Abstract: A cold-cathode ion source includes a specially shaped hollow anode and specially shaped anode-cathode insulators to preclude the buildup of short-circuiting bridges of sputtered cathode material. When used with solid feed material, the source can also include an oven-anode having cavities for vaporizing the solid feed material and passages connecting the cavities to the bore of the anode. The geometry of the oven-anode provides an increasing temperature gradient from the cavities to the bore that minimizes condensation of vaporized feed material that could block the ports.