Patents Represented by Attorney Francis Koszyk
  • Patent number: 7037175
    Abstract: The invention is directed to a method for polishing a cutting edge on a cutting instrument, comprising contacting a cutting edge of a cutting instrument with a polishing pad and a chemical-mechanical polishing composition comprising particles of an abrasive, and a liquid carrier, wherein the abrasive is suspended in the liquid carrier, and abrading at least a portion of the cutting edge to polish the cutting edge. The invention further provides a cutting instrument having a highly uniform edge.
    Type: Grant
    Filed: October 19, 2004
    Date of Patent: May 2, 2006
    Assignee: Cabot Microelectronics Corporation
    Inventors: Clifford Spiro, George Steuer, Frank Kaufman
  • Patent number: 6936543
    Abstract: The invention provides methods of polishing a substrate comprising (i) contacting a substrate comprising at least one metal layer comprising copper with a chemical-mechanical polishing (CMP) system and (ii) abrading at least a portion of the metal layer comprising copper to polish the substrate. The CMP system comprises (a) an abrasive, (b) an amphiphilic nonionic surfactant, (c) a means for oxidizing the metal layer, (d) an organic acid, (e) a corrosion inhibitor, and (f) a liquid carrier. The invention further provides a two-step method of polishing a substrate comprising a first metal layer and a second, different metal layer. The first metal layer is polishing with a first CMP system comprising an abrasive and a liquid carrier, and the second metal layer is polished with a second CMP system comprising (a) an abrasive, (b) an amphiphilic nonionic surfactant, and (c) a liquid carrier.
    Type: Grant
    Filed: October 11, 2002
    Date of Patent: August 30, 2005
    Assignee: Cabot Microelectronics Corporation
    Inventors: David J. Schroeder, Kevin J. Moeggenborg, Homer Chou, Jeffrey P. Chamberlain, Joseph D. Hawkins, Phillip Carter