Abstract: In one aspect, the invention provides methods and apparatus for forming optical devices on large area substrates. The large area substrates are preferably made of quartz, silica or fused silica. The large area substrates enable larger optical devices to be formed on a single die. In another aspect, the invention provides methods and apparatus for forming integrated optical devices on large area substrates, such as quartz, silica or fused silica substrates. In another aspect, the invention provides methods and apparatus for forming optical devices using damascene techniques on large area substrates or silicon substrates. In another aspect, methods for forming optical devices by bonding an upper cladding layer on a lower cladding and a core is provided.

Abstract: A method for processing a substrate including depositing a dielectric layer containing silicon, oxygen, and carbon on the substrate by chemical vapor deposition, wherein the dielectric layer has a carbon content of at least 1% by atomic weight and a dielectric constant of less than about 3, and depositing a silicon and carbon containing layer on the dielectric layer. The dielectric constant of a dielectric layer deposited by reaction of an organosilicon compound having three or more methyl groups is significantly reduced by further depositing an amorphous hydrogenated silicon carbide layer by reaction of an alkylsilane in a plasma of a relatively inert gas.

Abstract: Method and apparatus for polishing substrates. A chemical mechanical polishing article comprises a body and a patterned surface. The patterned surface comprises a plurality of slurry distribution grooves and a plurality of islands on the body. Each of the plurality of the islands comprises a base portion, a polishing surface disposed thereon, and a contoured surface disposed therebetween. The base portion comprises one or more sidewalls defining at least a portion of the plurality of slurry distribution grooves. The polishing surface is smaller than the base portion, the difference therebetween attributable to the contoured surface. In a particular embodiment, conductive materials and low k dielectric films are polished with reduced or minimum substrate surface damage.

Abstract: A method and apparatus for processing anomalous trigger event conditions to provide anomalous trigger event rate measurements. The apparatus operates to identify one or more trigger events in at least one input signal IN, determine the number of events during a period of time (e.g. events per second) and provide a visual representation of this determination to a user via a display device. The visual representation may comprise an alphanumeric display, a waveform, a graphic image proximate a waveform and the like.

Abstract: Apparatus and method for controlling pressure surges in a wellbore. One embodiment provides a downhole surge control tool equipped with a fluid motivator. The fluid motivator may be, for example, any type of motor or a venturi. The fluid motivator motivates wellbore fluid through a bypass channel formed in the tool and then out an exhaust port of the tool.

Abstract: A fire-resistant system for passing at least one cable, tube, or the like through an opening in a wall, which system having a fire-resistant sleeve member includes a continuous slit, which is at least partially arranged round said at least one cable, tube, or the like, and which is at least partially installed in said opening, characterized in that the sleeve member can be placed in a position in which longitudinal edges of said slit overlap permanently under material stress.

Abstract: A menu-driven television program access system and method provide a menu structure that allows subscribers to select and view television programming and other services. The menu structure lists programs by program category or by chronological order of broadcast. The subscriber scrolls the menus until a desired program identifier, such as a title and date/time of broadcast is found. The subscriber then operates a “go-button” on a remote control to select the desired program. In response to operation of the “go-button,” a set top terminal turns to a channel carrying the selected program.

Abstract: A system includes a plurality of digital storage oscilloscopes (DSOs) in which each DSO requires a respective temporal portion of a signal under test (SUT) according to a synchronized triggering signal and respective post-trigger count periods such that a plurality of acquisition records may be concatenated to produce a longer acquisition record.

Abstract: The present invention generally provides a method for depositing a low dielectric constant film using an e-beam treatment. In one aspect, the method includes delivering a gas mixture comprising one or more organosilicon compounds and one or more hydrocarbon compounds having at least one cyclic group to a substrate surface at deposition conditions sufficient to deposit a non-cured film comprising the at least one cyclic group on the substrate surface. The method further includes substantially removing the at least one cyclic group from the non-cured film using an electron beam at curing conditions sufficient to provide a dielectric constant less than 2.5 and a hardness greater than 0.5 GPa.

Abstract: Carboxylate salts of amines are used as components of heat exchange fluids. The amines may have a ratio of N to C of 1:0 to 1:12 and the carboxylate anion may be derived from an acid of the formula H(CH2)0-3COOH. A preferred monoamine heat exchange fluid utilizes triethanolamine formate. Lower carboxylate salts of diamines and triamines having the formula R2[N[(CH2)mNR]1-2]R where each R is independently selected from moieties of the formula —CnH2n+1 and moieties of the formula H[O(CH2)1-4]—, each m is independently a number from 1 to 6, and each n is a number from 1 to 4, are disclosed as compounds.

