Abstract: A pseudo-static test device and method for seismic behavior of connection joints of a wallboard. The device includes ground anchor holes, a support frame including a steel beam and two steel columns, and a test wallboard. A bottom plate of the steel beam is provided with at least two first connecting holes. A top plate each steel column is provided with a second connecting hole. A bottom plate of each steel column is provided with a third connecting hole. The bottom plate of the steel beam is provided with a connection joint assembly configured to hingedly or rigidly connect a top of the test wallboard to the steel beam. Each first connecting hole is connected to the second connecting hole through a flange assembly.

Abstract: An object stage bearing system can include an object stage, a hollow shaft coupled to the object stage, and an in-vacuum gas bearing assembly coupled to the hollow shaft and the object stage. The in-vacuum gas bearing assembly can include a gas bearing, a scavenging groove, and a vacuum groove. The gas bearing is disposed along an inner wall of the in-vacuum gas bearing assembly and along an external wall of the hollow shaft. The scavenging groove is disposed along the inner wall such that the scavenging groove is isolated from the gas bearing. The vacuum groove is disposed along the inner wall such that the vacuum groove is isolated from the scavenging groove and the gas bearing.

Abstract: A one-dimensional measurement device includes a display; a display controller that, based on first input information, displays on the display a rough arrangement and measurement order of each of a plurality of measurable elements of a measurable object and, based on second input information, displays on the display the arrangement and measurement order of each of the plurality of measurable elements where the entire arrangement is rotated in a predetermined direction by a predetermined angle while maintaining a positional relationship of each of the measurable elements; and an input that receives input of the first input information and the second input information.

Abstract: An air suspension support and motion guiding device having unequal-depth throttling chambers. Throttling plugs (10) are arranged regularly on an air suspension working surface, forming an array of throttling chambers with unequal depths. The invention improves the rotational stiffness per unit area for an air suspension working surface while ensuring support and stability of an air-suspended rail (1) and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Abstract: The invention relates to a support of a bearing pad of a sliding bearing. Provided is a bearing pad support connection including a bearing pad and a bearing pad support, whereby the bearing pad is connected to the bearing pad support by a pivot joint. The pivot joint includes a pivot pocket, and a pivot. The pivot pocket includes a sealing that abuts on the pivot of the pivot joint.

Abstract: The present teachings disclose various embodiments of a printing system for printing a substrate, in which the printing system can be housed in a gas enclosure, where the environment within the enclosure can be maintained as a controlled printing environment. A controlled environment of the present teachings can include control of the type of gas environment within the gas enclosure, the size and level particulate matter within the enclosure, control of the temperature within the enclosure and control of lighting. Various embodiments of a printing system of the present teachings can include a Y-axis motion system and a Z-axis moving plate that are configured to substantially decrease excess thermal load within the enclosure by, for example, eliminating or substantially minimizing the use of conventional electric motors.

Abstract: A hydrostatic bearing assembly including a bearing and two membrane throttles is provided. The bearing is adapted to be movably disposed on a slide rail and includes two sub-bearing portions that are disposed opposite to each other on two opposite sides of the slide rail. The two membrane throttles are adapted to be connected to a pump. The pump is adapted to supply a fluid through the two membrane throttles to flow between the two sub-bearing portions and the slide rail, and each of the membrane throttles includes a casing and a throttling membrane piece. At least one of the casing and the corresponding sub-bearing portion includes a chamber, an inlet and an outlet communicating with the chamber, and an outlet surface, wherein the pump is adapted to be connected to the inlet, and the slide rail is adapted to be disposed adjacent to the outlet. The throttling membrane piece is being positioned in the chamber covers on the outlet surface.

Abstract: The present teachings disclose various embodiments of a gas enclosure system can have a gas enclosure that can include a printing system enclosure and an auxiliary enclosure. In various embodiments of a gas enclosure system of the present teachings, a printing system enclosure can be isolated from an auxiliary enclosure. Various systems and methods of the present teachings can provide for the ongoing management of a printing system by utilizing various embodiments of isolatable enclosures. For example, various measurement and maintenance process steps for the management of a printhead assembly can be performed in an auxiliary enclosure, which can be isolated from a printing system enclosure of a gas enclosure system, thereby preventing or minimizing interruption of a printing process.

