Abstract: Atomic force microscopy apparatus and method that enable observing charge generation transients with nanometer spatial resolution and nanosecond to picosecond time resolution, the timescale relevant for studying photo-generated charges in the world's highest efficiency photovoltaic films. The AFM apparatus includes an AFM, a light source for illumination of a sample operatively coupled to the AFM, a voltage source operatively coupled to the AFM, and a control circuitry operatively coupled to the light source and the voltage source. The AFM apparatus improves the time resolution and enables rapid acquisition of photocapacitance transients in a wide array of solar-energy-harvesting materials.

Abstract: A debris collection and metrology system for collecting and analyzing debris from a tip used in nanomachining processes, the system including an irradiation source, an irradiation detector, an actuator, and a controller. The irradiation source is operable to direct incident irradiation onto the tip, and the irradiation detector is operable to receive a sample irradiation from the tip, the sample irradiation being generated as a result of the direct incident irradiation being applied onto the tip. The controller is operatively coupled to an actuator system and the irradiation detector, and the controller is operable to receive a first signal based on a first response of the irradiation detector to the sample irradiation, and the controller is operable to effect relative motion between the tip and at least one of the irradiation source and the irradiation detector based on the first signal.

Abstract: The preferred embodiments are directed to a method of operating an SPM including providing probe cassette for a scanning probe microscope that includes a base having at least one probe storage receptacle, a lid mountable on the base with the probe storage receptacle at least substantially covering the at least one receptacle, and a probe retainer that retains a probe device of the scanning probe microscope in the receptacle under a compressive force. The probe cassette can be pre-loaded and shipped to a user site where the cassette can be loaded in an AFM without manual manipulation of the individual probe devices.

Abstract: A scanning mechanism includes a cantilever, an XY movable portion movable in X and Y directions parallel to an X-Y plane, an XY actuator to scan the XY movable portion in the X and Y directions, a Z actuator to scan the cantilever in a Z direction perpendicular to the X-Y plane, and a light condensing portion to cause light for detecting a displacement of the cantilever to enter the cantilever. The Z actuator and the light condensing portion are held by the XY movable portion and arranged side by side in projection to the X-Y plane.

Abstract: The present invention relates to a method for measuring the near-field signal of a sample in a scattering type near-field microscope and to a device for conducting said method.

Abstract: A scanning probe microscope, such as an atomic force microscope, include a z-stage and a bridge structure comprised substantially free of Invar. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. A drift compensation system is provided to reduce thermal drift of the z-stage and the bridge. The drift compensation system includes heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature.

Abstract: A probe alignment tool (10) for scanning probe microscopes utilizes an attached relay optics to view the scanning probe microscope probe tip (40) and align its image in the center of the field of view of an optical microscope (36). Adjustments to optical microscope motorized stages (50) and (60) along with adjustments of scanning probe microscope stages (44), (46) and (58) allow determination of a path and distance from the center of the field of view to the probe tip (40). From such determination a target area to be examined by the scanning probe microscope may be positioned precisely and accurately under the probe tip (40). Replacement of a scanning probe microscope probe tip (40) in an atomic force microscope unit (42) may be accomplished without the loss of alignment measurements.

Abstract: To measure surface potentials in a liquid, the in-liquid potential measurement device according to the present invention includes: a cantilever having a probe at its free end; a displacement measurement unit that measures a voltage corresponding to a displacement of a tip of the cantilever; an AC source that applies an AC voltage between the probe and the sample; and a signal detection unit. A frequency of the AC voltage is 10 kHz or higher. The signal detection unit detects, from the voltage measured by the displacement measurement unit, an amplitude of a frequency component having the same frequency as that of the AC voltage, an amplitude of a frequency component having double frequency of that of the AC voltage, and a frequency component having the same phase as that of the frequency of the AC voltage.

