Abstract: Oxycarbosilane materials make excellent matrix materials for the formation of porous low-k materials using incorporated pore generators(porogens). The elastic modulus numbers measured for porous samples prepared in this fashion are 3–6 times higher than porous organosilicates prepared using the sacrificial porogen route. The oxycarbosilane materials are used to produce integrated circuits for use in electronics devices.
Type:
Grant
Filed:
January 7, 2005
Date of Patent:
June 12, 2007
Assignee:
International Business Machines Corporation
Inventors:
Geraud Dubois, James Hedrick, Ho-Cheol Kim, Victor Lee, Teddie Magbitang, Robert Miller, Eva Simonyi, Willi Volksen
Abstract: This invention relates to a method for production of nanoscale size quinacridones through a wet-salt attrition process by combining a crude quinacridone pigment in the presence of (i) an inorganic salt, (ii) an organic liquid in which the quinacridone pigment and salt are substantially insoluble, and (iii) a quinacridone derivative in an amount less than 10 wt. % relative to the quinacridone pigment; discharging the ground quinacridone pigment into water; adding an acid to produce a solution pH of 1.5 or lower; and isolating the quinacridone pigment.