Abstract: A vacuum pumping system comprises a first gas supply for supplying a first gas, such as xenon, to a vacuum chamber. A pump receives the gas output from the chamber. A second gas supply supplies a purge gas, such as nitrogen or helium, for pumping with the first gas. A gas separator receives the pumped gases exhausted by the pump, and recovers the first gas and the purge gas from the stream. The recovered first gas is recirculated through the vacuum chamber, and the recovered second gas is recirculated through at least the pump.

Abstract: The present invention is an apparatus and method for evacuating a number of vacuum processing chambers containing incompatible gases. The gases are directed to a subatmospheric abatement chamber containing preconditioning devices. The gases are treated in the abatement chamber to render them compatible. The compatible gases are then drawn from the abatement chamber as a single stream through a backing pump.

Abstract: An improvement in a magnetic resonance method for determining at least one property of multiple samples, including introducing multiple samples into the interrogation zone simultaneously; applying a gradient magnetic field to the interrogation zone wherein different positions within the interrogation zone are sensitive to different specific frequencies; monitoring energy emitted by the samples in the different positions and generating an output signal having a characteristic which is proportional to the energy emitted corresponding thereto in different frequency bands; and, attributing the signals to specific positions and samples, and comparing the output signal characteristics of the specific positions and samples with like data obtained from at least one similar sample to provide an indication of the corresponding property of the samples.

Abstract: A mechanical pump having an inlet and spaced therefrom an outlet for the passage of fluid therethrough and incorporating at least one flame arrester.

Abstract: A scroll compressor which comprises a scroll assembly comprising two scroll walls, and a drive for causing a relative orbiting motion between the scroll walls for compressing fluid on two fluid flow paths between an inlet and an exhaust of the scroll assembly. A first fluid flow path is formed between a wall surfaces of the scroll walls and a second fluid flow path is formed between another facing wall surfaces of the scroll walls. A first ambient clearance A1 is selected between the first two facing surfaces, and a second ambient clearance A2 is selected between the second two facing surfaces, and where the first and the second ambient clearances are selected independently from each other. Independent selection permits each ambient clearance to be designed according to its own performance requirements, to take into account thermal expansion and manufacturing tolerances.

Abstract: In a vacuum pump of the regenerative type or including a regenerative section in which a rotatable vertical shaft is supported by upper and lower bearings, a lubricating system for lubricating the upper bearing comprising an axial bore extending along the shaft and communicating at its upper end with at least one oil hole in alignment with the upper bearing, the lower open end of the axial bore extending in to a shaft reservoir located in a sump for containing lubricating fluid, the arrangement being such that centrifugal force generated by the rotation of the shaft will cause the lubricating fluid in the shaft reservoir to pass along the axial bore as a thin film towards the oil hole and hence to the upper bearing, in which at least one port is formed in a wall of the shaft reservoir to permit the passage of lubricating fluid therethrough from the sump in a controlled manner dependent upon the head of lubricating fluid in the sump above the port.

Abstract: A system for lubricating the upper bearing supporting a rotatable vertical shaft in a machine or pump comprising an axial bore extending along substantially the length of the shaft and communicating at its lower open end with a reservoir containing lubricating fluid, at least one radial oil hole extending between the axial bore and the upper bearing for the delivery of lubricating fluid thereto, the arrangement being such that centrifugal force generated during rotation of the shaft will draw lubricating fluid from the reservoir upwardly along the axial bore in the form of a thin film and towards the radial oil hole for delivery to the upper bearing, and an air delivery and demisting circuit including an air/lubricating fluid mist chamber communicating with the axial bore via at least one radial port located between the lower open end and the upper bearing, the port having a distal end extending in to the axial bore, at least one air hole extending between the axial bore and the outer cylindrical surface of t

Abstract: A filling apparatus may include a conveyor for transporting the vials in an aseptic zone and a vial filler including a dispenser, for example, a filling needle, connected to a fluid supply. The vial filler may be disposed in the aseptic zone. The apparatus may also comprise a drive disposed in a non-aseptic zone, operatively connected to the vial filler, and configured to move the dispenser into and out of filling engagement with the vials being transported. The vial filler may further include a valve, for example, a pinch valve, disposed in the aseptic zone proximate the dispenser and movable with the dispenser for controlling the fluid flow through the dispenser.

Abstract: An apparatus and method for drawing a sample of a chemical-mechanical polishing slurry for analysis of at least one property, e.g., particle size distribution, is described.

