Abstract: To provide a film forming apparatus in which an impurity contained in an organic compound is separated to be removed and a film is formed without decreasing the purity of the purified organic compound, whereby a high-purity organic compound is formed. A film forming apparatus of the present invention includes a purifying chamber for purifying an organic compound and a film forming chamber for vapor-depositing the purified organic compound onto a substrate. The organic compound purified by a zone melting method in the purifying chamber can be vapor-deposited onto the substrate provided in the film forming chamber without decreasing the purity thereof, so that a high-purity organic compound layer can be formed.
Type:
Grant
Filed:
March 8, 2002
Date of Patent:
September 20, 2005
Assignee:
Semiconductor Energy Laboratory Co., Ltd.
Abstract: Water-based correction fluids for covering typing, writing or drawing errors contain a particulate opacifier, a water-soluble or water-dispersible binder, water and a di- or tri-quaternary ammonium compound to prevent bleed of inks.