Abstract: An actuator includes a guide that extends in one direction and a slider that is movable in an axial direction with respect to the guide. Either the guide or the slider has a recessed cross-section, and the slider is guided by the guide while the other of the guide and the slider is restrained by three surfaces constituting the recessed cross-section.

Abstract: A film feeding apparatus and a control method thereof are provided. The film feeding apparatus comprises a delivery head. A surface of the delivery head has an air suction region and an air blowing region, and the air suction region and the air blowing region respectively include an air hole; and by cooperation of air suctioning through the air hole of the air suction region and air blowing through the air hole of the air blowing region, a film is kept nearby the delivery head in a non-contact manner in the case that the delivery head adsorbs the film.

Abstract: A hydrostatic/hydrodynamic fluid bearing assembly for a can bodymaker is provided. The hydrostatic/hydrodynamic fluid bearing assembly is separate from the ram body. The outboard guide bearing assembly includes a carriage assembly and a number of elongated journals. The carriage assembly includes a ram coupling, a crank coupling, and body defining a number of journal passages. The ram body is coupled to a ram coupling. The crank coupling is structured to be coupled to a crank arm. Each journal extends through a carriage assembly body journal passage. In this configuration, the ram body may form a can body in a traditional manner, but fluid bearing assembly fluid is not applied to the ram body. Instead, the fluid bearing assembly fluid is applied to the journals.

Abstract: A self-adjusting static pressured plane guide rail consists of a base, slider provided on the base and an upper pressing plate corresponding to the shoulders on both sides of the slider; wherein: each upper pressing plate's outer edge contacts the base to form a fulcrum and the upper pressing plate's inner edge acts as the force portion and a upper pressing block is set between force portion and the slider's shoulder and a metal wire is set between the upper pressing block's top surface and the force portion's bottom surface of upper pressing plate along the slider's sliding direction; the upper pressing plate is provided with pre-tightening bolt to connect the base in a fixed way. When vibration frequency changes during operation, the oil film gap changes accordingly due to pre-tightening bolt's elasticity of the mutual function and the metal wire's elasticity to always maintain oil film layer's rigidity function.

Abstract: A spindle phase indexing device for a machine tool is equipped with a guide rail detachably or fixedly attached to a table, a phase indexing jig configured to travel on the guide rail and which includes a first fitting part, a cutting tool including a second fitting part configured to be fitted with the first fitting part, and a controller configured to store therein a phase of a spindle at a point in time when the first fitting part and the second fitting part are fitted together. The first fitting part and the second fitting part are formed such that rotation of the cutting tool is constrained when the first fitting part and the second fitting part are fitted together.

Abstract: The present disclosure discloses an active compensating hydrostatic bearing which includes a body, a mass block and a elastic member. The body includes a compensation hole and holds the mass block and the elastic member inside. The elastic member is put between the mass block and the compensation hole for generating a compensation gap near the compensation hole. By resisting the compression from the mass block, the elastic member can control the compression of the compensating gap so as to stabilize the rigidity of the bearing.

Abstract: A turbocharger for an internal combustion engine, the turbocharger being supported by hydrostatic bearings in both a radial and an axial direction by a compressed air supplied from a compressor of the turbocharger and boosted in pressure by a separate boost pump to a high enough pressure to support the rotor of the turbocharger.

Abstract: A reciprocating compressor with a gas bearing is configured to support a portion between a cylinder and a piston by the gas bearing and induce a resonating motion of the piston by the use of compression coil springs. Therefore, a proper resonating motion of a vibrating body can be induced by the use of the gas bearing, without using plate springs, and accordingly manufacturing costs and the number of assembly processes can be reduced and the installation direction of the compressor can be freely designed.

Abstract: An air compressor device includes a cylinder housing and a supporting plate, a piston engaged in the cylinder housing and moved by a motor, the cylinder housing includes a partition for separating the cylinder housing into an upper compartment and a lower chamber, and a passage formed in the partition for allowing the pressurized air to flow from the chamber into the compartment of the cylinder housing, the compartment of the cylinder housing includes an inner diameter (D) greater than an inner diameter (d) of the chamber of the cylinder housing for allowing the pressurized air in the chamber to easily flow into the compartment of the cylinder housing with a relatively decreased pressure.

Abstract: Disclosed are an actively compensated stage including: a guide support having first and second guide surfaces perpendicular to each other; a table having first and second sides opposite the first and second guide surfaces and having air bearings on the first and second sides; a driving linear motor moving the table straight in an x-axial direction; and a plurality of magnetic actuators applying a magnetic preload between the guide support and the table and changing a magnetic force between the guide support and the table to compensate for 5-DOF motion errors generated in the table.

