Patents Represented by Attorney, Agent or Law Firm Albert J. Dalhuisien
  • Patent number: 6303395
    Abstract: The present invention provides a manufacturing environment (110) for a wafer fab, and an SPC environment (112) for setting control limits and acquiring metrology data of production runs. A computation environment (114) processes the SPC data, which are then analyzed in an analysis environment (116). An MES environment (118) evaluates the analysis and automatically executes a process intervention if the process is outside the control limits. Additionally, the present invention provides for an electrical power management system, a spare parts inventory and scheduling system and a wafer fab efficiency system. These systems employ algorithms (735, 1135 and 1335).
    Type: Grant
    Filed: June 1, 1999
    Date of Patent: October 16, 2001
    Assignee: Applied Materials, Inc.
    Inventor: Jaim Nulman