Abstract: The flatness of the surface of the light-receiving portion must be increased when the upper structural layer of a light detector is etched. The present invention provides a method for manufacturing an integrated circuit in which an aperture is formed in a stack in which an underlayer, a light-receiving area pad, and an upper structural layer are layered on a substrate, the method comprising a light-receiving area pad etching step for etching the structural layer and the light-receiving area pad under etching conditions in which a high selectivity ratio is maintained between the upper structural layer and the light-receiving area pad; and an underlayer etching step for switching to etching conditions in which the light-receiving area pad has a high selectivity ratio in relation to the underlayer following the light-receiving area pad etching step, and etching the light-receiving area pad and the underlayer.

Abstract: An automatic transmission establishing multiple gear stages includes a reduction planetary gear, at least two clutches transmitting a decelerated rotation transmitted from the reduction planetary gear, and a planetary gear set inputted the decelerated rotation transmitted through the two clutches. The reduction planetary gear and the two clutches are arranged in one side of the planetary gear set. The reduction planetary gear is arranged between the clutches.