Abstract: A semiconductor device is provided which has a plurality of output drivers whose slew rates are differentially controlled. The slew rates of the output drivers are controlled by a control means such that the slew rate of at least one of the output drivers is different than the slew rate of another output driver. Preferably, the slew rates are differentially controlled such that an output driver that drives a signal that reaches an output pin of a semiconductor package later slews at a faster rate than an output driver that drives a signal that reaches an output pin of a semiconductor package earlier. In this way all of the output pins of a semiconductor package can be driven to change states at approximately the same time. The slew rates of the output drivers can be differentially controlled through the utilization of programmable resistors.

Abstract: An apparatus and method for underfilling a silicon chip (16) to a substrate (12) by depositing an underfill dam (18) on the surface (20) of the substrate (12) prior to addition of the underfill material (14), is disclosed. A bead of underfill material (14) is provided on the substrate (12) about the periphery of the silicon chip (16), within the underfill dam (18). The underfill material (14) fills the gap (22) between the electrical contacts, the substrate (12) and the silicon chip (16) by capillary action and differential pressure created by a vacuum system (40).

Abstract: A reference voltage generator that may be utilized in an integrated circuit such as a dynamic random access memory (DRAM) includes a voltage divider connected to a voltage supply and a feedback buffer amplifier. The voltage divider, which determines the reference voltage, supplies at least one voltage output signal to the feedback buffer amplifier under control of a feedback control signal supplied by the feedback buffer amplifier. In at least one embodiment, the reference voltage generator further includes a delay element coupled between the voltage divider and the feedback buffer amplifier in-line with the feedback control signal and a low impedance output buffer that receives the voltage output signal from the voltage divider and supplies the reference voltage at an output node. When the reference voltage generator is implemented within a dynamic random access memory, the reference voltage is supplied to the reference plates of bit storage capacitors within the memory cells.

Abstract: A method of fabricating an integrated circuit having an n-channel and a p-channel transistor is provided. The method includes forming LDD regions for the n-channel transistors self-aligned to the gate electrodes. A first oxide is then formed over the structure and the n-type silicon regions are implanting with a p+ type dopant through the first oxide to form the source and drain regions of the p-channel transistor. A second oxide is formed over structure. The two oxide layers are then etched to provide sidewall spacers, having an inner portion formed from the first oxide and an outer portion formed from the second oxide. The p-type silicon regions are implanted with an n+ type dopant to form the low resistivity regions of the n-channel transistor. The p+ implants in the source and drain of the p-channel transistor typically outdiffuse toward the gates during further thermal processing of the device.

Abstract: The present invention provides a method for minimizing voids in a plug. The process begins by forming a conformal barrier layer within the hole and then forming a metal plug within the hole. Thereafter, a cap layer is formed over the metal plug in which the cap layer has a lower thermal expansion coefficient than the metal plug. The hole is heated such that the metal in the hole flows to eliminate the void as a result of the compressive stress generated by the cap layer on the metal plug.

Abstract: A method for fabricating an integrated circuit transistor begins with doping the substrate in the device active areas after field oxide regions have been formed. This dopant helps to reduce short channel transistor effects. A thin layer of epitaxial silicon is then grown over the substrate active regions. A field effect transistor is formed in the epitaxial layer and underlying substrate. The transistor channel region is in the relatively lightly doped epitaxial layer, but the underlying doped substrate layer helps minimize short channel effects.

Abstract: A method is provided for forming planar multilevel metallization of a semiconductor integrated circuit, and an integrated circuit formed according to the same. Multilevel metallization is achieved through a planar process at each layer to allow for minimum widths of lines and vias and minimal lateral spacing between lines. Conductive lines and contacts are formed before planarization to further achieve good step coverage. A first metallization layer is formed by depositing aluminum over the integrated circuit, patterning and etching to form metal interconnect lines. Regions of planar insulating material are then formed between the metal lines. Another layer of aluminum is deposited and etched to form metal vias over selected portions of the metal lines. This layer of aluminum is patterned with a reverse pattern of that used to pattern the metal lines. Again, regions of planar insulating material are formed between the metal vias.

Abstract: A high impedance load for an integrated circuit device provides an undoped, or lightly doped, layer of epitaxial silicon. The epitaxial silicon layer is formed over a conductive region in a substrate, such as a source/drain region. A highly conductive contact, such as a refractory metal silicide interconnect layer, is formed on top of the epitaxial silicon layer. Preferably, the epitaxial silicon layer is formed using solid phase epitaxy, from excess silicon in the silicide layer, by annealing the device after the silicide layer has been deposited.

Abstract: A method is provided for forming planar multilevel metallization of a semiconductor integrated circuit, and an integrated circuit formed according to the same. Multilevel metallization is achieved through a planar process at each layer to allow for minimum widths of lines and vias and minimal lateral spacing between lines. Conductive lines and contacts are formed before planarization to further achieve good step coverage. A first metallization layer is formed by depositing aluminum over the integrated circuit, patterning and etching to form metal interconnect lines. Regions of planar insulating material are then formed between the metal lines. Another layer of aluminum is deposited and etched to form metal vias over selected portions of the metal lines. This layer of aluminum is patterned with a reverse pattern of that used to pattern the metal lines. Again, regions of planar insulating material are formed between the metal vias.

