Abstract: Chemical mechanical planarization or spin etch planarization of surfaces of copper, tantalum and tantalum nitride is accomplished by means of the chemical formulations of the present invention. The chemical formulations may optionally include abrasive particles and which may be chemically reactive or inert. Contact or non-contact CMP may be performed with the present chemical formulations. Substantially 1:1 removal rate selectivity for Cu and Ta/TaN is achieved.

Abstract: An oxidizing slurry for removal of low dielectric constant materials. The slurry is formed utilizing non-oxidizing particles with a separate oxidizing agent, oxidizing particles alone or reducible abrasive particles with a compatible oxidizing agent. The particles can be formed of a metal oxide, nitride, or carbide material, by itself or mixtures thereof, or can be coated on a core material such as silicon dioxide or can be coformed therewith. A preferred oxidizing slurry is multi-modal in particle size distribution. Although developed for utilization in CMP semiconductor processing the oxidizing slurry of the present invention also can be utilized for other high precision polishing processes.

Abstract: Methods and apparatus for increasing the yield achieved during high density interconnect (HDI) production. In particular, processes in which panels are tested to identify good cells/parts, good cells are removed from the panels, and new panels created entirely of identified/known good cells allow increases in the number of layers used in a HDI without incurring the decrease in yield normally associated with such a layering process.

Abstract: An absorbing ether-like compound including a siliconethoxy, silicondiethoxy, or silicontriethoxy species attached to a naphthalene or anthracene chromophore via an oxygen linkage is used as an organic light-absorbing compound. The absorbing ether-like compound is incorporated into spin-on glass materials to provide anti-reflective coating materials for deep ultraviolet photolithography. A method of synthesizing the light-absorbing ether compounds is based on the reaction of an alcohol-substituted chromophore with an acetoxysilicon compound in the presence of alcohol. A method of making absorbing spin-on-glass materials including the absorbing ether-like compounds is also provided.

Abstract: An electronic component contemplated comprises a) a substrate layer, b) a dielectric layer coupled to the substrate layer, c) a barrier layer coupled to the dielectric layer, d) a conductive layer coupled to the barrier layer, and e) a protective layer coupled to the conductive layer. The electronic component contemplated herein can be produced by a) providing a substrate; b) coupling a dielectric layer to the substrate; c) coupling a barrier layer to the dielectric layer; d) coupling a conductive layer to the barrier layer; and e) coupling a protective layer to the conductive layer. The protective layer may then be cured to a desirable hardness.

Abstract: Disclosed is a metal-clad laminate product having a carrier film, a aqueous soluble release or parting layer deposited onto the carrier film and which can be mechanically separated from the carrier film, and an ultra thin metal layer deposited onto the parting layer. Also disclosed is a method for making the metal-clad laminate product.

Abstract: A method and apparatus is described for performing a liposuction procedure by means of a power-assisted liposuction device. The apparatus comprises a hand-holdable handle assembly (enclosing a gas driven reciprocating piston rod), a detachable cannula, an aspirator pump attached to the hand-holdable handle assembly and a foot pedal assembly that includes a vibrator element for regulating the supply of gas to the hand-holdable handle assembly. The hand-holdable handle assembly generally consists of a barrel, a hollow piston rod which reciprocates relative to the barrel, a seal body, an end cap (having a internal aspirated chamber), an atmospheric access return gallery, and a return spring chamber. Detachably coupled to the hand-holdable handle assembly by means of a quick disconnect is a hollow cannula, the distal end of which contains an aspiration aperture.

Abstract: The present invention relates to vacuum systems and more particularly, to systems for cleaning up waste materials and/or recovering materials which might otherwise be considered waste, particularly in industrial uses. The instant invention includes a means for creating and applying a vacuum to a localized area, means for collecting materials and a pair of annular rings connected by a spacer means arranged so as to prohibit retained materials from entering the vacuum creation means and means for minimizing the amount of ambient noise disturbance including a sound dampening sleeve member and a helical spring member fitted within said sleeve. Additional embodiments of the present invention include mounting the vacuum means on a frame having articulated wheels thereon and a frame arranged to allow the collection means to be dumped.