Abstract: The motion system for a CMM includes a measuring axis with an air bearing, a control unit for determining a position of the measuring probe in a reference frame and outputting the position as a measuring result. The first air bearing includes a guideway, slide having a slide surface and a gas outlet within the slide surface. The gas outlet is for providing a gas cushion in a gap between the slide surface and the guideway. A cover is arranged around the slide so a gap is provided between the cover and the guideway and a hollow space is provided between the cover and the slide. A wiper is arranged on the cover. A nozzle unit is supplied by a second gas supply line and for providing a high-pressure gas flow directed onto the guideway.

Abstract: The target holding jig which holds a spherical target including a reflection mechanism for reflecting measurement light emitted from a light source, and brings the target and an end surface of an object to be measured into contact with each other, includes a supporting portion configured to support the target being in contact with the object to be measured, a guide portion disposed on a side of the supporting portion facing the object to be measured, regulating a contact position of the target with the object to be measured in a short side direction of the end surface of the object to be measured, and restricting the movement of the target in the short side direction of the end surface of the object to be measured, and a coupling portion fixed to the supporting portion, and removably coupled to the object to be measured.

Abstract: A spherical-form measuring apparatus includes a turntable 5, a holding unit 10 for holding the sphere 20, and a probe 6 for measuring a contour of a sphere part 22 of the sphere 20. The holding unit 10 includes a base part 12, a vertical holding part 14 and an inclined holding part 16 which are placed at separate positions on the base part 12. The vertical holding part 14 holds the stem part 24 of the sphere 20 with it set in a direction perpendicular to the turntable 5. The inclined holding part 16 holds the stem part 24 with it set in a direction at an angle. The vertical and inclined holding part 14, 16 are disposed such that their axial lines meet at an intersection point P and such that the distance from the point P to the vertical holding part 14 agrees with the distance from the point P to the inclined holding part 16.

Abstract: A detecting gauge with high accuracy mainly comprises a machine table, a detecting set, a clamping apparatus, a detecting apparatus, and a sliding apparatus. Particularly, the sliding apparatus includes a sliding rail disposed on a machine table and a sliding base slidably disposed on said sliding rail. A sliding groove is disposed on both sides of the sliding rail, an embedding portion is formed on the sliding base for matching the sliding groove, and a plurality of rollers are embedded on a surface of said embedding portion which is in contact with said sliding groove. By matching the embedding portion with the sliding groove, the sliding base can be slid and moved precisely and smoothly on the sliding rail, and a target to be detected can be stably held by the clamping apparatus, whereby the detecting apparatus can obtain the measurement with high accuracy.

Abstract: A mechanical device for maintaining parallelism includes first, second, third and fourth bars. The first side surface of the first bar and the first side surface of the second bar are bridged by a first flexure, leaving a gap between the bottom surface of the first bar and the upper surface of the second bar; the second side surface of the second bar and the second side surface of the third bar are bridged by a second flexure, leaving a gap between the bottom surface of the second bar and the upper surface of the third bar; and the first side surface of the third bar and the first side surface of the fourth bar are bridged by a third flexure, leaving a gap between the bottom surface of the third bar and the upper surface of the fourth bar.

Abstract: There is provided a jig for measuring a runout of a flange surface of a hub unit adapted to be fitted between a plurality of plate-shaped projecting portions of a road wheel mounting flange of a deformed type including the plurality of plate-shaped projecting portions. The projecting portions are formed on an outer circumferential surface of a hub wheel serving as a rotating side member of a road wheel hub unit so as to project radially. Each of the projecting portions has a bolt insertion hole in a distal end portion thereof. The jig is positioned adjacent to a flange surface of the projecting portions so as to form an annular continuous surface.

