Patents Represented by Attorney, Agent or Law Firm Robert Mall
  • Patent number: 6302662
    Abstract: The present invention provides systems and methods of dispensing liquids. In one embodiment, the system includes a pump with a removable pump module with at least one displacement piston and at least one piston valve. A motor and base assembly provides the supporting components of the pump, which can be used in environments where precise small volumes of ultra-pure liquids must be transferred from a reservoir to a point of use. The preferred embodiment of the system prevents contaminants and air bubbles from being introduced into the liquid to be dispensed by placing a filter across the discharge line downstream from the pump, and providing a separate drawback line for performing the drawback of the liquid in the dispensing nozzle.
    Type: Grant
    Filed: March 9, 2000
    Date of Patent: October 16, 2001
    Assignees: Ivek Corporation, Silicon Valley Group, Inc.
    Inventors: Douglas S. Bensley, John E. Barney, Frank Dimaggio, Mark Tanny