Abstract: Including a synthetic resin-made bearing base 2 having a base portion 4, an annular protruding portion 6 provided integrally on and protruding from one surface 5 of the base portion 4, and an air supply passage 11 which is provided in the annular protruding portion 6 and the base portion 4 and which has one end 7 open at a protruding end face 8 of the annular protruding portion 6 and another end 9 open at a outer peripheral surface 10 of the base portion 4; and a synthetic resin-made bearing body 3 having an annular recessed portion 42 which is formed in one surface 41 opposing the one surface 5 of the base portion 4 and which receives the annular protruding portion 6 of the bearing base 2, an annular recessed groove 44 which is open at another surface 43, and a plurality of air outlet holes 47 serving as inherent restrictors each of which communicates with the annular recessed groove 44 at one end 45 and opens to the annular recessed portion 42 at another end 46.

Abstract: Provided are X-Y constraining units having excellent yawing attitude precision as well as a stage apparatus and a vacuum stage apparatus, each including the X-Y constraining units. The X-Y constraining units 8 and 9 includes: Y-axis bases 81 and 91 respectively connected to Y-axis sliders 4 and 5 and having a through hole extending along Z direction; X-axis bases 82 and 92 respectively connected to an X-axis guide rail 6; shafts 83 and 93 respectively inserted into the through hole and fixed to the X-axis bases 82 and 92; and a plurality of bearing balls which are located between an inner peripheral surface of each of the through hole and an outer peripheral surface of the shafts 83 and 93, and are arranged so as to circumferentially surround the shafts 83 and 93. Each of the stage apparatus 1 and the vacuum stage apparatus includes the X-Y constraining units.

Abstract: A hydrostatic bearing adapted to be mated with a base includes a floating seat and a holder. The floating seat is made from a porous material and formed with a bearing surface that has a contour conforming to that of the base. The holder is coupled to the floating seat and cooperates with the floating seat to define an accommodating space for accommodating pressurized air. A pressurized air film is formed between the base and the bearing surface of the floating seat when the pressurized air discharges from the accommodating space through the floating seat so as to separate the floating seat from the base and so as to support the base.

Abstract: A hydrostatic rail guide includes a guide rail, a guide carriage, a hydrostatic supply device, a measurement device and a controller. The guide carriage is hydrostatically mounted on the guide rail and has a hydrostatic channel filled with oil. The oil keeps the guide carriage and the guide rail at a gap. The hydrostatic supply device is adapted for supplying the oil to the hydrostatic channel and adjusting the pressure of the oil. The measurement device is installed on the guide carriage and adapted for detecting the gap between the guide carriage and the guide rail and for producing a distance signal of the measured gap. The controller is connected to the hydrostatic supply device and the measurement device. The controller is adapted for controlling the hydrostatic supply device, based on the distance signal, in order to adjust the hydrostatic pressure of the oil after being pressurized.

Abstract: A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2?a, 2?b, 2?c, 2?d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2?a, 2?b, 2?c, 2?d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.

Abstract: A hydrostatic guide device includes: a fixed member having vertical guide faces; a movable member having vertical slide faces; a fluid supply device; a hydrostatic pocket to which a first fluid pressure based on a dimension of a gap is applied, and that urges the movable member with a first urging force; and a hydraulic pocket to which a second fluid pressure based on a dimension of a gap is applied, and that urges the movable member with a second urging force. A variation of the second fluid pressure is smaller than a variation of the first fluid pressure. When the first urging force and the second urging force are balanced with each other in a horizontal direction, the gap between the vertical guide face and the vertical slide face becomes a set value.

Abstract: A gas pressure bearing element including a housing element with recesses, wherein the housing element is closed by a cover, wherein the recesses are defined by rib shaped intermediary walls and/or other island shaped protrusions and define first intermediary spaces between the intermediary walls and/or the island shaped protrusions, wherein the cover is formed in sections by a cured encasement compound provided with an open pore reinforcement mat, wherein the encasement compound has a flat surface that is processed after curing and forms a bearing surface for the gas pressure bearing element, wherein the bearing surface includes a plurality of gas outlet nozzles which are formed by micro holes penetrating the cover, and wherein the micro holes are provided at locations under which the first intermediary spaces are arranged below the cover, which first intermediary spaces form channels for a pressurized gas supply for the gas outlet nozzles.