Abstract: A flow-indicating device is provided, comprising a tubular body adapted to direct a flow therethrough. The body has opposed ends, with one end being a downstream end, and has a flow element disposed therein. A shaping block is operably engaged with the body so as to form a constricted portion between the ends, the constricted portion of the body defining a constricted orifice having a downstream side. The constricted orifice is configured to prevent the flow element from passing therethrough. The flow element is disposed on the downstream side of the constricted portion and is configured to engage the constricted orifice when the flow is below a flow rate and to move toward the downstream end of the body as the flow increases over the flow rate to thereby indicate the flow through the body.

Abstract: A compound vacuum pump comprising at least one turbo-molecular stage and downstream therefrom a multi-channel molecular drag stage, a first inlet through which fluid can pass through the turbo-molecular stage and the molecular drag stage towards a pump outlet, a second inlet through which fluid can enter the pump at a location between the turbo-molecular and the molecular drag stages to pass only through the molecular drag stage towards the pump outlet, in which one or more channels of the molecular drag stage are adapted to communicate directly with the second inlet whilst the remaining channel or channels communicate with the turbo-molecular stage.

Abstract: A seal assembly comprising a main O-ring seal element for engaging in a fluid tight manner opposed surfaces of two objects to be sealingly connected together and a barrier element positioned to protect all or a substantial portion of the surface of the main O-ring seal element against contact by the fluid when passing through the seal assembly from one object to the other object.

Abstract: A system is provided that includes a load lock apparatus having an interior configured to receive an object. At least one inlet valve may be flow coupled to the interior of the load lock apparatus, and at least one outlet valve may also be flow coupled to the interior of the load lock apparatus. A controller may be configured to selectively control opening and closing of the at least one inlet valve. The load lock apparatus may include an object receiving mechanism that is movable within the interior of the load lock apparatus to throttle the evacuation of the interior. Several methods of using the system and load lock apparatuses are also disclosed.

Abstract: A vacuum pump having a screw mechanism and comprising two externally threaded rotors mounted on respective shafts in a pump body and adapted for counter-rotation therein with intermeshing of the rotor threads with close tolerances between the threads and internal surfaces of the pump body in order that gas may be pumped from a pump inlet to a pump outlet by action of the rotor threads, the root diameter of each rotor increases and the thread diameter of each rotor decreases in a direction from the pump inlet to the pump outlet, and wherein the pitch of the rotor threads decreases in a direction from the pump inlet to the pump outlet.

Abstract: A compound vacuum pump includes a regenerative section and a Holweck section. An annular abutment is formed on the radially innermost rotating cylinder of the Holweck section. The abutment acts to cause dust and foreign particles entering an inlet of the pump to be trapped before entering an inlet of the regenerative section. A circular barrier may be used with the abutment to assist with trapping the dust and foreign particles.

Abstract: A valve assembly comprising a housing having an inlet and space therefrom an outlet, means located in the housing for controlling the flow of fluid between the inlet and the outlet, said means including a main valve movable between a first relatively closed position and a second open position, said movement being controlled by a pilot valve assembly including a temperature sensitive member such that when the temperature in the fluid reaches a predetermined value the pilot valve is opened thereby allowing the main valve to move from said first to said second open position.

Abstract: A method for the abatement of one or more pyrophoric gases in a gas stream, which includes introducing water in to the gas stream and/or mixing the gas stream with preheated air and introducing the gas stream in to a container in which the pyrophoric gases are abated.

Abstract: High strength zirconium alloys with improved strength and creep resistance having 1.5 to 6 weight percent bismuth, and niobium.

Abstract: A process for purifying methylsilane is described. Methylsilane containing impurities such as carbon dioxide, chlorosilane and atmospheric gases is fed from a source container unit to an adsorption unit at −40° C. The adsorption unit is connected to a collection unit at −190° C. where the purified methylsilane is transported and can be stored.

Abstract: An equipment skid for mounting ancillary equipment to support a semiconductor processing tool. The equipment skid comprises a plurality of equipment sections and a service section. The ancillary equipment is mounted within the equipment sections and the plurality of equipment and service sections are connected to one another in an in-line relationship to define a framework to allow external connections between the ancillary equipment and the semiconductor processing tool to pass through a region overlying the footprint of the service section. The equipment and service sections are preferably covered by an enclosure to contain leakage.