Patents Represented by Attorney IP Strategies
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Patent number: 8010483Abstract: A system for facilitating plasma processing tool component management across plurality of tools is provided. The system includes means for receiving first component data for first plurality of components, including identification and usage history for a first plurality of components, at first database associated with first tool. The system also includes means for receiving second component data for second plurality of components at second database associated with second tool, which is different from first tool. The system further includes means for synchronizing first and second component data with third database. The synchronizing includes synchronizing between third database and at least one of first and second database rules that govern usage of at least one component of first and second plurality of components. The third database is coupled to exchange data with plurality of tools.Type: GrantFiled: August 26, 2010Date of Patent: August 30, 2011Assignee: Lam Research CorporationInventors: Chung-Ho Huang, Hae-Pyng Jea, Tung Hsu, Jackie Seto
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Patent number: 8001857Abstract: A sample chamber of plastics has at least one receiving area for receiving a liquid, and includes an oleophobic layer in a predetermined surface area. The sample chamber includes a base plate and a cover plate firmly connected thereto. The oleophobic layer is disposed on a side of the base plate and the cover plate facing away from the receiving areas, and/or the sample chamber consists of a plastic body and the oleophobic layer is disposed on a side of the plastic body facing away from the receiving areas.Type: GrantFiled: June 20, 2008Date of Patent: August 23, 2011Assignee: ibidi GmbHInventor: Valentin Kahl
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Patent number: 8000827Abstract: A plasma-processing tool for processing a substrate using at least a first process recipe and a second process recipe is provided. The plasma-processing tool includes transducers configured to collect process data streams, each process data stream pertaining to a process parameter being monitored during recipe execution. The tool also includes a logic circuitry configured for receiving a set of meta-data wherein each meta-data includes identification data about the substrate and the process recipe being executed. The logic circuitry is also configured for receiving a set of process data streams, each of which being associated with a specific process recipe. The logic circuitry further includes storing the meta-data and the process data streams associated with the first process recipe as a first file and the meta-data and the process data streams associated with the second process recipe as a second file.Type: GrantFiled: February 23, 2010Date of Patent: August 16, 2011Assignee: Lam Research CorporationInventors: Chad R. Weetman, Chung-Ho Huang, Jacqueline Seto, John Jensen
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Patent number: 7994794Abstract: Methods using a probe apparatus configured to measure a set of electrical characteristics in a plasma include providing a chamber wall including at least a set of plasma chamber surfaces configured to be exposed to a plasma, the plasma having a set of electrical characteristics. The method includes installing a collection disk structure configured to be exposed to the plasma, wherein the collection disk structure having at least a body disposed within the chamber wall and a collection disk structure surface that is either coplanar or recessed with at least one of the set of plasma chamber surfaces and providing a conductive path configured to transmit the set of electrical characteristics from the collection disk structure to a set of transducers.Type: GrantFiled: May 24, 2010Date of Patent: August 9, 2011Assignee: Lam Research CorporationInventors: Christopher Kimball, Eric Hudson, Douglas Keil, Alexei Marakhtanov
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Patent number: 7996681Abstract: A method for performing electronic signature verification for an entity is provided. The method includes creating a signature card for the entity by analyzing color change frequency of an initial electronic signature image. The method also includes comparing a second electronic signature image for the entity and the signature card to perform electronic signature verification.Type: GrantFiled: February 26, 2007Date of Patent: August 9, 2011Assignee: Trend Micro IncorporatedInventors: Jui-Pang Wang, Sheng-Chi Hsieh
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Patent number: 7996879Abstract: A method for facilitating connection between an entity's network and a first electronic device is provided. The method includes receiving, using an RFID (radio frequency identification) reader associated with the first electronic device, a first file from an RFID tag, the RFID tag being provided by the entity. The method also includes obtaining connection information from the first file, the connection information including at least one of a security policy and network configuration. The method further includes enabling a user to attempt to log in via the first electronic device, using the connection information, into the network, wherein the log in is attempted using a different connection modality than that employed to receive the first file from the RFID tag.Type: GrantFiled: July 3, 2007Date of Patent: August 9, 2011Assignee: Trend Micro IncorporatedInventors: Chao Fang, Yan Gu, Jialai Zhu
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Patent number: 7991380Abstract: An emergency monitoring and reporting system includes a user unit and a monitoring system. The user unit includes an input device, a user satellite communication system, and a user processor communicatively coupled to the input device and the user satellite communication system. The monitoring system includes a monitoring satellite communication system, an output device, and a monitoring processor communicatively coupled to the monitoring satellite communication system and the output device. The user satellite communication system and the monitoring satellite communication system are adapted for mutual communication via a satellite network such that the output device can present information corresponding to information entered at the input device to an observer.Type: GrantFiled: March 29, 2007Date of Patent: August 2, 2011Assignee: Briar Tek IPInventors: Charles K. Collins, Joseph Landa