Abstract: A method is provided of forming a small geometry via or contact of a semiconductor integrated circuit, and an integrated circuit formed according to the same, is disclosed. According to a first disclosed embodiment, an opening is formed partially through an insulating layer overlying a conductive region. Sidewall spacers are formed along the sidewalls of the opening. The remaining insulating layer is etched to expose the underlying conductive region. The contact dimension of the opening is smaller than the opening which can be printed from modern photolithography techniques. According to an alternate embodiment, the opening in the insulating layer expose the underlying conductive region. A polysilicon layer is formed over the insulating layer and in the opening. The polysilicon is oxidized to form a thick oxide in the opening and is etched back to form oxidized polysilicon sidewall spacers which decrease the contact dimension of the opening.

Abstract: A programmable semiconductor contact structure and method are provided. A semiconductor substrate has a first patterned conductive layer for forming an interconnect. A first insulating layer overlies the first patterned conductive layer. An opening is formed through the insulating layer to the first patterned conductive layer to form the contact via. A buffer layer overlies portions of the first insulating layer and covers the opening. A second conductive layer overlies the buffer layer. A third conductive layer then overlies the integrated circuit. The buffer layer is a material, such as amorphous silicon, which functions as an anti-fuse and can be programmed by application of a relatively high programming voltage.

Abstract: The invention may be incorporated into a method for forming a vertically oriented semiconductor device structure, and the semiconductor structure formed thereby, by forming a first transistor over a portion of a substrate wherein the first transistor has a gate electrode and a source and drain regions. First and second interconnect regions are formed over a portion of the gate electrode and a portion of the source and drain regions of the first transistor, respectively. A source and drain region of a second transistor is formed over the second interconnect. A Vcc conductive layer is formed over a portion of the source and drain region of the second transistor which is formed over the second interconnect.

Abstract: An apparatus and method for producing a wrap-around interconnect substrate (60) comprising a substrate (42) having semi-circular vias (62) having openings (64) created by separating through cylindrical vias (62) that were positioned along cutting lines (46a, 46b) that formed part of an integrated circuit substrate strip (40) prior to separation, is disclosed.

Abstract: A method is provided of forming a small geometry via or contact of a semiconductor integrated circuit, and an integrated circuit formed according to the same, is disclosed. According to a first disclosed embodiment, an opening is formed partially through an insulating layer overlying a conductive region. Sidewall spacers are formed along the sidewalls of the opening. The remaining insulating layer is etched to expose the underlying conductive region. The contact dimension of the opening is smaller than the opening which can be printed from modern photolithography techniques. According to an alternate embodiment, the opening in the insulating layer expose the underlying conductive region. A polysilicon layer is formed over the insulating layer and in the opening. The polysilicon is oxidized to form a thick oxide in the opening and is etched back to form oxidized polysilicon sidewall spacers which decrease the contact dimension of the opening.

Abstract: The present invention provides improved device speed by using two silicides with two different compositions: one silicide is overlaid on a polysilicon gate layer, to form a "polycide" layer with improved sheet resistance, and the other is clad on at least some "active" areas of the monocrystalline silicon, to form a "salicided" active area with improved sheet and contact resistance. Preferably one silicide is a reaction product and the other is deposited.

Abstract: Silver interconnects are formed by etching deep grooves into an insulating layer over the contact regions, exposing portions of the contact regions and defining the interconnects. The grooves are etched with a truncated V- or U-shape, wider at the top than at any other vertical location, and have a minimum width of 0.25 .mu.m or less. An optional adhesion layer and a barrier layer are sputtered onto surfaces of the groove, including the sidewalls, followed by sputter deposition of a seed layer. Where aluminum is employed as the seed layer, a zincating process may then be optionally employed to promote adhesion of silver to the seed layer. The groove is then filled with silver by plating in a silver solution, or with silver and copper by plating in a copper solution followed by plating in a silver solution.

Abstract: A method and circuit for testing a packaged semiconductor memory device allow the acquisition of information on redundant elements by performing one of three possible redundancy rollcall tests on the packaged memory chip. By stimulating the packaged device's pins, the memory chip is set in one of the three test modes. In the first test mode, a preset signal indicating redundancy is sensed and the state of an output pin is changed. In the second test mode, memory array rows are sequentially addressed and the state of an output pin is changed when a redundant row is addressed. In the third test, array columns are sequentially addressed and, when a redundant column is addressed, the state of the output pin to which the redundant column is mapped is changed.

Abstract: A method is provided for patterning a submicron semiconductor layer of an integrated circuit, and an integrated circuit formed according to the same. An interlevel dielectric layer is formed over the surface of the integrated circuit. A planarizing layer is formed over the interlevel dielectric layer. A photoresist layer is formed and patterned over the planarizing layer. The planarizing layer is etched to form openings exposing selected portions of the interlevel dielectric layer, wherein each opening has the same lateral dimensions. The photoresist and planarizing layers are then removed. The interlevel dielectric layer is etched in the openings to expose portions of the underlying integrated circuit.

Abstract: The cell is formed of a selection transistor, a detection transistor and a tunnel condenser. The detection Transistor has its own control gate formed with an n+ diffusion which is closed and isolated from those of the other cells of the same memory.

Abstract: A method is provided for forming an improved landing pad of a semiconductor integrated circuit, and an integrated circuit formed according to the same. A first opening is formed through a first dielectric layer to expose a portion of a diffused region. A first polysilicon landing pad is formed over the first dielectric layer and in the opening. This landing pad will provide for smaller geometries and meet stringent design rules such as that for contact space to gate. A dielectric pocket is formed over the polysilicon landing pad over the active region. A second conductive landing pad is formed over the polysilicon landing pad and the dielectric pocket. A second dielectric layer is formed over the landing pad having a second opening therethrough exposing a portion of the landing pad. A conductive contact, such as aluminum, is formed in the second contact opening. The conductive contact will electrically connect with the diffused region through the landing pad.