Patents Represented by Attorney, Agent or Law Firm Chein-Wei(Chris)Chou - Justia Patents Search

Patents Represented by Attorney, Agent or Law Firm Chein-Wei(Chris)Chou

Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method

Patent number: 6392231

Abstract: A swinging objective retarding immersion lens system and method therefore which provide a low voltage electron beam with high beam current, relatively high spatial resolution, a relative large scan field, and high signal collection efficiency.

Type: Grant

Filed: February 25, 2000

Date of Patent: May 21, 2002

Assignee: Hermes-Microvision, Inc.

Inventor: Zhong-Wei Chen