Abstract: A system for positioning an object includes a base and a platform for detachably retaining the object. A first linear actuator is pivotably coupled to a first pivot axis of the platform and a first pivot axis of the base. A second and a third linear actuator are pivotably coupled to a second pivot axis of the base and the first pivot axis of the platform. A fourth linear actuator is pivotably coupled to the second pivot axis of the base and a second pivot axis of the platform. The first, second, third and fourth linear actuators being selectably adjustable in length to position the platform at a select position about a predetermined arc of travel.

Abstract: A surface texture measuring instrument includes: a measuring device that includes a detector for detecting surface texture of a workpiece and an X-axis movement mechanism for moving the detector in a measurement direction; an elevation inclination adjuster capable of adjusting an elevation position and an inclination angle of a table on which the measuring device is mounted; a stage on which the workpiece is mounted; and a controller that controls the measuring device and the elevation inclination adjuster. The controller includes: a measurement controller that controls the X-axis movement mechanism to conduct a preliminary measurement and main measurement of the workpiece; a computing unit that acquires a result of the preliminary measurement from the detector and obtains an inclination angle of the workpiece at which the workpiece is inclined to the measurement direction; and a positioning controller for adjusting the inclination angle of the table based on the obtained inclination angle.

Abstract: A pivot joint has a first structure comprising a ball mounted in a receptacle, wherein the location of the ball is held with respect to the receptacle, and a second structure mounted on and movable with respect to the ball, wherein the second structure has at least one bearing surface which defines its position with respect to the ball. The ball may be held in location by contact with the receptacle at at least two positions. At least one of the positions of contact may be adjustable.

Abstract: A positioning device for positioning an object includes a platform, a slide rail vertically extending from the platform, two standard units, and a retaining unit. The standard units are slidably mounted to the slide rail to abut against a first side of the object to cooperatively define a position reference plane for the object. The retaining unit includes a fixing block fixed to the high standard unit, a slide bar slidably mounted to the fixing block, a holding arm fixed to the slide bar to abut against a second side opposite to the first side of the object, and a spring to bias the slide bar to ensure that the holding arm abuts against the second side of the object.

Abstract: A motorized leveling stage capable of adjusting the angular position of a work piece relative to a reference plane includes an upper stage, a lower stage, and a hinge coupling corresponding edges of the two stages together for relative pivotal movement of the stages. A first spring pivotally biases the upper and lower stages toward each other about the axis of the hinge. A slide is disposed for sliding movement on an upper surface of the lower stage in a direction generally perpendicular to the hinge axis. The slide includes an upper surface defining an inclined plane disposed in sliding abutment with a lower surface of the upper stage such that movement of the slide toward and away from the hinge respectively raises and lowers the upper stage relative to the lower stage. A motorized drive assembly is operable to control movement of the slide relative to the hinge.

Abstract: A positioning device for positioning an object includes a platform, a slide rail vertically extending from the platform, two standard units, and a retaining unit. The standard units are slidably mounted to the slide rail to abut against a first side of the object to cooperatively define a position reference plane for the object. The retaining unit includes a fixing block fixed to the high standard unit, a slide bar slidably mounted to the fixing block, a holding arm fixed to the slide bar to abut against a second side opposite to the first side of the object, and a spring to bias the slide bar to ensure that the holding arm abuts against the second side of the object.

Abstract: The present invention provides a strip-like holding gripper which holds a semiconductor wafer when measuring a shape of the semiconductor wafer, wherein a side where the semiconductor wafer is held has a round shape, a groove which holds an edge of the semiconductor wafer along a side surface of the round shape portion is provided on the side surface, and the groove comes into contact with the edge of the semiconductor wafer from a periphery of the wafer to hold the semiconductor wafer. As a result, it is possible to provide the gripper, which can stably hold the wafer in a fixed state even if the gripper is inclined when holding the wafer, a holding method, and a shape measuring apparatus.

Abstract: A method for manufacturing a turbine nozzle assembly using a fixture including a biasing mechanism. The method includes moving the biasing mechanism from a biased first position to a second position using at least one of hydraulic, pneumatic, and electrical power, positioning at least one datum of the turbine nozzle assembly adjacent at least one datum location point on the fixture, and aligning the turbine nozzle assembly at least one datum with the at least one datum location point by releasing the biasing mechanism such that the biasing mechanism moves from the second position into contact with the turbine nozzle assembly.