Abstract: A seal (1) for a hydrostatic linear guide with a given adjustment direction (5), with a longitudinal seal section (7, 7?) extending essentially parallel to the adjustment direction (5), and with a transverse seal section (8, 8?) extending essentially transverse to the adjustment direction (5), wherein a first lip seal with a projecting lip portion (12) extends along the longitudinal seal section and a second lip seal with a projecting lip portion (14) extends along the transverse seal section. A height of the projecting lip portion (12) of the first lip seal oscillates in a wave shape in the adjustment direction. With such a seal (1), both a high degree of static oil tightness and also a high degree of dynamic oil tightness are achieved for a hydrostatic linear guide.

Abstract: The present disclosure relates to a hydrostatic plate bearing, which comprises: a body, and a plurality of restrictors. Wherein, the body is formed with a mounting surface and an oil chamber that are disposed opposite to each other; the plural restrictors includes an orifice restrictor and a membrane restrictor while allowing the orifice restrictor and the membrane restrictor to be serially connected to each other. Operationally, a working fluid that is flowing into the body via the mounting surface is split to flow through the orifice restrictor and the membrane restrictor, in that the split flow of the working fluid that is flowing through the orifice restrictor is guided to flow into the oil chamber.

Abstract: A hydrostatic guide device includes: a fixed member having vertical guide faces; a movable member having vertical slide faces; a fluid supply device; a hydrostatic pocket to which a first fluid pressure based on a dimension of a gap is applied, and that urges the movable member with a first urging force; and a hydraulic pocket to which a second fluid pressure based on a dimension of a gap is applied, and that urges the movable member with a second urging force. A variation of the second fluid pressure is smaller than a variation of the first fluid pressure. When the first urging force and the second urging force are balanced with each other in a horizontal direction, the gap between the vertical guide face and the vertical slide face becomes a set value.

Abstract: A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2?a, 2?b, 2?c, 2?d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2?a, 2?b, 2?c, 2?d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.

Abstract: A static-pressure bearing apparatus that prevents vibrations, the apparatus including an orifice and a vent groove, such that a laminar-flow status may be maintained in the entire region of the routes of the ventilated pressurized gas. A stage equipped with the static-pressure bearing apparatus is also provided. The configurations, such as the shapes of the orifice 14, vent groove 11, and the exhaust groove 12, of the static-pressure bearing apparatus 1, are designed such that a laminar flow may be maintained in the entire region of the routes for ventilation of the pressurized gas. The vent groove 11 comprises the circular groove 11b and a plurality of distributing grooves 11a. The vent groove 11 is formed to be symmetrical about the centerline of the direction that the moving body 10 moves. The circular groove 11b is formed as a circle to surround the orifice 14.

Abstract: Non-contact, gas-ejecting bearings (3) are provided for conveying flexible glass sheets (13), such as LCD substrates, at high conveyance speeds, e.g., speeds of 40 meters/minute and above, e.g., 60 meters/minute. Gas is provided to the bearing's orifices (22) from a plenum which operates at a pressure Pplenum and the bearings have a calculated static pressure Pmidpoint at the midpoints (27) between the bearing's centermost orifice (26) and each of its nearest neighbors (28) in a horizontal direction which satisfies the relationship Pmidpoint/Pplenum?0.05. The bearings (3) can reduce the time-averaged, peak-to-peak variation in the spacing between a LCD substrate (13) traveling at, for example, 60 meters/minute and the face (20) of the bearing (3) to less than 500 microns, thus reducing the chances that the substrate (13) will hit and be damaged by the bearing (3).

Abstract: A linear guide including a rail and a carriage joined to an application platform by a plurality of screws, wherein at least one of the plurality of screws is a vacuum screw with an axial channel through which particles can be vacuumed out of an air gap between the rail and the carriage.

Abstract: An active/self-sensing compensating hydrostatic bearing is disposed between first and second structures to allow relative movement between the first and second structures. The hydrostatic bearing includes a body and a compensator. The body, fixed to the first structure and separated from the second structure by a first gap, has a chamber and an input passage and an output passage both communicating with the chamber. The compensator is disposed in the chamber. A compensating passage, communicating with the input passage and the output passage, is formed between the body and the compensator. A pressurized fluid flows from the input passage to the output passage through the compensating passage, and the pressurized fluid in the output passage flows to the first gap to maintain the stability and the rigidity for the relative movement between the first and second structures. A hydrostatic bearing module using the hydrostatic bearing is also disclosed.

