Patents Represented by Law Firm Lowe, Price, LeBlanc, Becker & Suhr
  • Patent number: 4961052
    Abstract: A probing plate for wafer testing is provided with a plurality of probes arranged so as to correspond to a plurality of bonding pads of semiconductor devices fabricated on a semiconductor wafer. The probing plate has a base plate formed of an insulating material, such as a photosensitive glass, and has contact fingers each having a raised portion in the free end thereof, contact conductors respectively formed on the surfaces of the raised portions of the contact fingers so as to be brought into contact with the corresponding bonding pads, and wiring conductors formed in a predetermined pattern on the surface of the base plate so as to extend respectively from the contact conductors. The contact conductors and the wiring conductors are formed simultaneously by a photolithographic process. The contact fingers and the raised portions thereof are also formed by subjecting the base plate to a photolithographic process.
    Type: Grant
    Filed: July 17, 1989
    Date of Patent: October 2, 1990
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tetsuo Tada, Ryoichi Takagi, Masanobu Kohara