Abstract: A measuring apparatus for measuring a workpiece (2), comprising a turntable (1) for receiving the workpiece (2), a base plate (3) with a turntable bearing, and a foundation (12) on which the base plate (3) rests. The turntable (1) comprises a vertical shaft (W) which is situated beneath the turntable (1) and is held by means of the turntable bearing in the base plate (3). The turntable baring comprises an axial bearing (9) at a bottom face end (13) of the shaft (W) which is spaced from the turntable (1). The shaft (W) is rotatably held on the axial bearing in such a way that the weight (G) of the workpiece (2), when received by the turntable (1), is introduced into the foundation (12) through the turntable (1), the shaft (W) and the axial bearing (9).

Abstract: A structure and process for producing an even cut for window covering horizontal slat sets includes a cutting sleeve attached at opposite ends of the slats of a window covering horizontal slat set to be cut which gather in selective ones of the slates together for cutting in a way which minimizes collective bowing and ripping of the finished surface immediately adjacent the cut ends of the slats. The cutting sleeves can be spaced to hold groupings of 1, 2, 3, 4, 5, 6, 7, or more slats. Embodiments of the cutting sleeves can have two main opposite walls or eliminate one wall in favor of a comb topography which can load from the side.

Abstract: A static/dynamic multi-function measuring device for linear unit, includes a foundation, a multi-direction sliding unit having eddy current detector, a linear motor, a linear unit with a sensing element and an optical measuring unit; the static/dynamic multi-function measuring device uses the linear motor to drive the multi-direction sliding unit with low friction to provide a non-contact measurement of a parallel alignment of the linear unit, a linear accuracy measurement of the linear unit, and a vibration measurement of the linear unit to detect the parallel alignment of the linear unit and the linear accuracy of a slide rail and so on, the static/dynamic multi-function measuring device also measures errors of the linear unit and a slide block moving in the vibrating and the rolling direction.

Abstract: Position measurement apparatus, such as hexapod co-ordinate measuring machine, is described that comprises a thrust frame and a metrology frame. The thrust frame comprises a load carrying base connected to a moveable platform by a plurality of powered extendable legs. The metrology frame comprising a metrology base attached to the load carrying base by a base attachment mechanism such as kinematic mounts. The base attachment mechanism is arranged to prevent any distortions of the load carrying base being transmitted to the metrology base.

Abstract: Determination of the actual position of the rotation axis of a transportation mechanism relative to a reference axis, in particular relative to gravity, is performed with at least one inclination sensor mounted to the transportation mechanism having at least one measurement axis, and comprises the measurement of the inclination of at least the one inclination sensor along the at least one measurement axis in a first rotation position of the transportation mechanism, and the measurement of the inclination of the at least one inclination sensor along the at least one measurement axis in a second rotation position. The actual position of the rotation axis of the transportation mechanism may be determined from the measurement values of the inclination sensor and the angular separation between the rotation positions. The process is suitable in particular for a process to align the rotation axis of a transportation mechanism and for a process for replacing a transportation mechanism.

Abstract: A cutting mat comprises: a baseboard defined with an assembling hole and at least one notch on a side of the assembling hole, a positioning member detachably disposed in the assembling hole, and a cutting board. The positioning member includes a circular body and at least one positioning protrusion formed on a side of the circular body and located in a corresponding position to the notch of the baseboard. The cutting board is formed at the bottom thereof with a circular recess for engaging the circular body of the positioning member, so that the cutting board is rotatably superposed on the baseboard.

Abstract: Disclosed is an a mountable leveling support clamp comprising a mounting plate, a support arm having a horizontal and vertical portion incorporating a leveling indicator and threaded throughbore with an adjusting screw having a locking plate on one end and a handle on the other. The support clamp is designed to temporarily fix the positioning of a horizontal member to an upright as permanent fasteners are applied thereto, whereupon the support clamp is removed.

