Abstract: A method and system for reducing displacements of a semiconductor wafer caused by thermal stresses during a fabrication process includes clamping the wafer to the multiple segments of a segmented chuck wherein the segmented chuck is capable of selectively clamping and unclamping regions of the semiconductor wafer, exposing a region of the wafer clamped to a segment of the chuck to an energy source during the fabrication process that causes thermal stress in the clamped region, unclamping the exposed region of the semiconductor wafer from the corresponding segment of the segmented chuck, and reclamping the exposed region of the semiconductor wafer to the segmented chuck as the thermal stresses of the exposed wafer region are relieved.

Abstract: A reaction frame having a first reaction frame portion and a second reaction frame portion receives reaction forces from a stage. First reaction frame portion is coupled to ground by a ground rod aligned along the longitudinal side of the first reaction frame portion; second reaction frame portion of the reaction frame is coupled to an interconnect rod passing parallel to the plane defined by the first reaction frame portion and second reaction frame portion. Ends of interconnect rod have a damper therebetween. One end is coupled to the first reaction frame portion while the other end is coupled to the second reaction frame portion. Reaction forces in received by the second reaction frame portion are transferred to ground through the interconnect rod and the first reaction frame portion. Alternately, the interconnect rod does not use the damper when alligned with the ground rod.

Abstract: A method and system for organizing selectable elements on a graphical user interface (GUI). Initially, the method provides at least two selectable elements for display on a GUI. Each selectable element is associated with a target element when it is selected. The method generates a first access frequency index for each selectable element in the list which corresponds to a number of times the selectable element is selected. Next, the selectable elements are organized on the GUI based upon the first access frequency index generated for each selectable element. In one embodiment, the selectable elements with a higher first access frequency index are placed in first area on the GUI while selectable elements with a lower first access frequency index are placed in a second area on the GUI. As a result, a user can select the selectable elements on a GUI easier when they are organized according to the principles of this invention.