Abstract: An observable micro-nano mechanical testing apparatus and an observable micro-nano mechanical testing method are provided. The apparatus includes a supporting component, a driving component, a bearing component and an imaging component. The driving component and the imaging component are respectively vertically arranged on the supporting component, the bearing component is horizontally arranged on the supporting component and positioned below the driving component and the imaging component, the bearing component is used for bearing a sample and moving the sample, the driving component is used for driving an indenter to apply loads on the sample so as to form an indentation on the sample, and the imaging component is used for observing and analyzing the indentation on the sample.

Abstract: A method of detecting a ferroelectric signal from a ferroelectric film and a piezoelectric force microscopy (PFM) apparatus are provided. The method includes following steps. An input waveform signal is applied to the ferroelectric film. An atomic force microscope probe scans over a surface of the ferroelectric film to measure a surface topography of the ferroelectric film. A deflection of the atomic force microscope probe is detected when the input waveform signal is applied to the ferroelectric film to generate a deflection signal. Spectrum data of the ferroelectric film based on the deflection signal is generated. The spectrum data of the ferroelectric film is analyzed to determine whether the spectrum data of the ferroelectric film is a ferroelectric signal or a non-ferroelectric signal.

Abstract: A scanning probe microscope (SPM) system and associated method. The SPM system having a probe adapted to interact with nanoscale features of a sample and scan within a target region to produce a three-dimensional image of that target region, the system maintaining location information for a plurality of features of interest of the sample according to a sample-specific coordinate system, wherein the SPM system is configured to adjust positioning of the probe relative to the sample according to a SPM coordinate system, the SPM system further configured to manage a dynamic relationship between the sample-specific coordinate system and the SPM coordinate system by determining a set of alignment errors between the sample-specific coordinate system and the SPM coordinate system and apply corrections to the SPM coordinate system to offset the determined alignment errors.

Abstract: A stylus abrasion detection method includes obtaining a measurement curve of a standard specimen in which an unevenness that changes periodically is formed on a surface, by causing a stylus to trace along the surface of the standard specimen, detecting a displacement of the stylus in a direction perpendicular to the tracing direction, and using the displacement for obtaining the measurement curve; performing a frequency analysis on the measurement curve; calculating an abrasion amount of the stylus from a result of the frequency analysis; and displaying the abrasion amount calculated by the abrasion amount calculation.

Abstract: An automated testing system includes systems and methods to facilitate inline production testing of samples at a micro (multiple microns) or less scale with a mechanical testing instrument. In an example, the system includes a probe changing assembly for coupling and decoupling a probe of the instrument. The probe changing assembly includes a probe change unit configured to grasp one of a plurality of probes in a probe magazine and couple one of the probes with an instrument probe receptacle. An actuator is coupled with the probe change unit, and the actuator is configured to move and align the probe change unit with the probe magazine and the instrument probe receptacle. In another example, the automated testing system includes a multiple degree of freedom stage for aligning a sample testing location with the instrument. The stage includes a sample stage and a stage actuator assembly including translational and rotational actuators.

Abstract: The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer function (IMTF).

Abstract: [Problem] To provide a hardness tester capable of measuring hardness accurately without removing a surface layer and also provide a hardness testing method. [Solution] An initial test load which is arbitrarily changed from a reference value is applied to the surface of a sample by an indenter 11, a major test load obtained by adding an additional test load to the initial test load is applied thereto, and the load is returned to the initial test load. The difference in depth of penetration of the indenter between the first and second two initial test loads is referenced to determine test hardness of the sample based on a Rockwell hardness computing equation. Correction is made for deviation of hardness from the thus determined test hardness due to a change in the initial test load from the reference value.

Abstract: A material measure for use in evaluating the performance of a measuring instrument for measuring surface texture includes: a measurement area having a plurality of grooves in a predetermined direction. With the configuration, each of the grooves has a simple cross-sectional shape at a cross-section along the predetermined direction; and a length of the cross-sectional shape in the predetermined direction is different for the predetermined number of adjacent grooves in the predetermined direction.

Abstract: A portable Brinell metal hardness tester has a test head mounted in a carriage, movable vertically along elevating screws, and includes an adjustable valve for relieving hydraulic pressure within the test head where the valve includes a stem, an interior member, and an intermediate member.

Abstract: A technique for actively damping internal vibrations in a scanning probe microscope is disclosed. The excitation of various mechanical movements, including resonances, in the mechanical assembly of an SPM can adversely effect its performance, especially for high speed applications. An actuator is used to compensate for the movements. The actuator may operate in only the z direction, or may operate in other directions. The actuator(s) may be located at positions of antinodes.