Abstract: An XY stage module, a storage system including the same and a method for facating the XY stage module are provided. The XY stage module includes: a base; an XY stage horizontally moving above the base in a first direction and a second direction that is orthogonal to the first direction; a supporting unit disposed at the base for elastically supporting the XY stage; a stiffener for preventing the XY stage from being rotated; and a position sensor having a movable comb-shaped structure disposed at one side of the stiffener and having at least one movable comb and a fixed comb-shaped structure fixed on the base and having at least one fixed comb meshed with the movable comb to be separated at a predetermined gap for measuring a movement of the XY stage in the first direction and the second direction.

Abstract: The invention provides a circularity and cylindrical shape measuring device that can decrease the measurement errors generated due to the weight of a measured workpiece.

Abstract: An apparatus for supporting a platform (84) relative to a base (82), has first, second, and third flexible shaft couplings (80). Each flexible shaft coupling (80) is mechanically coupled between the platform (84) and the base (82). Each flexible shaft coupling (80) has a rigid intermediate member (12) and a platform coupling (104) with a plurality of folded sheet flexures (20). Each folded sheet flexure (20) is coupled to the rigid intermediate member (12) on one side of a fold (36) and coupled to the platform (84) on the opposite side of the fold (36). Each flexible shaft coupling (80) also has a base coupling (102) with a plurality of folded sheet flexures (20) wherein each folded sheet flexure (20) is coupled to the rigid intermediate member (12) on one side of a fold (36) and coupled to the base (82) on the opposite side of the fold (36).

Abstract: This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.

Abstract: A marking system includes a fixture having a base and means for receiving a pair of jaws in an installed condition. The fixture includes means for articulating the installed jaws relative to the base with at least first and second rotational degrees of freedom. A pair of the jaws includes a first jaw having a surface portion generally concave and complementary to a suction side portion of an airfoil of a first turbine engine element. A second jaw has a surface portion generally convex and complementary to a pressure side portion of the airfoil.

Abstract: A positioning apparatus has a stage, guide elements provided on both ends of the stage, and drive elements which are provided at one of both ends of the stage and move the stage along the guide elements. Like linear guide rails 61A, 61B and linear guide bearings 23A, 23B, two guide elements are provided in an area where a ball screw shaft 52 serving as a drive element is placed. One guide element is provided in an area where a non-drive element is provided.

Abstract: A manufacturing cell having a plurality of work stations, where at least one of the work station comprises a metalworking machine, and where at least one metalworking machine is provided with a modular tooling apparatus. The modular tooling apparatus consists of a base having one or more attachment surfaces, and one or more inserts that can be inserted semi-permanently to the attachment surfaces. The attachment surface is typically a pocket in the surface of the base. The insert has a workpiece support feature that can support and/or secure the workpiece into the proper position and orientation for machining. The base, pockets and inserts are configured to provide a characteristic location and orientation for the workpiece relative to the base, and to the metalworking machine.

Abstract: A method enables a component to be secured for inspection. The method comprises providing a tool including a first clamping member and a second clamping member coupled to a guide rail assembly, fixedly securing the first clamping member to the guide rail assembly, slidably coupling the second clamping member to the guide rail assembly such that the second clamping member is substantially parallel to the first clamping member, and securing the component within the tool between the first and second clamping members such that the first and second clamping members are fixedly secured in position with respect to the guide rail assembly.

Abstract: The body tool has a rectangular shape with two projections and a central passage for a Pinewood Derby® car body. The holes in one projection align with the other projection. A child places a car body into the passage so the kerf for an axle aligns with the holes in the projections. Alternately, the body alignment tool has two jaws upon a threaded rod closed by a wing nut that grasp a car body. The child then drills through the holes and the car body to straighten the kerf to accept an axle. The child then removes the car body from the body tool and inserts an axle into the new kerf.