Abstract: A method and apparatus are provided of characterizing a re-entrant SPM probe tip (30) through a single scan of a characterizer, thus dramatically increasing throughput, accuracy, and repeatability when compared to prior known tip characterization techniques. The characterizer also preferably is one whose dimensions can be known with a high level of certainty in order to maximize characterization accuracy. These dimensions are also preferably very stable or, if unstable, change catastrophically rather than in a manner that is difficult or impossible to detect. A carbon nanotube (CNT), preferably a single walled carbon nanotube (SWCNT), has been found to be well-suited for this purpose. Multi-walled carbon nanotubes (MWCNTs) (130) and other structures may also suffice for this purpose. Also provided are a method and apparatus for monitoring the integrity of a CNT.

Abstract: Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radius of curvature when the probe tip shape is approximated by a circle.

Abstract: A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscope probe (16) is separated into two components. A first component (84) is analysed by the deflection detection system (28) and is used in a feedback system that maintains the average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the height of the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which the feedback system is unable to respond at the rate required to adjust probe height between pixel positions.

Abstract: Atomic force microscopes and methods of measuring specimens using the same. An atomic force microscope may precisely measure a 3D shape of a specimen using both a short-stroke scanner and a long-stroke scanner. The atomic force microscope may include a stage to transfer a specimen, at least one cantilever which includes a probe such that a driving displacement and a driving frequency are changed by attractive force and repulsive force in relation to atoms of the specimen, at least one short-stroke scanner which includes the cantilever so as to perform short-stroke scanning of the specimen, at least one long-stroke scanner which includes the short-stroke scanner so as to perform long-stroke scanning of the specimen, and at least one coarse approach system for transferring the short-stroke scanner and the long-stroke scanner to the specimen.

Abstract: According to one embodiment, a planar positioning device includes a first actuator displaceable in a first axis direction, a second actuator displaceable in a second axis direction perpendicular to the first axis, a first displacement magnifying mechanism configured to magnify a displacement of the first actuator, a second displacement magnifying mechanism configured to magnify a displacement of the second actuator, a stage arranged in a plane, a first drive support mechanism including a parallel link connected between the first displacement magnifying mechanism and the stage to transmit the magnified displacement in the first-axis direction to the stage, a second drive support mechanism including a parallel link connected between the second displacement magnifying mechanism and the stage to transmit the magnified displacement in the second-axis direction to the stage, and a stabilizing support mechanism configured to apply tensions in the first-axis direction and the second-axis direction to the stage.

Abstract: The present invention relates to a method for investigating a sample using scanning probe photon microscopy or optical force microscopy, and to an apparatus which is designed accordingly. The method or the apparatus provides for two optical traps which can be moved in a local region of the sample, wherein in at least one of the two traps a probe is held. The sample is scanned using the two traps and the measured data from the two traps are captured separately and evaluated by correlation. In particular interference signals resulting from an interaction between sample and light trap can be eliminated by the method.

Abstract: An electro-thermal actuator which includes a unit cell comprising at least one thermal bimorph, the thermal bimorph comprising at least two materials of different thermal expansion coefficient bonded together, the unit cell having a first end and a second end; and at least one temperature sensor located on the at least one thermal bimorph for measuring a temperature of the at least one thermal bimorph and determining a position of the unit cell. The basic structure can be expanded to 1-D, 2-D and 3-D positioners. The bimorphs can also be coupled to an active yoke which is in turn anchored to a plate, in order to reduce the parasitic heat effects on displacement of the tip of the bimorph.

Abstract: A metrology probe capable of measurements of a broad range of physical properties of individual samples of nano- or sub-nanometer dimensions is provided. The probe comprises a probe body, a substrate connected to the probe body, and a tip proximate the substrate. The probe further comprises a coarse piezoelectric actuator having an electrical input. The coarse piezo is configured to cause the tip and/or the substrate to move relative to each other when a first electrical signal is provided to the electrical input. The probe further comprises a low-pass filter in electrical communication with the electrical input of the coarse piezo. The probe further comprises a fine piezoelectric actuator having an electrical input configured to cause the tip and/or the substrate to move relative to each other when a second electrical signal is provided to the electrical input.