Abstract: A method of calibrating a surface texture measurement device includes obtaining Y-axis shape measurement data and a maximum diameter portion to obtain upper and lower maximum diameter portions of a reference sphere from Y-axis upper and lower shape data obtained by relatively moving in the Y-axis direction while a downward and an upward styluses are in contact with an upper and a lower surfaces, respectively, of the reference sphere; obtaining X-axis shape measurement data to obtain X-axis upper and lower shape data of the reference sphere by relatively moving in the X-axis direction while the downward stylus is in contact with the upper diameter portion and the upward stylus with the lower diameter portion of the reference sphere; and calculating offset amounts ?x and ?z of the upward and downward styluses from center coordinates O3 and O4 obtained from the shape data.

Abstract: Disclosed is a hardness testing instrument which measures a hardness of a specimen, the hardness testing instrument including: a load applying section with the indenter or a flat indenter mounted thereon; a driving section to move the load applying section; a specimen table on which an object to be pressed is placed; a specimen table height adjustment section to adjust a height position; an indentation depth amount storage section to measure the indentation depth amount when the indenter is pressed to a reference block and to store the amount; a deformation amount storage section to measure the deformation amount of a load measuring instrument when the flat indenter is pressed to the load measuring instrument and to store the amount; a height position obtaining section to obtain a height position of the specimen table; and a calibration section to calibrate the load.

Abstract: A cantilever assembly (1) comprises a cantilever (10) having a cantilever tip (11). The cantilever is mounted to a rigid support (12,120,121) and is provided on its back side with an area (110) of a high reflectance material having a boundary (111) sloping towards the support (12). The extensions (c, ?c) of the area (110) and of the boundary (111) towards the support fulfil the condition c/?c?1 wherein c denotes the extension of the area (110) of the high reflectance material in the direction towards the support (12), and ?c denotes the extension of the sloped boundary (111) of the area (110) of the high reflectance material in the direction towards the support (12).

Abstract: Disclosed a test management method for an indentation tester which includes a control section and forms an indentation on a surface of a heated or cooled sample by pressing an indenter to which a load is applied onto the surface of the sample, the test management method including the steps of: measuring a predetermined reference block as the sample under a plurality of temperature environments to obtain a test result; calculating a test error caused by temperature environment based on the test result by the control section; and judging whether or not the test error is within a predetermined range by the control section.

Abstract: Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner.

Abstract: Determination of non-linearity of a positioning scanner of a measurement tool is disclosed. In one embodiment, a method may include providing a probe of a measurement tool coupled to a positioning scanner; scanning a surface of a first sample with the surface at a first angle relative to the probe to attain a first profile; scanning the surface of the first sample with the surface at a second angle relative to the probe that is different than the first angle to attain a second profile; repeating the scannings to attain a plurality of first profiles and a plurality of second profiles; and determining a non-linearity of the positioning scanner using the different scanning angles to cancel out measurements corresponding to imperfections due to the surface of the sample. The non-linearity may be used to calibrate the positioning scanner.

Abstract: There is provided a scanning probe microscope employing a positioning apparatus M1 including a unit to be driven in XY direction having a substantially square form in plane geometry at the center of the plane in the XY directions and having a first elastic support that bends in the X-axis direction at least on one side of the square form and a second elastic support that bends in the Y-axis direction at least on one side orthogonal to the side and a support unit that supports a stage unit 1 in the XY directions such that the facing surface can face in parallel against the facing surface of the unit to be driven in the XY directions. The positioning apparatus has a space of a predetermined thickness between the surface corresponding to the unit to be driven in the XY directions at least and the facing surface of the support unit that faces against it, and the space is filled with a viscosity agent.

Abstract: Glide test systems and associated methods are described. A glide test system includes a glide test head that is flown over the surface of a recording disk to detect asperities on the recording disk. The glide test head includes a detection pad on the trailing end of the head. Heating elements are fabricated proximate to the detection pad. The heating elements are independently controllable to control the amount of protrusion of different regions of the detection pad. The heating elements thus provide a way to substantially flatten the detection surface of the detection pad, and compensate for an uneven topography on a detection surface.

Abstract: The true roughness of highly granular perpendicular media is measured by forming an inverse replica of the surface of the media. The invention enables AFM measurements of granular media valley depth to more consistently predict the corrosion performance of the media. A liquid resist is used to first replicate the media topography and form the inverse replica. The narrow valleys in the original media are precisely modeled as sharp peaks on the replica. The height of the peaks are readily measured with an AFM tip. The resulting image is a negative of the original surface.