Abstract: An ultrasonic-welding apparatus including: a cradle, onto which two work pieces are mounted, and which can rotate around an axis vertical to the welding surface of the work pieces; a welding horn, which carries out welding using ultrasonic energy while sandwiching the two work pieces between it and the cradle; a transmission-type laser sensor which measures the fixed part of the work pieces after welding, rotating on the cradle, in the condition that the welding horn is apart from the work pieces after welding; and an optical sensor including a light-emitting part, a light-receiving part, a connecting part on which the light-emitting and light-receiving parts are mounted, and an adjusting part that rotates the connecting part around two axes.

Abstract: An apparatus provided with wedge-shaped elements is proposed for the precision positioning of objects 37 to be measured or machined. A wedge-shaped translational body 32 is carried by two bearing wedges 24, 26. In accordance with the invention the wedges can be independently translated in the x direction. The body is translated in the z direction by moving the bearing wedges over an equal distance but in opposite directions. The body is translated in the y direction by moving the bearing wedges over an equal distance in the same direction. The mutually moving parts of the apparatus are carried by means of fluid bearings. A high precision is thus obtained, because fewer errors due to non-infinite stiffnesses and error motions are accumulated. A laser measuring apparatus 74, 38, 40 is used for measuring and adjusting the position of the object carrier 35.

Abstract: An angle measuring system that includes a rotor that rotates about an axis of rotation. A scanning unit is spaced from the rotor and the scanning unit is attached to a stator. The angle measuring system further includes a base and a coupling connected to the base and the stator so that a torsion-proof connection between the base and the stator results, wherein the coupling permits radial and axial compensating movements of the stator with respect to the base and the axis of rotation, wherein a first stop at the base and a second stop at the stator limit the radial and axial compensating movements.

Abstract: An assembly jig includes a jig frame, workpiece supports provided in the jig frame for supporting a workpiece, and actuators for moving the workpiece supports relative to the jig frame. Based on the results obtained by measuring the positions of reference points of the jig frame and the positions of the workpiece supports by means of a position measurement device, positional coordinates of the workpiece supports relative to a coordinate system fixed to the jig frame are calculated, and the actuators are operated so as to make the deviation of the calculated positional coordinates from the preset positional coordinates a predetermined value or less, thereby automatically correcting the misalignment of the workpiece supports relative to the jig frame. Thus, it is possible to easily and accurately correct the deteriorated precision of an assembly jig caused by the influence of aging and thermal expansion.

Abstract: The speed and precision in positioning a moving table in the X-axis and Y-axis directions is enhanced dramatically. An X-Y stage apparatus is provided, in which a moving table is supported relative to a stationary base, with slight displacements made possible within the XY plane, and in which a component mounted and placed on the moving table can be positioned within the XY plane. The X-Y stage apparatus includes an elastic hinge that is flexible only in one or two direction among the X-axis, Y-axis, and Z-axis directions, and rigid in directions of the other axes. The moving table is supported relative to the stationary base with slight displacements made possible in the XY plane, using an elastic deformation of each of the elastic hinges in the flexible direction. Furthermore, the moving table can be slightly displaced within the XY plane, using an X-axis linear motor, and a Y-axis linear motor.

Abstract: An apparatus and method for positioning packaged semiconductor devices having different rectangular shapes and sizes. A positioning apparatus includes an adjustable alignment guide releasably coupled to a base. The adjustable alignment guide may be positioned along a first axis to partially define a recess into which the packaged semiconductor devices are placed during positioning. The positioning apparatus may also include additional adjustable alignment guides that may be positioned along the first or a second axis to further define the recess into which the packaged semiconductor device is to placed during positioning. The adjustable alignment guides may have alignment surfaces against which the integrated circuit rests when placed into the recess that is partially defined by the alignment surfaces.

