Abstract: A photocathode having a gate electrode so that modulation of the resulting electron beam is accomplished independently of the laser beam. The photocathode includes a transparent substrate, a photoemitter, and an electrically separate gate electrode surrounding an emission region of the photoemitter. The electron beam emission from the emission region is modulated by voltages supplied to the gate electrode. In addition, the gate electrode may have multiple segments that are capable of shaping the electron beam in response to voltages supplied individually to each of the multiple segments.
Type:
Grant
Filed:
November 24, 1999
Date of Patent:
April 24, 2001
Assignee:
Etec Systems, Inc.
Inventors:
Kim Y. Lee, Tai-Hon Philip Chang, Marian Mankos, C. Neil Berglund