Patents Represented by Law Firm McAulay Fisher Nissen Goldebrg & Kiel, LLP
  • Patent number: 5772386
    Abstract: In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation.
    Type: Grant
    Filed: March 14, 1996
    Date of Patent: June 30, 1998
    Assignee: Jenoptik AG
    Inventors: Andreas Mages, Werner Scheler, Herbert Blaschitz, Alfred Schulz, Heinz Schneider