Abstract: The aim of the invention is to create a centering device having a simple structure for flat components (3), especially glass panels, which at least along their lateral edges can be surrounded by a plastic frame (4) by injection/foaming or encapsulation. To this end the invention provides for the centering device (16) to be embodied by springs (18 and 19) having the same elastic constant which are positioned opposite each other and both engage the component (3).

Abstract: A coordinate measuring apparatus includes a bending-resistant measuring table configured as a ribbed hollow body.

Abstract: A slide is mounted on a slideway with a pair of tongue and groove interconnections. The slideway has a pair of engagement rails or tongues provided on a pair of cantilevered arms. The rails are spring biased within a pair of grooves formed in the slideway. An adjustment screw drives the arms apart to adjustably spring bias the rails into the grooves.

Abstract: A tool for hanging fascia board includes three parts. A first part consists of a t-bar having two pieces attached perpendicularly together and designed to be removably mounted on the end of a rafter board with the flat elongated member lying against a side wall of the rafter and with a portion of the second perpendicular member overlying the top of the rafter and removably affixed to it through the use of nails driven through openings in the second perpendicular member. A support hanger is pivotably mounted to the t-bar and has a slot sized and configured to slidably receive a fascia board. A depth adjuster is mounted on the support hanger and may be reciprocated and fixed in a desired position to adjust the depth of the slot of the support hanger. Thus, the depth of the slot may be adjusted to facilitate attachment of fascia boards of varying dimensions such as, for example, 2×4, 2×6, 2×8, 2×10, and 2×12.

Abstract: A printed circuit board processing machine has: a table that can travel in a X-direction carrying a printed circuit board thereon; a cross rail arranged so as to straddle the table; a plurality of sliders supported for independently movement in a Y-direction by the cross rail; a plurality of spindles supported for movement in a Z-direction by the sliders; a magnetic rail of a linear-motor fixed to the cross rail; and a plurality of coils of the linear-motor fixed to the sliders so as to oppose the magnetic rail.

Abstract: The invention concerns a movement transmission unit and a movement transmission apparatus employing the same. The movement transmission transmits at least two movement components, each possessing one degree of freedom of movement, from an input-side (6) to an output-side (82, 84), which movement then has at least two coupled degrees of freedom of movement, or vice versa. The invention also concerns one transmission unit (2) per input-side (6) degree of freedom of movement, i.e multiple transmission units (2), which are functionally bound together in parallel by means of their respective output sections (8). Each transmission unit (2) possesses an immobile, solidly fixed first section (4). Its input facility is a second section (6), which is bend linked to the fixed first section (4) by means of a unified linkage structure encompassing parts (22, 26, 34; 28, 36) and forming what becomes known as a first “parallelogram linkage”.

Abstract: A machine and a method for assembling a vehicle body is disclosed as including a locating pin (26) formed with a seating flange portion (35) having a work seating surface (35a) and a clamp arm (39) contained in the locating pin to be operable in a clamping or unclamping movement responsive to an extrusion and retraction of a clamp cylinder (34). A detection pin (47) is mounted for an extruding and extracting movement from the work seating surface (35a), with the detection pin (47), a shaft (44) ad a proximity switch (48) forming a work seating detection mechanism (49). A mutual engagement between the locating pin (26) and a locating bore (R) allows a panel W3 to be positioned, simultaneously detecting the presence of seating of the panel W3 responsive to a movement of the detection pin (47).

Abstract: A displaceable X/Y coordinate measurement table having two orthogonally arranged measurement mirrors for interferometric position determination is described. The displaceable measurement table, a mirror body carrying the measurement mirrors, and the receptacle for the substrate are embodied as separate components. The mirror body has a number of support points on its upper side and lower side for supporting a substrate or a receptacle above the upper side and for supporting the mirror body on the lower points above the measurement table. The mirror geometry is therefore unaffected by the weight of various substrates. The two measurement mirrors are integrated into a one-piece mirror body made of a material having an extremely low coefficient of thermal expansion. The described embodiments have frame-shaped openings in the X/Y coordinate measurement table and mirror body, which makes the measurement table suitable for both reflected and transmitted applications.

