Patents Represented by Attorney Myers Bigel Sibley & Sajvec, P.A.

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  • Apparatus and method of sensing leakage of chemical liquid
    Patent number: 7944363
    Abstract: An apparatus and method of sensing leakage of chemical liquid is provided. The apparatus for sensing leakage of chemical liquid, includes a sensing unit measuring a flow rate of chemical liquid being supplied to a process chamber, a process control unit judging whether leakage of the chemical liquid has occurred using the measured flow rate of the chemical liquid and generating a control signal, and an equipment control unit receiving an input of the control signal and controlling an operation of equipment.
    Type: Grant
    Filed: September 16, 2008
    Date of Patent: May 17, 2011
    Assignee: Semes Co., Ltd.
    Inventors: Hee-Suk Kim, Tai-Kweon Lim