Abstract: A method for registering a pattern image with a reference image is provided. The pattern image and the reference image differ from each other by a Rotation-Scale-Translation (RST) transformation defined by a scale factor s, a rotation factor &phgr;, and a translation vector (&Dgr;x, &Dgr;y). A Fourier-Mellin invariant is used to perform image registration by isolating the rotation, scale and transformation parameters of the RST transformation between the reference image r and the pattern image p.