, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Toshiharu Tanaka
  • Patent number: 8847195
    Abstract: Memory cells and methods of forming the same and devices including the same. The memory cells have first and second electrodes. An amorphous semiconductor material capable of electronic switching and having a first band gap is between the first and second electrodes. A material is in contact with the semiconductor material and having a second band gap, the second band gap greater than the first band gap.
    Type: Grant
    Filed: December 24, 2009
    Date of Patent: September 30, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Chandra Mouli, Roy Meade
  • Patent number: 8841644
    Abstract: Thermal isolation in memory cells is described herein. A number of embodiments include a storage element, a selector device formed in series with the storage element, and an electrode between the storage element and the selector device, wherein the electrode comprises an electrode material having a thermal conductivity of less than 0.15 Watts per Kelvin-centimeter (W/K-cm).
    Type: Grant
    Filed: July 6, 2012
    Date of Patent: September 23, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Elijah V. Karpov, David L. Kencke
  • Patent number: 8841645
    Abstract: Some embodiments include a memory device and methods of forming the same. The memory device can include an electrode coupled to a memory element. The electrode can include different materials located at different portions of the electrode. The materials can create different dielectrics contacting the memory elements at different locations. Various states of the materials in the memory device can be used to represent stored information. Other embodiments are described.
    Type: Grant
    Filed: September 14, 2012
    Date of Patent: September 23, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Durai Vishak Nirmal Ramaswamy, Kirk D. Prall
  • Patent number: 8841649
    Abstract: Three dimension memory arrays and methods of forming the same are provided. An example three dimension memory array can include a stack comprising a plurality of first conductive lines separated from one another by at least an insulation material, and at least one conductive extension arranged to extend substantially perpendicular to the plurality of first conductive lines, such that the at least one conductive extension intersects a portion of at least one of the plurality of first conductive lines. Storage element material is formed around the at least one conductive extension. Cell select material is formed around the at least one conductive extension.
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: September 23, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Federico Pio
  • Patent number: 8829484
    Abstract: Some embodiments include methods of forming memory structures. An electrically insulative line is formed over a base. Electrode material is deposited over the line and patterned to form a pair of bottom electrodes along the sidewalls of the line. Programmable material is formed over the bottom electrodes, and a top electrode is formed over the programmable material. The bottom electrodes may each contain at least one segment which extends at angle of from greater than 0° to less than or equal to about 90° relative to a planar topography of the base. Some embodiments include memory structures having a bottom electrode extending upwardly from a conductive contact to a programmable material, with the bottom electrode having a thickness of less than or equal to about 10 nanometers. Some embodiments include memory arrays and methods of forming memory arrays.
    Type: Grant
    Filed: August 26, 2013
    Date of Patent: September 9, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Scott E. Sills
  • Patent number: 8822973
    Abstract: Some embodiments include a memory cell that contains programmable material sandwiched between first and second electrodes. The memory cell can further include a heating element which is directly against one of the electrodes and directly against the programmable material. The heating element can have a thickness in a range of from about 2 nanometers to about 30 nanometers, and can be more electrically resistive than the electrodes. Some embodiments include methods of forming memory cells that include heating elements directly between electrodes and programmable materials.
    Type: Grant
    Filed: February 14, 2014
    Date of Patent: September 2, 2014
    Assignee: Micron Technology, Inc.
    Inventor: Jun Liu
  • Patent number: 8822968
    Abstract: According to one embodiment, a nonvolatile memory device includes a first wiring layer. The device includes a second wiring layer intersecting with the first wiring layer. And the device includes a first memory layer provided at a position where the first wiring layer and the second wiring layer intersect. And the first memory layer contacts with the first wiring layer, and the first wiring layer is a layer which is capable of supplying a metal ion to the first memory layer.
    Type: Grant
    Filed: August 31, 2012
    Date of Patent: September 2, 2014
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Hideki Inokuma