Abstract: The invention generally relates to atomic resolution imaging, and, more particularly, to systems and methods for calibrating an atomic resolution measurement tool. A sample holder for holding test samples used in measuring linearity of an atomic force microscope is provided. The holder includes a body having a top surface, and a plurality of inclined regions formed in the body and spaced apart along the top surface. Each of the inclined regions is structured and arranged to hold a test sample used to measure linearity of an atomic force microscope at one of a plurality of predefined angles.

Abstract: A form measuring mechanism (100) which measures form of an object (102) by bringing a probe (124) into direct contact with the object includes a plurality of reference spheres (130a, 130b) for calibrating the probe, a judging system/controller (154) for judging form abnormal values common in position and size to each other and form abnormal values not common to each other obtained by measuring the reference spheres, and a notifying display unit (156) for notifying at least any one of a contamination or dust adhering state of the probe judged from the common form abnormal values and a worn state and contamination or dust adhering states of the reference spheres judged from the form abnormal values not common to each other.

Abstract: Apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface.

Abstract: Harmonic motion is produced in a subject using vibro-acoustography. An ultrasonic imaging system repetitively interrogates the subject and the Doppler shift in the reflected echo signals is analyzed to measure the phase and amplitude of harmonic motion produced in the subject at different prescribed frequencies. Shear wave propagation through the subject is determined from this information and mechanical properties related to “stiffness” of the subject are determined. A Kalman filter is employed in the phase and amplitude measurement to extract the harmonic motion information from background noise.

Abstract: A scanner instrument used for scanning tubing that is being placed into an oil well or being removed from the oil well can be calibrated during retrieval of tubing from the well. Calibrating the tube scanner includes scanning a tubing standard and comparing the data from the standard scan to the known characteristics of the standard. The relationship between the scanned data and the known characteristics can be computed. The relationship between the scanned data and the known characteristics can be used as the calibration function for the scanner. Calibrating the tube scanner can also include scanning a string of tubing segments and then adjusting the data collected. The adjustment is based upon equalizing the data peaks that occur in the scan data at the coupling joints between tube segments.

Abstract: A method for determining a shear elasticity and shear viscosity of a material based on resonance characteristics. A focused ultrasound wave is directed at the material to induce oscillations in the material, and a velocity of the material is measured. A spectrum of frequency of oscillation versus velocity is developed, and the resonance characteristics exhibited by the spectrum are used to estimate the shear elasticity and viscosity of the material.

Abstract: Method and apparatus of easily controlling the Z-position of the probe used in a microprobe analyzer. The apparatus has: (A) a holder, (B) a reference body having a reference surface that is at the same height as a surface of a sample, the reference body being placed on or in the holder, (C) a probe-positioning device for bringing the probe into contact with the reference surface, (D) a controller for controlling motion of the probe-positioning device in the Z-direction, (E) position-measuring apparatus for measuring the Z-coordinate of the probe at which it is in contact with the reference surface, (F) a memory for storing a positional coordinate outputted by the position-measuring apparatus, and (G) probe contact detection apparatus for detecting that the probe is in contact with the reference surface.

Abstract: Concepts presented herein relate to a portable device that includes a frame and a fixture for engaging a mechanical probe to be calibrated. The fixture can be a platform of hard material that receives pushing action of the mechanical probe. A displacement sensor senses position of the platform with respect to the frame. An actuator is coupled to the displacement sensor and a controller is coupled to the actuator. The controller operates the actuator to cause the platform to move to a position (as indicated by the displacement sensor), while the force required to cause the displacement is measured with a force sensor.

Abstract: The present invention provides for test surfaces and methods for calibration of surface profilometers, including interferometric and atomic force microscopes. Calibration is performed using a specially designed test surface, or the Binary Pseudo-random (BPR) grating (array). Utilizing the BPR grating (array) to measure the power spectral density (PSD) spectrum, the profilometer is calibrated by determining the instrumental modulation transfer function (IMTF).

Abstract: A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.

Abstract: Disclosed is a hardness testing instrument which measures a hardness of a specimen, the hardness testing instrument including: a load applying section with the indenter or a flat indenter mounted thereon; a driving section to move the load applying section; a specimen table on which an object to be pressed is placed; a specimen table height adjustment section to adjust a height position; an indentation depth amount storage section to measure the indentation depth amount when the indenter is pressed to a reference block and to store the amount; a deformation amount storage section to measure the deformation amount of a load measuring instrument when the flat indenter is pressed to the load measuring instrument and to store the amount; a height position obtaining section to obtain a height position of the specimen table; and a calibration section to calibrate the load.

