Abstract: A control system for fault detection with a control device including a processor having a control program that calculates at least one actuating value signal outputted to an actuator. At two process points in the control program, at least one control point (K) is defined at which a program output value is outputted to form a monitoring signal that is outputted to a monitoring device. The monitoring signal contains at least two signal elements of three possible signal elements. A first signal element represents the control point through which the control program should have directly run before the control point, a second signal element represents the present control point, and a third signal element represents the next control point in the program process. The monitoring device checks the monitoring signals for the correct state, and a state signal can be output as a fault signal.

Abstract: Method for producing a vacuum measuring cell having a pressure transducer diaphragm with housing plates sealed on opposite sides to form reference and measuring vacuum chambers. An opening in one plate communicates with the measuring vacuum chamber and has a sealed connection for joining to medium to be measured. The diaphragm and plates are aluminum oxide ceramic and at least one of the seals is aluminum with a thickness of 0.5 ?m to 30 ?m. The ceramic parts are pressed together at increased temperature of 600° C. to 680° C. in a process gas atmosphere including a reducing gas, during a time of 30 to 90 minutes, and subsequently a tempering step is carried out in a second process gas atmosphere including oxygen, tempering taking place at a temperature of 450° C. to 575° C. such that the metallic aluminum is oxidized into aluminum oxide.