Abstract: An electrical resistor comprising an insulating substrate, a thin continuous siloxane film of a reaction product of a hydrolyzed silane coated on the insulating substrate, the hydrolyzed silane may have the general formula: ##STR1## wherein R.sub.1 is an alkylidene group containing 1 to 20 carbon atoms, R.sub.2, R.sub.3 and R.sub.7 are independently selected from the group consisting of H, a lower alkyl group containing 1 to 3 carbon atoms and a phenyl group, X is an anion of an acid or acidic salt, and y is 1, 2, 3 or 4, and at least two spaced apart electrodes in electrical contact with the thin continuous siloxane film on the insulating substrate. Processes for preparing and using the resistor are also disclosed.