Patents Represented by Attorney Patterson, Thunete, Skaar & Christensen, P.A.

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  • Thin wafer insert
    Patent number: 7219802
    Abstract: A plastic insert (20) is configured to provide support of thin wafers (49) in wafer carriers (45) configured to provide peripheral wafer support. The invention includes the insert, the insert in combination with a wafer carrier, and the, methods of supporting the thin wafers as provided by the insert and the wafer carrier. The insert (20), in preferred embodiments, utilize tabs (80, 82) that fit into the side wall recesses (53) and have an interference fit in said recesses to secure the insert in place.
    Type: Grant
    Filed: March 28, 2002
    Date of Patent: May 22, 2007
    Assignee: Entegris, Inc.
    Inventors: Brian Wiseman, Michael Peterson, Tony Simpson