Abstract: The present invention involves a method for generating a photoresist image on a substrate. The method comprises coating a substrate with a film comprising a polymer comprising fluorocarbinol monomers; imagewise exposing the film to radiation; heating the film to a temperature of, at, or below about 90° C. and developing the image. The present invention also relates to a method for generating a photoresist image on a substrate where a polymer comprising fluorocarbinol monomers is used as a protective top coat.
Type:
Grant
Filed:
July 28, 2006
Date of Patent:
August 24, 2010
Assignee:
International Business Machines Corporation
Inventors:
Gregory Breyta, Daniel Paul Sanders, Hoa D. Truong
Abstract: An apparatus and method for a low power consuming disk drive unit comprising multiple HDD subsystems having spindles and associated disk platter(s) supported thereon, read-write heads and actuators for positioning the read-write heads. The disk platter(s) of each HDD subsystem may differ in diameter, rate of rotation and formatting. The method by which the disk drive unit operates to reduce the power requirements of the disk drive unit is to have the controller selectively power the smaller/more efficient HDD subsystem the majority of the time to store frequently accessed information and not to power the multiple larger/less efficient HDD subsystems that store the less frequently accessed information, thereby achieving reduced power needs for the disk drive unit.
Type:
Grant
Filed:
July 11, 2000
Date of Patent:
September 30, 2003
Assignee:
International Business Machines Corporation