Patents Represented by Attorney, Agent or Law Firm Duft, Gra{dot over (z)}iano & Forest, P.C.
  • Multiple station apparatus for liquid source fabrication of thin films
    Patent number: 6203619
    Abstract: An apparatus and method are disclosed for fabricating thin films for use in an active component of an integrated circuit by the use of an assembly line type process. A plurality of substrate stations are located on a platen which is rotated to move each station sequentially between a misted deposition device, a drying device, and a solidification device. The misted deposition device includes a mist showerhead in a movable housing. The mist showerhead separates a velocity reduction chamber from a deposition chamber.
    Type: Grant
    Filed: October 26, 1998
    Date of Patent: March 20, 2001
    Assignee: Symetrix Corporation
    Inventor: Larry D. McMillan