Abstract: A metal-to-metal conductive plug-type antifuse has a conductive plug disposed in an opening in an insulating layer. A programmable material feature (for example, amorphous silicon) overlies the conductive plug. A conductor involving a metal (for example, aluminum or copper) that migrates in the programmable material overlies the programmable material. To prevent migration of metal from the conductor into the programmable material when the antifuse is not programmed, the conductor has a layer of barrier metal between the metal that migrates and the programmable material. In some embodiments, there are two layers of barrier metal. An airbreak after formation of the first barrier metal layer improves the ability of the barrier metal to prevent diffusion between the programmable material and the overlying conductor.

Abstract: A washer includes driving and scrubbing rollers that press against the opposing surfaces of a substrate, which may be, e.g., a small form factor disk. The driving rollers and scrubbing rollers are approximately aligned along two different radii of the substrate that are separated by 180 degrees. The driving rollers rotate in opposite directions as do the scrubbing rollers. During the scrub cycle, the driving rollers cause the substrate to rotate, while the scrubbing rollers scrub the opposing surfaces of the substrate. Outside diameter rollers that are orthogonally positioned relative to the driving rollers and the scrubbing rollers, and which may be free spinning, contact the outside diameter of the substrate and hold the substrate in position during the scrub cycle. The substrate is loaded into the washer by lifting the substrate, via a lifting arm, to the driving and scrubbing rollers.