Abstract: An angle rotating device for wheel alignment test has a disk seat, a lever bar inserted in the disk seat, a cover plate covering the disk seat, a solid rotating disk disposed on the cover plate, a ring disposed in the solid rotating disk, and a hollow disk disposed in the cover plate. The solid rotating disk has a center shaft. The ring has an annular face having a plurality of circular apertures receiving a plurality of balls. A sleeve is disposed in a center of the ring. A plurality of springs are connected to the sleeve and the ring.

Abstract: The present invention preferably employs non-contact, small-displacement, capacitive sensors to determine Abbe errors due to the pitch, yaw, or roll of a near linear mechanical stage that are not indicated by an on-axis position indicator, such as a linear scale encoder or laser interferometer. The system is calibrated against a precise reference standard so the corrections depend only on sensing small changes in the sensor readings and not on absolute accuracy of the sensor readings. Although the present invention is preferred for use in split-axis positioning systems with inertially separated stages, the invention can be employed in typical split-axis or stacked stage systems to reduce their manufacturing costs.

Abstract: A fixture assembly for holding a part to be measured in a specified and elevated orientation and being utilized in combination with an existing coordinate measurement machine. A transportable body is provided having a horizontally arrayed and upwardly facing platform. The coordinate measurement machine is adapted to be arranged in proximity to the transportable body. First, second and third datum blocks are secured upon the upwardly facing platform at first, second and third selected locations. Each of the datum blocks further includes an upwardly facing tapped hole for receiving a measurement target which is capable of being manipulated according to instructions provided by the coordinate measurement machine to define first, second and third datum planes according to a coordinate system defined for the part to be measured. A plurality of individual support units are secured upon the platform at locations specified by the coordinate measurement machine.

Abstract: A positioning staging apparatus comprises a base provided on a floor, a stage provided on the base and movable to the base, an output unit for outputting stage positioning information for moving the stage to a predetermined target position, a stage drive unit provided on the base for driving the stage and outputting the drive information, a stage control unit for controlling the stage drive unit to accelerate and decelerate the stage in accordance with the stage positioning information to stop the stage at the target position, a stage displacement detection unit for detecting the displacement of the stage driven by the stage drive unit to output the stage displacement information, and an anti-vibration unit provided between the floor and the base for applying to the base a force to suppress the vibration of the base generated by the movement of the stage. The anti-vibration unit generates the suppression force in accordance with one of the stage displacement information and the stage positioning information.

Abstract: A target base (10) for attaching an apparatus (13) to an object (11) has a substantially rigid body (12) with a mount surface (14) adapted to couple the apparatus (13) to the body (12), and a base surface. A suction cup (46) affixed to the base surface (18) of the target base (10) has a suction cavity (62) defined by a deformable sealing lip (64) at the perimeter of the suction cup (46). The sealing lip (64) and suction cavity (62) form with the object (11) a vacuum chamber (66). A vacuum system (44) includes vacuum passages (50, 52) for communicating a vacuum pressure to the vacuum chamber (66). One or more contact members (60) are affixed to the body and have contact surfaces which engage the object (11) to provide consistent off-set positioning of the target base (10) with respect to the object (11).

Abstract: A thin board holding device 2A for holding a thin board in a plane state to measure the thickness of a thin board is disclosed, which has a number of spot supports 3 with adsorbing portion for holding a thin board 1 attached by suction to the top. The thin board 1 is held in a multiple point support fashion to the spot supports 3. By moving a measuring terminal of a measuring instrument to a measuring point on the thin board, which has one surface of the thin board 1 set on the thin board holding device 2A, the level of the other surface of the thin board 1 from a reference surface A supporting the thin board holding device at a reference position is measured. The dimension from the reference position A to a thin board adsorption surface 3a of the spot support 3 is used as a computational constant, and the thickness of the thin board is calculated from the measured level of the other surface of the thin board 1 and the computational constant.