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Patent number: 7985688Abstract: A method for etching a substrate having a silicon layer in a plasma processing chamber having a bottom electrode on which the substrate is disposed on during etching. The method includes performing a main etch step. The method also includes terminating main etch step when a predefined etch depth of at least 70 percent of thickness into silicon layer is achieved. The method further includes performing an overetch step. The overetch step including a first process step and a second process step. First process step is performed using a first bottom power level applied to bottom electrode. Second process step is performed using a second bottom power level applied to bottom electrode that is lower than first bottom power level. First process and second process steps are alternately performed a plurality of times. The method yet also includes terminating overetch step after silicon layer is etched through.Type: GrantFiled: December 16, 2005Date of Patent: July 26, 2011Assignee: Lam Research CorporationInventors: Tamarak Pandhumsoporn, Alferd Cofer
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Patent number: 7983018Abstract: An arrangement for securing a wafer during substrate processing is provided. The arrangement includes a power supply and an electrostatic chuck (ESC). The ESC supports the wafer and includes a positive and a negative terminal. A positive high voltage is provided to the positive terminal through an RF filter and a negative high voltage is provided to the negative terminal through the RF filter. The arrangement also includes a first and a second trans-impedance amplifiers (TIAs) that measure a first set of voltages for determining a value of a positive load current applied to the positive terminal and a third and fourth TIAs that measure a second set of voltages for determining a value of a negative load current applied to the negative terminal. The arrangement yet also includes a program to adjust a bias voltage using the values of the positive load current and the negative load current.Type: GrantFiled: August 2, 2010Date of Patent: July 19, 2011Assignee: Lam Research CorporationInventors: Seyed Jafar Jafarian-Tehrani, Ralph Jan-Pin Lu
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Patent number: 7976673Abstract: An apparatus for providing a plasma etch of a layer over a wafer is provided. A capacitively coupled process chamber is provided. A gas source is provided. A first and a second electrode are provided within the process chamber. A first radio frequency power source is electrically connected to at least one of the first and second electrodes, where the first radio frequency power source provides radio frequency power. A second radio frequency power source is electrically connected to at least one of the first and second electrodes. A first modulation control is connected to the first radio frequency power source, to provide a controlled modulation of the first radio frequency power source.Type: GrantFiled: May 6, 2003Date of Patent: July 12, 2011Assignee: Lam Research CorporationInventors: Peter Loewenhardt, Mukund Srinivasan, Andreas Fischer
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Patent number: 7977123Abstract: A method, performed in connection with bevel etching of a substrate, for improving bevel-etch repeatability among substrates, is disclosed. The method includes providing an optical arrangement and ascertaining at least one bevel edge characteristic of a bevel edge of said substrate. The method also includes deriving at least one compensation factor from said at least one bevel edge characteristic, said at least one compensation factor pertaining to an adjustment in a bevel etch process parameter. The method further includes performing said bevel etching utilizing said at least one compensation factor.Type: GrantFiled: May 22, 2009Date of Patent: July 12, 2011Assignee: Lam Research CorporationInventors: Andreas Fischer, Neungho Shin, Fransisco Camargo
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Patent number: 7974410Abstract: A cryptographic key split combiner, which includes a number of key split generators for generating cryptographic key splits and a key split randomizer for randomizing the cryptographic key splits to produce a cryptographic key, and a process for forming cryptographic keys. Each of the key split generators generates key splits from seed data. The key split generators may include a random split generator for generating a random key split based on reference data. Other key split generators may include a token split generator for generating a token key split based on label data, a console split generator for generating a console key split based on maintenance data, and a biometric split generator for generating a biometric key split based on biometric data. All splits may further be based on static data, which may be updated, for example by modifying a prime number divisor of the static data. The label data may be read from a storage medium, and may include user authorization data.Type: GrantFiled: March 6, 2006Date of Patent: July 5, 2011Assignee: TecSec, Inc.Inventors: Edward M. Scheidt, C. Jay Wack
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Patent number: 7971258Abstract: A method for detecting malware in a computer that employs a production operating system during normal use is provided. The method includes activating on the computer a first operating system while the production operating system is dormant and ascertaining at least a portion of the production operating system that would be involved in booting up the computer if the production operating system had been activated instead. The method further includes scanning, while the first operating system is activated and while the production operating system is dormant, the portion of the production operating system. The method further includes neutralizing, while the first operating system is activated and while the production operating system is dormant, the malware responsive to the scanning.Type: GrantFiled: September 28, 2007Date of Patent: June 28, 2011Assignee: Trend Micro IncorporatedInventors: En-Yi Liao, Richard Hsu, Franson Fang, Zhihe Zhang, Flanker Lu, Serend Lin
