Patents Represented by Attorney, Agent or Law Firm Brenda Jarrell
  • Patent number: 6198293
    Abstract: The method for measuring the thickness of a material which transmits a detectable amount of microwave radiation includes irradiating the material with coherent microwave radiation tuned over a frequency range. Reflected microwave radiation is detected, the reflected radiation having maxima and minima over the frequency range as a result of coherent interference of microwaves reflected from reflecting surfaces of the material. The thickness of the material is determined from the period of the maxima and minima along with knowledge of the index of refraction of the material.
    Type: Grant
    Filed: March 26, 1998
    Date of Patent: March 6, 2001
    Assignee: Massachusetts Institute of Technology
    Inventors: Paul Woskov, David A. Lamar