Abstract: The present invention relates to a method of rapidly and repeatably bringing sharp objects into close proximity to a particular region of interest of a sample with high precision and accuracy in two or three dimensions using a laser guided tip approach with three dimensional registration to the surface.

Abstract: The present invention provides a fast-operating and stable scanning probe microscope configured to detect the interaction between a probe and a sample to avoid generation of a harmonic component. An oscillation circuit (31) generates an excitation phase signal indicative of the phase of an excitation signal. An excitation signal generation circuit (33) generates an excitation signal from the excitation phase signal. A complex signal generation circuit (35) generates a complex signal from a displacement signal. A vector calculation circuit (37) calculates the argument of the complex signal. A subtracting phase comparator (39) compares the argument with the phase of the excitation phase signal by subtraction. The amount of the interaction between a probe device and a sample is obtained using the subtracting phase comparator (39). The result of the comparison carried out by the subtracting phase comparator (39) may be output as a difference in phase between the displacement signal and the excitation signal.

Abstract: The invention relates to a method and to a device for examining a test sample using a scanning probe microscope. According to the method a first and a second measurement using a scanning probe microscope are carried out on the test sample using a measuring probe system in which a measuring probe and another measuring probe are formed on a common measuring probe receptacle. During the first measurement, in relation to the test sample, the measuring probe is held in a first measurement position and the other measuring probe is held in another non-measurement position, and the test sample is examined with the measuring probe using a scanning probe microscope. After the first measurement, by displacing in relation to the test sample, the measuring probe is displaced from the measurement position into a non-measurement position and the other measuring probe from the other non-measurement position into another measurement position.

Abstract: It is difficult for a scanning probe microscope according to the conventional technology to operate a probe for scanning and positioning in a wide range and for high-precision scanning in a narrow range. A scanning probe microscope according to the invention uses probe driving actuators for coarse adjustment and fine adjustment. For scanning and positioning in a wide range, the coarse adjustment actuator is switched to fast responsiveness. For scanning in a narrow range, the coarse adjustment actuator is switched to slow responsiveness. Instead, positional noise is reduced and the fine adjustment actuator is mainly used for scanning in a narrow range. The probe is capable of not only scanning and positioning in a wide range but also high-precision scanning in a narrow range.

Abstract: A calibration leveling system and method are provided which improve printing and imaging at the nanoscale including improved tip-based deposition and nanolithography. The system can include a scanning probe instrument having a video camera with an adjustable lens. The scanner can be coupled to a one or two dimensional array of cantilevers comprising cantilever tips for imaging or printing. The scanning probe instrument has one or more motors for controlling the scanner in the z-axis. The z-axis motors position the scanner so that the cantilever tips are in a level orientation relative to the surface of a substrate. Once the cantilever tips are level with the substrate, the positions of the z-axis motors can be recorded for future reference.

Abstract: Improved actuation device useful in direct-write nanolithography and imaging including use of a pivot point for downward deflection of a cantilever with long travel path. A device comprising at least one holder, at least one cantilever, an extension of the said cantilever wherein the extension is integrated with an actuator, wherein the cantilever is adapted for actuated movement. The actuator can be electrostatic, thermal, or piezoelectric. The cantilever can comprise a tip, and material can be transferred from the tip to a surface.

Abstract: A metrology probe capable of measurements of a broad range of physical properties of individual samples of nano- or sub-nanometer dimensions is provided. The probe comprises a probe body, a substrate connected to the probe body, and a tip proximate the substrate. The probe further comprises a coarse piezoelectric actuator having an electrical input. The coarse piezo is configured to cause the tip and/or the substrate to move relative to each other when a first electrical signal is provided to the electrical input. The probe further comprises a low-pass filter in electrical communication with the electrical input of the coarse piezo. The probe further comprises a fine piezoelectric actuator having an electrical input configured to cause the tip and/or the substrate to move relative to each other when a second electrical signal is provided to the electrical input.