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Patent number: 7969948Abstract: The present invention discloses a method for implementing multi-carrier HSDPA for TD-SCDMA system, comprises: establishing a multi-carrier cell at the network side, wherein multiple carrier resources in the multi-carrier cell being managed and allocated as a whole at the network side; configuring HS-PDSCH resources on at least one of the carriers of the multi-carrier cell, and at least one pair of HS-SCCH and HS-SICH physical channel resources on at least one of the carriers, at the same time, creating a MAC-hs to manage the channel resources on the carriers and the configuration of the MAC-hs entity itself; the network side allocating HSDPA resources to a user terminal, and sending the HSDPA resources to the user terminal; and the network side dynamically allocating the HSDPA resources on at least one carrier for the user terminal to transmit service data.Type: GrantFiled: August 18, 2006Date of Patent: June 28, 2011Assignee: ZTE CorporationInventors: Yincheng Zhang, Zijiang Ma, Xuejun Yang, Zhifeng Ma
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Patent number: 7965860Abstract: The present invention relates to a device for scanning a split-cast model, said split-cast model covering the area of a plurality of tooth sites and comprising a plurality of model parts, said device comprising: an optical scanning system (2) for one or for a plurality of split-cast models having a scanning area (3) with a width between 5 mm and 100 mm, the scanning system being adapted to be used for acquiring first data from a survey scan covering a plurality of model parts and second data from an individual scan covering only one model part, said first and second data representing the model with different/identical resolutions and/or different/identical completeness, a memory means for storing at least said first and second data, means for 3D matching said first and second data, a base plate, and further comprising a holding device for a split-cast model and/or individual model parts, which is adapted to be arranged on said base plate.Type: GrantFiled: February 15, 2007Date of Patent: June 21, 2011Assignee: Institut Straumann AGInventors: Stephan Holzner, Gerhard Weber
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Patent number: 7959587Abstract: The present invention is a portable integrated sound, physioacoustic, and colored light apparatus. This is a self-contained electrically powered device designed to stimulate and facilitate the human body's innate self-healing mechanisms. The active components are housed in a portable pyramidal-shaped lower enclosure (100) with a single recessed panel (102) on one side of the unit containing a user interface for controlling the pitch and tonal quality of the generated sound and physioacoustic frequencies. The unit also contains specified colored light elements situated under a quartz crystal pyramid capstone (108) which react with the sound frequencies by increasing and decreasing in intensity. The user or therapist has the capability to access the electronically generated sound source to achieve a wide variety of tonal sound and vibrational components, as well as the ability to select the desired colored light therapy component.Type: GrantFiled: May 7, 2009Date of Patent: June 14, 2011Inventor: August John Worley
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Patent number: 7959984Abstract: In a plasma processing system, a method of reducing byproduct deposits on a set of plasma chamber surfaces of a plasma processing chamber is disclosed. The method includes providing a deposition barrier in the plasma processing chamber, the deposition barrier is configured to be disposed in a plasma generating region of the plasma processing chamber, thereby permitting at least some process byproducts produced when a plasma is struck within the plasma processing chamber to adhere to the deposition barrier and reducing the byproduct deposits on the set of plasma processing chamber surfaces.Type: GrantFiled: December 22, 2004Date of Patent: June 14, 2011Assignee: Lam Research CorporationInventors: Shrikant P. Lohokare, Andrew D. Bailey, III
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Patent number: 7953984Abstract: A computer-implemented method detecting malware that includes providing a malware detection application and providing a search engine, the search engine being configured to receive data and commands from the malware detection application and to return data pertaining to search results to the malware detection application. The method also includes sending at least one of scan options and at least one malware-suggestive pattern from the malware detection application to the search engine. The method additionally includes searching, using the search engine and the at least one of scan options and the at least one malware-suggestive pattern, to obtain data pertaining to scan targets. The method also includes sending the data pertaining to the scan targets from the search engine to the malware detection application. The method further includes performing malware detection, using the malware detection application and the data pertaining to the scan targets, on the scan targets.Type: GrantFiled: June 29, 2006Date of Patent: May 31, 2011Assignee: Trend Micro IncorporatedInventors: Chang-Wei Chung, Yu-Cheng Hsu, Chia-Tai Chang
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Patent number: 7945586Abstract: A computer-implemented method for providing protection for a data file is disclosed. The method includes employing allowable location information to control access to information of the data file, wherein the allowable location information is associated with the data file The information in the data file is inaccessible if a location of a computer employed to access the data file is not within an allowable geographic area defined by the allowable location information.Type: GrantFiled: March 29, 2007Date of Patent: May 17, 2011Assignee: Trend Micro IncorporatedInventors: Chao Fang, Yan Gu
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Patent number: 7942166Abstract: A device for delivering gas is disclosed. The device may include a chamber and a guide. The chamber may include a set of input openings for receiving the gas and an output opening for providing the gas. The set of input openings may include a first hole and a second hole. The chamber may receive a first portion of the gas through the first hole and a second portion of the gas through the second hole. The guide may include a guiding unit. The guiding unit may be disposed inside the chamber. The guiding unit may contact the first portion of the gas before the first portion of the gas contacts the second portion of the gas and may contact the second portion of the gas before the second portion of the gas contacts the first portion of the gas.Type: GrantFiled: May 5, 2008Date of Patent: May 17, 2011Assignee: JAtech Precision (H.K.) LimitedInventor: James Lu