Abstract: A method for placing nitride laser diode arrays on a thermally and electrically conducting substrate is described. The method uses an excimer laser to detach the nitride laser diode from the sapphire growth substrate after an intermediate substrate has been attached to the side opposite the sapphire substrate. A secondary layer is subsequently deposited to act as a transfer support structure and bonding interface. The membrane is released from the intermediate substrate and a thermally conducting substrate is subsequently bonded to the side where the sapphire substrate was removed. Similarly, the secondary layer may be used as the new host substrate given an appropriate thickness is deposited prior to removal of the intermediate substrate.
Abstract: A passive semiconductor device structure is made using planar lateral oxidation to define a buried oxidized semiconductor structure such as a passive waveguide, microlens or DBR mirror stack.
Type:
Grant
Filed:
December 27, 1999
Date of Patent:
April 15, 2003
Assignee:
Xerox Corporation
Inventors:
Christopher L. Chua, Philip D. Floyd, Thomas L. Paoli, Decai Sun
Abstract: A structure and method for an asymmetric waveguide nitride laser diode without need of a p-type waveguide is disclosed. The need for a high aluminum tunnel barrier layer in the laser is avoided.
Type:
Grant
Filed:
December 3, 2001
Date of Patent:
April 1, 2003
Assignee:
Xerox Corporation
Inventors:
Christian G. Van de Walle, David P. Bour, Michael A. Kneissl, Linda T. Romano
Abstract: A method of producing an improved thin film transistor structure is provided having no source/gate or drain/gate overlap. A laser-assisted doping technique is applied to fabricate such transistors. A radiation filter is employed, which is transparent to light at the photolithography wavelength, but reflective or opaque at the laser wavelength. Eliminating source/gate and drain/gate overlap significantly reduces or eliminates parasitic capacitance and feed-through voltage between source and gate. Short-channel a-Si:H thin film transistors may be obtained having high field effect mobilities. Improved pixel performance and pixel-to-pixel uniformity is provided.
Type:
Grant
Filed:
October 29, 1997
Date of Patent:
February 1, 2000
Assignee:
Xerox Corporation
Inventors:
Ping Mei, Rene A. Lujan, James B. Boyce, Christopher L. Chua, Michael G. Hack