Abstract: A planar antenna that facilitates directional communication to a mesh network. The antenna is housed in a relatively small, planar package that can easily be attached to a window pane to enable the antenna to communicate with a neighboring rooftop mounted node of the mesh network. The package contains an M by N element phased array, where M and N are integers greater than one. The array is driven by microwave signals supplied from a P-angle phase shifting circuit, where P is an integer greater than one. Thus, the antenna synthesizes a single main beam and the antenna's main beam can be electrically “pointed” in one of P directions. In one embodiment of the invention, the array comprises 40 physical elements (8×5 elements) and has three selectable directions (i.e., the phase shifters provide +90, 0 and ?90 degree shifts that move the beam left 45 degrees, center and right 45 degrees).

Abstract: The steel drill string attached to a drilling bit during typical rotary drilling operations used to drill oil and gas wells is used for a second purpose as the casing that is cemented in place during typical oil and gas well completions. Methods of operation are described that provide for the efficient installation a cemented steel cased well wherein the drill string and the drill bit are cemented into place during one single drilling pass down into the earth. The normal mud passages or watercourses present in the rotary drill bit are used for the second independent purpose of passing cement into the annulus between the casing and the well while cementing the drill string into place during one single pass into the earth. A one-way cement valve is installed near the drill bit of the drill string that allows the cement to set up efficiently under ambiently hydrostatic conditions while the drill string and drill bit are cemented into place during one single drilling pass into the earth.

Abstract: The present invention generally relates to methods and apparatus for sealing a tubular. In one embodiment, the apparatus includes a packer having a body, a sealing element, and a cleaning device operatively connected to the body. In one aspect, the apparatus may clean a surface of the tubular before the sealing element expanded into contact therewith.

Abstract: A polishing apparatus that employs a polishing media retention arrangement to prevent slippage or wrinkles in the polishing media during polishing. The polishing media is drawn against a support surface by a vacuum applied between the polishing media and the support surface. Also, a porous layer may be placed between the polishing media and the support surface to form dimples in the polishing media upon the application of vacuum. An alternative arrangement draws the polishing media against a carrier and the substrate to be polished.

Abstract: High through-put Cu CMP is achieved with reduced erosion and dishing by a multi-step polishing technique. Deposited Cu is polished with fixed abrasive polishing pads initially at a high removal rate and subsequently at a reduced removal rate and high Cu:barrier layer (Ta) selectivity. Embodiments of the present invention include reducing dishing by: controlling platen rotating speeds; increasing the concentration of active chemicals; and cleaning the polishing pads between wafers. Embodiments also include removing particulate material during CMP by increasing the flow rate of the chemical agent or controlling the static etching rate between about 100 ? and about 150 ? per minute, and recycling the chemical agent. Embodiments further include flowing an inhibitor across the wafer surface after each CMP step to reduce the static etching rate.

Abstract: A heat sink hand placement tool for manually installing a heat sink to an integrated circuit (IC). The heat sink tool includes a heat sink interface block having a lower surface adapted to provide a force on a heat sink disposed over an IC. A force transducer interfaces with an upper surface of the heat sink interface block to produce an electrical signal, which is routed to a measurement circuit to measure the electrical signal. A chassis is disposed over the force transducer and the measurement circuit, wherein the chassis is adapted to receive a force from a user, such that the force is transmitted to the lower surface of the heat sink interface block. The measurement circuit then provides an indication of the force being applied within a predetermined range.

Abstract: Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of the robot due to thermal expansion using the first set and the second set of positional metrics. Acquiring the first and second set of positional metrics may occur at the same location within a processing system, or may occur at different locations. For example, in another embodiment, the method may comprise acquiring a first set of positional metrics at a first location proximate a processing chamber and acquiring a second set of positional metrics in another location. In another embodiment, substrate center information is corrected using the determined position of the robot.

Abstract: Method and apparatus are provided for polishing substrates comprising conductive and low k dielectric materials with reduced or minimum substrate surface damage and delamination. In one aspect, a method is provided for processing a substrate including positioning a substrate having a conductive material form thereon in a polishing apparatus having a rotational carrier head and a rotatable platen, wherein the substrate is disposed in the rotational carrier head and the platen has a polishing article disposed thereon, rotating the first carrier head at a first carrier head rotational rate and rotating a platen at a first platen rotational rate, contacting the substrate and the polishing article, accelerating the first carrier head rotational rate to a second carrier head rotational rate and accelerating the first platen rotational rate to a second platen rotational rate, and polishing the substrate at the second carrier head rotational rate and at the second platen rotational rate.

Abstract: An optical module comprises a support (T) on which an optical fibre (F) is mounted. Introduced on the support (T) is a V-groove (VG) that serves only to fix the fibre (F). Applied perpendicularly to the groove (VG) is a strip-shaped contact layer (CL). The fibre (F) is pressed into the groove (VG). When the fibre (F) is pressed into the groove (VG), the contact layer (CL) forms a mechanical joint with the fibre (F) in the form of a cold weld. This functions particularly well in the case of glass fibres having a contact layer of aluminium (Al). The contact layer (CL) is preferably composed of a plurality of narrow strips extending perpendicularly to the groove (VG).