Abstract: A linear slide table includes a slide rail, a loading table, at least one adjustment base, a plurality of wedges, and a plurality of adjustment elements. The loading table is disposed on the slide rail. The adjustment base is assembled below the loading table and disposed at one side of the slide rail. The wedges are disposed between the adjustment base and the loading table. The adjustment elements interconnect the wedges and the loading table for adjusting the relative positions of the wedges and the loading table, so as to adjust the distance between the adjustment base and the slide rail through the wedges pushing the adjustment base.

Abstract: A proposed aerostatic bearing arrangement for moving a device on a base structure, particularly in a vacuum environment, has at least one aerostatic bearing element comprising a bearing body having a load-carrying zone and a suction area. An electrostatic preloading unit having at least one electrode is associated with the at least one aerostatic bearing element, and a voltage can be applied to the electrode in such a way that a force component is generated in direction of the surface normal of the bearing body of the aerostatic bearing element.

Abstract: A holding member for use in a test includes a base made of silicon or glass and chips in which devices are formed is mountable thereon. Positioning members made of resist sheets are formed on the top surface of the base. A resist film is formed on the bottom surface of the base, and suction grooves (intersection portions, connection portions) and support members are formed in the resist film. Suction holes are formed in regions of the top surface of the base where the chips are mounted, wherein the suction holes are formed through the base and communicate with the suction groove.

Abstract: A variable flow-rate hydrostatic bearing includes a variable flow-rate adjusting portion that reduces the flow rate of fluid and then introduces the fluid into a pocket. The variable flow-rate adjusting portion is configured such that a fluid supply chamber is separated from a fluid storage chamber having a projection by a leaf spring that faces the projection with a predetermined clearance left therebetween, and the projection has an opening and a flow passage that is in communication with the pocket. In the variable flow-rate hydrostatic bearing, a fixed orifice that provides communication between the fluid supply chamber and the fluid storage chamber is formed in the leaf spring at a portion that does not face the projection.

Abstract: In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.

Abstract: A self-compensating hydrostatic planar bearing device comprises: a flow restrictor, disposed on a slide-table, having a flexible supporting unit extendedly formed on an end thereof; a first chamber, formed on another end of the flow restrictor opposite to that of the flexible supporting unit for communicating with a pipe disposed penetrating through the flow restrictor; and a second chamber, formed between the supporting unit and the slide-table for communicating with the first chamber through a communication hole. Operationally, when the load is changing, the pressure to the first chamber will be changing accordingly while the pressure change will be transferred to the second chamber through the communication hole for causing the flexible supporting unit to deform and thereby further causing the volume of the first chamber to change so that the pressure of the first chamber is consequently changed therewith and thus accomplishes a self-compensating process of the bearing's stiffness.

Abstract: A highly accurate static-pressure bearing apparatus that prevents vibrations may be achieved by configuring the apparatus comprising an orifice and a vent groove, etc., such that a laminar-flow status may be maintained in the entire region of the routes of the ventilated pressurized gas. A stage equipped with the static-pressure bearing apparatus is also provided. The configurations, such as the shapes of the orifice 14, vent groove 11, and the exhaust groove 12, etc., of the static-pressure bearing apparatus 1, are designed such that a laminar flow may be maintained in the entire region of the routes for ventilation of the pressurized gas. The vent groove 11 comprises the circular groove 11b and a plurality of distributing grooves 11a. The vent groove 11 is formed to be symmetrical about the centerline of the direction that the moving body 10 moves. The circular groove 11b is formed as a circle to surround the orifice 14.

Abstract: An air guide includes a slide member and a guide track. The guide track defines a guide hole slidably receiving the slide member. The guide track defines an air intake in an outer surface, a plurality of air outlets in an inner surface opposite to the sliding member, and a plurality of guide holes therein. The guide holes communicates the air intake with the air outlets. The guide track further defines a plurality of guide grooves in the inner surface, communicating with the air outlets.

Abstract: A vertically and horizontally effective air bearing comprising a base, an interface part that is movably arranged on the base, a piston that is movably arranged inside the interface part and supports a load, and a coupling element that couples the piston with the load. The load is supported in a manner to be isolated from vibration in the horizontal and vertical directions with respect to the base, and the coupling element preferably comprises a pin that is coupled to the piston. The coupling element is spaced from the load by at least one quarter of the length of the piston.