Abstract: A sample atomic configuration creation part in a control section creates the atomic arrangement data of a sample, and a sample surface height calculation part calculates a sample surface height for every mesh. A probe profile creation part creates the atomic arrangement data of a probe, and a probe surface height calculation part calculates the height of the probe surface for every mesh. A probe scanning part supplies the coordinate of a scanning start position in the scanning range to a collision height specification part. The collision height specification part calculates the distance between the sample surface and the probe in each mesh. Calculation of this distance is repeated for all meshes of the probe at the coordinate of this measuring position.

Abstract: A main object of the present claimed invention is to provide a scanning probe microscope that can recognize a relative position between multiple probes accurately.

Abstract: The present invention relates to double-tilt specimen holders of the side-entry type for transmission electron microscopy (TEM). The invention uses Micro Electro Mechanical Systems (MEMS) and Piezoelectric Transducer (PZT) technology to create a digitally programmable dynamically tilting specimen holder integrated into a standard transmission electron microscope stage. In this invention, specimens can be tilted using a MEMS/PZT-actuated specimen holder to between 10 and 25° for stereo pairs and at higher angles (up to 90°) for tomography applications. In one embodiment, the specimen cradle may be effectively rotated 360° about the Y axis, enabling virtually the complete three-dimensional mapping of a specimen.

Abstract: We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any instrument or device. All aspects of the present invention present a significant improvement over the prior art: a positioner is robust and compact; an optical instrument for positional control is a profoundly simple and compact module; a clamping assembly is self-aligning and suitable for robotic hot-swapping of objects being positioned.

Abstract: There is provided a scanning probe microscope employing a positioning apparatus M1 including a unit to be driven in XY direction having a substantially square form in plane geometry at the center of the plane in the XY directions and having a first elastic support that bends in the X-axis direction at least on one side of the square form and a second elastic support that bends in the Y-axis direction at least on one side orthogonal to the side and a support unit that supports a stage unit 1 in the XY directions such that the facing surface can face in parallel against the facing surface of the unit to be driven in the XY directions. The positioning apparatus has a space of a predetermined thickness between the surface corresponding to the unit to be driven in the XY directions at least and the facing surface of the support unit that faces against it, and the space is filled with a viscosity agent.

Abstract: Atomic force microscopes and methods of measuring specimens using the same. An atomic force microscope may precisely measure a 3D shape of a specimen using both a short-stroke scanner and a long-stroke scanner. The atomic force microscope may include a stage to transfer a specimen, at least one cantilever which includes a probe such that a driving displacement and a driving frequency are changed by attractive force and repulsive force in relation to atoms of the specimen, at least one short-stroke scanner which includes the cantilever so as to perform short-stroke scanning of the specimen, at least one long-stroke scanner which includes the short-stroke scanner so as to perform long-stroke scanning of the specimen, and at least one coarse approach system for transferring the short-stroke scanner and the long-stroke scanner to the specimen.

Abstract: In a two-dimensional probe array, an interval between the leading ends of probes adjacent to each other in an X direction is made shorter than that between the leading ends of probes adjacent to each other in a Y direction. Thus, the leading ends of the probes are arranged to form a lattice wherein many rectangles are arranged. Furthermore, the lowest resonance frequency of an actuator which moves a recording medium in the X direction is set higher than the lowest resonance frequency of an actuator which moves the recording medium in the Y direction. At the time of recording or reading information, the recording medium is reciprocated in the X direction at a frequency substantially equal to the lowest resonance frequency of the actuator.

