Abstract: An x-ray imaging system uses a synchrotron radiation beam to acquire x-ray images and at least one integrated x-ray source. The system has an imaging system including sample stage controlled by linear translation stages, objective x-ray lens, and x-ray sensitive detector system, placed on a fixed optical table and a mechanical translation stage system to switch x-ray sources when synchrotron radiation beam is not available.
Type:
Grant
Filed:
March 11, 2009
Date of Patent:
September 14, 2010
Assignee:
Xradia, Inc.
Inventors:
Ziyu Wu, Wenbing Yun, Peiping Zhu, Yuxin Wang, Qingxi Yuan, Andrei Tkachuk, Wanxia Huang, Michael Feser