Abstract: An object support positioning device configured to position an object support includes first and second side-beams having respective first and second sliders mounted thereon, first and second motors configured to move the first and second sliders along each respective side beam, a cross beam mounted proximate first and second ends thereof to the first and second sliders respectively and having a third slider mounted thereto, the cross-beam and the first and second slider being mounted together, and a third motor configured to move the third slider longitudinally along the cross-beam, the third slider being adapted to support the one object support. A fluid bearing is provided in at least one of the first, second and third sliders, the fluid bearing including multiple bearing surfaces to exert reaction forces in a first direction, the first direction being perpendicular to the sliding direction of the at least one slider.

Abstract: A fluid bearing structure with uniform depths of bearing concaves and a method of forming the bearing concaves in the fluid bearing structure. Pipe parts are inserted into through holes formed in the bearing base to form fluid spout holes for spouting fluid between confronting bearing surfaces. Bearing concaves are formed around the fluid spout holes. The bearing base and the pipe parts are made of different materials. A coating layer is formed on the bearing base and the pipe parts by an anodic oxidation process. Thickness of the coating layer on the bearing base is different from thickness of the coating layer on the pipe parts since the base member and the pipe members are made of different materials. The material on which a coating layer grows quickly is selected for the bearing base and the material on which a coating layer grows slowly is selected for the pipe parts.

Abstract: A table for vacuum application which is guided by aerostatic bearing elements, having a fixedly mounted supporting structure and a tabletop which is displaceable in x-direction and y-direction with respect to the fixedly mounted supporting structure by means of slides. The slides are provided with the aerostatic bearing elements for guiding, these aerostatic bearing elements being connected to feed lines for supplying the gas required for the operation of the gas bearings and suction lines for removing this gas. The suction lines comprise at least one variable-length line arrangement having a first pipe member and a second pipe member which penetrate one inside the other without contacting, at least one sealing gap being provided between the pipe members.

Abstract: A seal (1) for a hydrostatic linear guide with a given adjustment direction (5), with a longitudinal seal section (7, 7?) extending essentially parallel to the adjustment direction (5), and with a transverse seal section (8, 8?) extending essentially transverse to the adjustment direction (5), wherein a first lip seal with a projecting lip portion (12) extends along the longitudinal seal section and a second lip seal with a projecting lip portion (14) extends along the transverse seal section. A height of the projecting lip portion (12) of the first lip seal oscillates in a wave shape in the adjustment direction. With such a seal (1), both a high degree of static oil tightness and also a high degree of dynamic oil tightness are achieved for a hydrostatic linear guide.

Abstract: A method of processing a substrate, including supporting a substrate using an air bearing produced via an air bearing assembly, the air bearing assembly having: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.

Abstract: A hydrostatic mounting of longitudinally displaceably arranged machine parts, which have pressure pockets for hydraulic fluid for building up a hydrostatic pressure between two machine parts, gaps connected to the pressure pockets and delimited by gap faces of the two machine parts, a drainage for the reception of hydraulic fluid flowing out from the gaps, and a seal, arranged effectively between the machine parts and surrounding the gaps, sealing against the escape of hydraulic fluid. An environment-side portion of the seal is at the same time a portion of the drainage creating a double-acting portion. The double-acting portion of the seal is formed from a material permeable to the hydraulic fluid.

Abstract: A hydrostatic mounting of longitudinally displaceably arranged machine parts, which have pressure pockets for hydraulic fluid for building up a hydrostatic pressure between two machine parts, gaps for the hydraulic fluid which are adjacent to the pressure pockets and are delimited by gap faces of the two machine parts, drainage for the reception of hydraulic fluid, and at least one seal arranged between the machine parts and surrounding the drainage sealing against leakage of hydraulic fluid out of the hydrostatic mounting. At least one circumferential portion of the seal has an outer sealing lip and an inner sealing lip. The inner sealing lip is adjacent to the gaps, and a vacuum-loadable drainage portion of the drainage is arranged between the two sealing lips.

Abstract: Energy storage devices for storing energy are provided. An energy storage device includes a flywheel disposed in a chamber of a journal. A gas bearing is formed between an outer face of the flywheel and an inner face of the journal. The gas bearing exerts a compressive force on the flywheel, which allows for higher rotational velocities and higher energy storage.