Abstract: A densitometer (10) includes a gas sample plenum (40) that is connected to a gas supply pipe (26) via a flow-restricted inlet duct (42) to at least partially isolate and damp the sample plenum (40) from shocks and noises, turbulences, and abrupt pressure changes in the gas supply. A cantilevered vane (110) is positioned in the sample plenum (40) for gas density determinations on the principle that resonant frequency of the vane (110) is a function of the density of the gas in the sample plenum (40). The resonant frequency of the vane (110) in the gas is determined by applying a magnetic field generated by a driver assembly 120 against the vane (110) and detecting the resonant frequency with a vibration detector (117), which is connected to the driver assembly 120 in a phase locked loop.

Abstract: The present invention provides a laser radar (ladar) imaging system in which both the range of an object being imaged and the velocity of the object can be measured simultaneously and accurately with superior range resolution and with minimal ambiguity. Use is made of a ladar system based on matched-filter cross-correlation of light pulse waveforms that have multiple, simultaneous frequency components with phase variation and incommensurate spectral frequency spacing between frequency components.

Abstract: An apparatus for preventing the deposition and build-up of chains of polymerized TEOS molecules in the pipes downstream from a reaction furnace in a semiconductor manufacturing process includes an annular nozzle assembly positioned inside the pipes such that a plenum is formed between the annular nozzle assembly and the pipes and such that the annular nozzle forms a hollow tubular conduit for conducting effluent from the reaction furnace. The annular nozzle assembly preferably includes three hollow and generally cylindrical sections, an upstream collar, a downstream spacer ring, and a middle section(s) positioned between the upstream collar and the downstream spacer ring. The annular nozzle assembly is placed within the pipes downstream of the reaction furnace during operation and is modularly constructed so that the length of the annular nozzle assembly can be varied, depending on the length of the downstream pipes from the reaction furnace.

Abstract: A supply plenum connected to a source of compressed natural gas (CNG) and a control valve assembly for selectively turning on the flow of CNG through a sonic nozzle and out through a dispensing hose assembly. Pressure and temperature transducers connected to the supply plenum measure the stagnation pressure and temperature of the CNG and the ambient temperature, and a pressure transducer fluidically connected to the vehicle tank via the dispensing hose assembly monitors the pressure of the CNG in the vehicle tank.

Abstract: A supply plenum connected to a source of compressed natural gas (CNG) and a control valve assembly for selectively turning on the flow of CNG through a sonic nozzle and out through a dispensing hose assembly. Pressure and temperature transducers connected to the supply plenum measure the stagnation pressure and temperature of the CNG and the ambient temperature, and a pressure transducer fluidically connected to the vehicle tank via the dispensing hose assembly monitors the pressure of the CNG in the vehicle tank.

Abstract: A mass flow meter for a gas dispenser includes apparatus and method for determining specific heat ratio of the gas as a function of two pressure measurements in relation to a nozzle and for determining mass flow rate as a function of the specific heat ratio, the two pressure measurements in relation to the nozzle, and a density measurement of the gas.