Abstract: A caliper atomic force microscope (AFM) comprises two AFM probes (each comprised of an oscillator and an attached tip) that operate on a sample in a coordinated manner. The coordinated operation of the AFM probes may be spatially or temporally coordinated. The result of the coordinated operation may be an image of the sample or a dimensional measurement of an unknown sample. The probes of the caliper AFM may be tilted, or the tips may be tilted at a non-orthogonal angle with respect to the probes, so as to enable the tips to access vertical sample surfaces or to enable the tips to touch each other. The tip shapes may include conical, boot-shaped, cylindrical, or spherical and materials from which the tips are fabricated may include silicon or carbon nanotubes. The oscillators may be beveled to allow the tips to operate in close proximity or in contact without interference of the oscillators. The disclosure of the present invention is discussed in terms of an atomic force (van der Waalls) interaction.

Abstract: A form measuring mechanism 100 which measures a form of an object 102 to be measured by bringing a probe 124 into direct contact with the object 102, includes a plurality of reference spheres 130a and 130b for calibrating the form of the probe 124, a judging means 154 for judging form abnormal values common in position and size to each other and form abnormal values not common to each other obtained by measuring the reference spheres 130a and 130b, and a notifying means 156 for notifying at least anyone of a contamination or dust adhering state of the probe 124 judged from the common form abnormal values and a worn state and contamination or dust adhering states of the reference spheres 130a and 130b judged from the form abnormal values not common to each other.

Abstract: Apparatus for determining physical properties of micromachined cantilevers used in cantilever-based instruments, including atomic force microscopes, molecular force probe instruments and chemical or biological sensing probes. The properties that may be so determined include optical lever sensitivity, cantilever spring constant and cantilever sample separation. Cantilevers characterized with the method may be used to determine fluid flow rates. The apparatus measures cantilever deflection resulting from drag force as the cantilever is moved through fluid. Unlike other methods for determining such physical properties of cantilevers, the method described does not depend on cantilever contact with a well-defined rigid surface. Consequently, the apparatus may be employed in situations where such contact is undesirable or inconvenient.

Abstract: A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.

Abstract: Concepts presented herein relate to a portable device that includes a frame and a fixture for engaging a mechanical probe to be calibrated. The fixture can be a platform of hard material that receives pushing action of the mechanical probe. A displacement sensor senses position of the platform with respect to the frame. An actuator is coupled to the displacement sensor and a controller is coupled to the actuator. The controller operates the actuator to cause the platform to move to a position (as indicated by the displacement sensor), while the force required to cause the displacement is measured with a force sensor.

Abstract: A substitute reference signal input is incorporated into a state space controller for a scanning probe microscope to improve tracking efficiency.

Abstract: In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMs actuator may be determined in-situ using a displacement method.

Abstract: In accordance with the invention, the spring constant of a scanning probe microscope cantilever mechanically coupled to a MEMs actuator may be determined in-situ by application of a force to the scanning probe microscope cantilever.

Abstract: Methods and apparatus for automatically determining a feedback setpoint for use in operating an atomic force microscope (AFM) are provided. The setpoint may be determined by modulating a feedback setpoint while monitoring for a change in a detector signal. In an effort to avoid tip damage and remain in non-contact, attractive mode during use, a setpoint just above a setpoint corresponding to a detected change in a parameter of the detector signal, such as an abrupt change in phase, may be used to operate the AFM.

Abstract: An approach controller (234) of a coordinate measuring instrument enables a position control loop (RP) and drives an actuator (133) so that a force sensor (1) is brought to a close position under a position control. When recognizing that the force sensor (1) reaches the close position, a contact controller (235) controls a switch (227) to enable a force control loop (RF) and drives the actuator (133) to bring the force sensor (1) into contact with a workpiece under a force control.

Abstract: A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling an end or side of the probe tip.

Abstract: A nanotube probe assembled under real-time observation inside an electron microscope, the probe including a nanotube; a holder for holding the nanotube; and a fastening means for fastening the nanotube at a base end portion thereof to the holder; and the tip end portion of the nanotube protrudes from the holder. The method for manufacturing a nanotube probe includes the steps of setting up a nanotube and a holder inside an electron microscope; allowing a base end portion of the nanotube, with a tip end portion thereof protruding, to come into contact with the holder; and irradiating electron beam to the base end portion of the nanotube to form a carbon film at the base end portion of the nanotube, or forming a fused part at the base end portion of the nanotube, thus fastening the base end portion of the nanotube to the holder by the carbon film.

