Patents Represented by Attorney, Agent or Law Firm Darryl P. Fickey
  • Antihalation compositions
    Patent number: 6451503
    Abstract: Antihalation compositions and methods for reducing the reflection of exposure radiation of a photoresist overcoated said compositions. The antihalation compositions of the invention comprise a resin binder and material capable of causing a thermally induced crosslinking reaction of the resin binder.
    Type: Grant
    Filed: April 30, 1996
    Date of Patent: September 17, 2002
    Assignee: Shipley Company, L.L.C.
    Inventors: James W. Thackeray, George W. Orsula