Patents Represented by Law Firm McCormick, Paudling & Huber
  • Microwave plasma assisted supersonic gas jet deposition of thin film materials
    Patent number: 5256205
    Abstract: An apparatus for fabricating thin film materials utilizing high speed gas dynamics relies on supersonic free jets of carrier gas to transport depositing vapor species generated in a microwave discharge to the surface of a prepared substrate where the vapor deposits to form a thin film. The present invention generates high rates of deposition and thin films of unforeseen high quality at low temperatures.
    Type: Grant
    Filed: January 7, 1992
    Date of Patent: October 26, 1993
    Assignee: Jet Process Corporation
    Inventors: Jerome J. Schmitt, III, Bret L. Halpern