Abstract: A glide-height disk-tester operates with the test disk rotating at a predetermined constant rotational speed and uses a glide head with an electrically-resistive heater and a thermally-responsive protrusion pad located on its trailing end. The linear velocity of the disk relative to the slider maintains the slider at its nominal fly height, which is typically higher than any expected asperity. With no current applied to the heater, the protrusion pad is generally flush with the air-bearing surface of the slider. Increasing levels of current are applied to the heater, which causes movement of the protrusion pad toward the disk surface. When the pad contacts an asperity, the current level applied at the instant of asperity contact is recorded. The applied current level can be correlated to the glide height from a previous calibration process using a calibration disk with known calibration bump heights.

Abstract: A glide head calibration technique uses two fly height calibrations on a disk media certifier. The first calibration point uses a spin down on bump technique at a first height, and the second calibration point uses a spin down on disk media roughness at a second lower height. With two height data points, a fly height curve of each glide head is approximated very accurately. Once the fly height curve is derived for each head, any fly height can be dialed-in by the disk media certifier for glide testing. This technique achieves glide fly heights between about 4 nm and 8 nm and does so with improved tolerances.

Abstract: A characterizer for determining the shape of a probe tip for an atomic force microscope and methods of fabricating and using the characterizer. The characterizer includes a micromachined crystalline structure with opposed edges separated by a width suitable for characterizing a dimension of the probe tip. At least one of the opposed edges overhangs an undercut region of the micromachined crystalline structure by an overhang distance that is greater than one third of the width. The probe tip is scanned across the edges of the characterizer for shape determination. The characterizer is formed by serially deep reactive ion etching and anisotropic etching (100) single crystal silicon. The opposed edges may be oxidation sharpened for use in profiling a bottom surface of the probe tip.

Abstract: A method for determining physical properties of micromachined cantilevers used in cantilever-based instruments, including atomic force microscopes, molecular force probe instruments and chemical or biological sensing probes. The properties that may be so determined include optical lever sensitivity, cantilever spring constant and cantilever-sample separation. Cantilevers characterized with the method may be used to determine fluid flow rates. The method is based on measurements of cantilever deflection resulting from drag force as the cantilever is moved through fluid. Unlike other methods for determining such physical properties of cantilevers, the method described does not depend on cantilever contact with a well-defined rigid surface. Consequently, the method may be employed in situations where such contact is undesirable or inconvenient.

Abstract: The coated nanotube surface signal probe constructed from a nanotube, a holder which holds the nanotube, a coating film fastening a base end portion of the nanotube to a surface of the holder by way of adhering the base end portion on the surface of holder in a range of a base end portion length with an electric contact state and covering a specified region including the base end portion with the coating film maintaining the electric contact state between the nanotube and the holder, a tip end portion of the nanotube being caused to protrude from the holder; and the tip end portion is used as a probe needle so as to scan surface signals. The coated nanotube surface signal probe can be used as a probe in AFM (Atomic Force Microscope), STM (Scanning Tunneling Microscope) other SPM (Scanning Probe Microscope).

Abstract: A small particle impingement comparator for surface finishes in excess of 1000 micro-inches standardizes the evaluation of such surface finishes within a turbine steam path. The small particle impingement comparator includes a plurality of sample cells arranged side-by-side in ascending order of roughness from 1190 micro-inches to 6950 micro-inches. With this comparator, users can compare the steam path component surface roughness with the roughness of the plurality of sample cells using a visual and tactile feel comparison.

Abstract: A scanning probe is microscope has a cantilever having a probe at a disal end thereof and an oscillator for generating a resonance signal near a resonance of the cantilever. A vibrating device receives the resonance signal as a driving signal for vibrating the cantilever. A variable gain amplifier adjusts a gain of displacement signal corresponding to displacement of the vibrating cantilever so as to satisfy the equation G=(A/A0)*G0 to control a quality factor value of the cantilever resonance to an optimal quality factor value, where G represents a gain value of the variable gain amplifer, A represents a preselected oscillation amplitude of the oscillator, A0 represents an initial oscillation amplitude of the oscillator, and G0 represents a gain value of the variable gain amplifier when the initial oscillation amplitude of the oscillator is A0.

Abstract: The invention is an apparatus and method including hardware and software, which allows collecting and analyzing data to obtain information about mechanical properties of soft materials in a much faster way. The apparatus can be used as a stand-alone deice or an add-on to the existing AFM device. The apparatus allows collecting dynamical measurements using a set of multiple frequencies of interest at once, in one measurement instead of sequential, one frequency in a time; measurements.