Abstract: There is provided a scanning probe microscope apparatus which has a high sensitivity for the interaction between the cantilever and the sample and comprises a cantilever that can oscillate stably in dynamic mode even when a mechanical Q value is low. A driving signal having a frequency close to the resonant frequency of the cantilever (4) is supplied from the signal generator (9) to the oscillation exciting means (10) to separately (forcibly) oscillate the cantilever (4). And the frequency of the driving signal or the resonant frequency of the cantilever is controlled (by adjusting the distance between the cantilever (4) and the sample (1)), such that the phase difference between the oscillation of the cantilever (4) detected by the oscillation detecting means (5) and the driving signal becomes zero, i.e. the frequency of the driving signal and the resonant frequency of the cantilever (4) match.

Abstract: It is difficult for a scanning probe microscope according to the conventional technology to operate a probe for scanning and positioning in a wide range and for high-precision scanning in a narrow range. A scanning probe microscope according to the invention uses probe driving actuators for coarse adjustment and fine adjustment. For scanning and positioning in a wide range, the coarse adjustment actuator is switched to fast responsiveness. For scanning in a narrow range, the coarse adjustment actuator is switched to slow responsiveness. Instead, positional noise is reduced and the fine adjustment actuator is mainly used for scanning in a narrow range. The probe is capable of not only scanning and positioning in a wide range but also high-precision scanning in a narrow range.

Abstract: An actuator subsystem for use in a scanning probe microscope (SPM) system having a probe for measuring a sample comprises and actuator and an actuator driving circuit. The actuator operates in the SPM system to generate relative motion between the probe and the sample while the SPM system collects data indicative of a property of the sample. The relative motion includes a range of motion of at least 1 micron. The actuator driving circuit applies a drive signal to the actuator to cause the relative motion, and has a small signal bandwidth of at least 200 kHz with a phase lag of not more than 100 degrees within the small signal bandwidth.

Abstract: To realize to adapt to a shape of a surface, shorten a measurement time period and promote a measurement accuracy by setting a sampling interval in accordance with a slope of the shape of the surface and controlling a stylus in accordance with the interval, there is provided a scanning probe microscope, in which in scanning the stylus, an observation data immediately therebefore is stored as a history, the sampling interval in X or Y direction is set at each time based on a shape of the observation data, and the stylus is scanned to a successive sampling position.

Abstract: A method of scanning over a substrate includes implementing a write mode of the substrate by scanning a probe across a substrate, the probe having a spring cantilever probe mechanically fixed to a probe holding structure, a tip with a nanoscale apex, and an actuator for lateral positioning of the tip; the actuator comprising a thermally switchable element and a heating element for heating the thermally switchable element; and heating the heating element to a given temperature so as to locally soften a portion of the substrate and applying a force to the softened portion of the substrate through the tip so as to create one or more indentation marks in the softened portion of the substrate.

Abstract: Provided is a scanning probe microscope (SPM), a probe of which can be automatically replaced and the replacement probe can be attached onto an exact position. The SPM includes a first scanner that has a carrier holder, and changes a position of the carrier holder in a straight line; a second scanner changing a position of a sample on a plane; and a tray being able to store a spare carrier and a spare probe attached to the spare carrier. The carrier holder includes a plurality of protrusions.

Abstract: A measuring device with a daisy type cantilever wheel enabling easier setting of a measuring head and modification head by rotating the daisy type cantilever wheel, enabling modification, adhesion of a sample, and application of a force to a sample specimen by using centrifugal force, and also enabling an easier measurement of a variation of characteristic vibration frequency and vibration amplitude of a cantilever array is provided.

Abstract: In accordance with the invention, a computer pointing device is interfaced with an SPM system to provide real time control of the SPM and improve the ease of use.

Abstract: A method of position control for scanning probe spectroscopy of a specimen. Probe positional error is determined by comparing images generated from a sequence of scans to identify differences between positions of at least a portion of a reference characteristic of the specimen in the images. A probe is moved to a target location for spectroscopic analysis, as a function of the determined probe positional error.