Abstract: An improved optical direction of arrival sensor in which incoming radiation passes through a cylindrical lens placed through a top mask and is focused in the gap between the lens and a detector array concentric about the back of the lens. The focal line then expands and falls on the detector array which embodies an encoding scheme. The output from the encoded detector is then processed to determine the angle of incidence of the incoming radiation with the top mask.

Abstract: An alignment apparatus wherein a wafer having a wafer target thereon and a reticle having a reticle target therethrough are aligned to each other. An alignment image is formed on the wafer, and the wafer and reticle are scanned relative to the alignment image. The alignment image has a linear extent normal to the scanning direction which is longer than the wafer target so that a portion of the alignment image is reflected by the wafer. The portion of the alignment image reflected by the wafer is reimaged onto the reticle target. Collecting optics are provided to collect light from the alignment image that is backscattered by the wafer target as the wafer target is scanned past the alignment image. Two detectors are provided: one to detect the backscattered light, the other to detect light which passes through the reticle target. The output from each of the detectors is compared to determine any misalignment.

Abstract: The present invention is directed, in an X-ray lithographic system characterized by a plurality of work stations, a cartridge, apparatus for mounting a wafer and a mask on the cartridge, a system for moving the cartridge between stations, apparatus in each of the stations for moving the cartridge to a kinematic mount, said kinematic mounts in all of said stations being substantially identical, to the improvement comprising: a bistable foot operable in a first linear elevational mode and in a second angular compliance mode.

Abstract: The present invention is directed to apparatus for detecting defocus which is particularly adapted, among other possible uses, for use with microlithography projection systems; said apparatus being characterized by a reticle, a source of illumination for illuminating said reticle, a beam splitter, a projection lens system, a wafer mounted in a primary image plane of the projection lens system, said beam splitter and projection lens system being arranged to project an image of the reticle on the wafer, a mask complementary to the reticle mounted in a secondary image plane, said beam splitter and said projection lens system being arranged to reimage light reflected from the wafer onto the complementary mask, and detector means mounted to collect light transmitted by the complementary mask.

Abstract: The present invention is directed to a new and improved X-ray mask ring assembly and apparatus for making same which includes a mask ring, a plurality of kinematic mounts for removably mounting the mask on an alignment cartridge, each of the kinematic mounts including an insert member having a funnel-like shaped seat for receiving a mating ball-like shaped member mounted on the alignment cartridge, and an adhesive for mounting the insert member on the mask ring.

Abstract: The present invention is directed to method and apparatus for determining the resolution and range of the mask and wafer stages and the overall accuracy in a lithographic projection system, the system including first indicia disposed on a first member, second indicia disposed on a second member, the spacing between the indicia when the indicia of the first member is projected onto the indicia of the other member coarsely indicating the degree of misalignment between the members when making a fine motion alignment measurement, a first scale disposed on the first member, a second scale disposed on the second member, each of the scales having a plurality of spaced fingers, all of the fingers being of substantially the same width, the pitch of the fingers of one scale being different than the pitch of the fingers on the other scale so that when the scale of one member is projected onto the scale of the other member the pair of fingers which coincide indicates a fine degree of fine motion alignment measurement fro

Abstract: The present invention is directed to an improved method and apparatus for detecting defects in photomasks containing features with different arbitrary orientations, said apparatus including in one form therof a detector for detecting orientations of the features so that the optical signals from the features may be suppressed by suitable apparatus such as spatial filtering. The spatial filtering is adjusted electronically based on the determined orientation of the mask features. In one form of the invention the spatial filtering is effected by accepting photodetected signals from only a selected number of photodetectors in a photodetector array, the selection being determined by the orientation of the mask features.

Abstract: The present invention is directed to a method of manufacturing low thermal expansion modified cordierite compositions which are especially useful in the manufacture of mirrors for high temperature applications, said method comprising the steps of: providing, on a molecular basis, a mixture of about 2 moles magnesium oxide, 2 moles aluminum oxide, and about 5 moles divided between silicon dioxide and germanium oxide; blending said materials; milling the mixture until finely divided and thoroughly mixed; forming said mixture into a desired shape; gradually heating the shape to a temperature at which reactive sintering occurs and a cordierite type structure is formed; gradually cooling the structure; and hot compacting the structure to consolidate the sintered body to very nearly 100 percent of theoretical density.

Abstract: The present invention is directed to a lens assembly which includes a lens element having a front face and a back face and a peripheral edge; a lens cell having an axial bore and a radially inwardly extending lens seat, the lens seat having a radially seating surface for engaging one of the lens faces, the peripheral edge of the lens element being radially spaced from the inner wall of the lens cell; a retainer ring mounted removably, adjustably, rigidly in the seating surface substantially equal to the thickness of the element, the retaining ring having a plurality of radially inwardly directed fingers which are disposed closely adjacent the other of the lens faces; and an adhesive disposed axially between the retainer ring fingers and the other lens face for tying the lens to the retainer after alignment of the lens whereby the lens and the retainer ring are removable from the lens cell as a single integral unit.

Abstract: The present invention is directed to a new and improved active translation sensor which includes a first member having a fixed transmission grating, a second member having a movable linear array of light-emitting diodes disposed juxtaposition relationship with respect to one side of the fixed transmission grating, the second member being movable with respect to the other, electrical circuitry is being provided for successively applying electrical energy to each of the light-emitting diodes in a cyclical manner, a photodetector disposed on the other side of the fixed transmission on grating for detecting light transmitted through the grating, a phase detector for receiving a first signal corresponding to the phase of the circuitry for successively applying the electrical energy to the light-emitting diodes and second signal corresponding to the light detected by the photodetector and outputting a signal corresponding to the phase difference between the two signals, thereby indicating the relative linear positi

Abstract: A system for measuring the relative orientation between two objects. A transmitter/receiver assembly on one of the objects transmits a beam of monochromatic light to a Ronchi-type retro-grating disposed on the other object. The grating reflects the light back to one or more charge transfer device area arrays in the transmitter/receiver assembly which provides orientation data to a computer which determines relative pitch, yaw and roll between the two objects.

Abstract: The present invention is directed to a rotating anode x-ray source assembly which is particularly adapted for effecting high x-ray emission from a conventional x-ray source for use in replicating VLSI circuits, and comprises a rotatable anode target ring, cooling water flow channels dispose adjacent the target ring for cooling the target ring during operation, an E-beam directed to a spot on the target ring towards the periphery thereof, the cooling water flow channel being constructed and arranged so that on a transverse plane with respect to the axis of rotation all diametrically opposed points on any diameter have the same cooling water density, thereby dynamically balancing the anode under all thermal conditions.

Abstract: A method for tensioning a thin film on a support ring to achieve an optically flat membrane. The support ring is optically flat with a slight bevel at its outside edge where the membrane is epoxied to the support ring.

Abstract: An optical sensor comprises a device for monitoring the angular motion of a remote body about three orthogonal axes from a single observation point. A compact totally passive target is adapted to be attached to the body, the angular motion of which is to be sensed. The target reflects light beams representing pitch, yaw and roll measurement functions. The reflected light beams are optically sensed and reduced to components about the pitch, yaw and roll axes which are visually displayed through a single eyepiece.