Auxiliary Starting Or Holding Electrode Patents (Class 313/170)
  • Patent number: 7649187
    Abstract: The invention is directed to an arrangement for generating extreme ultraviolet (EUV) radiation based on a plasma that is generated by electric discharge. It is the object of the invention to provide a novel possibility for radiation sources based on an electric discharge by which a long lifetime of the electrodes that are employed and the largest possible solid angle for bundling the radiation emitted from the plasma are achieved. According to the invention, this object is met by providing coated electrodes in the form of two endless strip electrodes which circulate over guide rollers and which have at a short distance between them an area in which the electric discharge takes place.
    Type: Grant
    Filed: May 31, 2007
    Date of Patent: January 19, 2010
    Assignee: XTREME Technologies GmbH
    Inventors: Guido Hergenhan, Christian Ziener, Frank Flohrer