Abstract: A semiconductor manufacturing method is disclosed, which includes the steps of: forming an interconnect layer, which may include aluminum, on a semiconductor substrate; forming an anti-reflective coating which may comprise titanium; forming a spin on glass layer; selectively etching portions of the spin on glass layer, so that predetermined portions of the interconnect layer are exposed; and applying an EKC solution to predetermined portions of the interconnect layer that are exposed. The semiconductor manufacturing may also include the steps of forming a first tetra-ethyl-ortho-silicate layer, before the step of forming a spin on glass layer; and forming a second tetra-ethyl-ortho-silicate layer, following the step of applying an EKC solution. The EKC solution in the preferred embodiment is applied for at least about a 10 minute process time. Furthermore, the semiconductor manufacturing method may include the step of forming a second interconnect layer.

Abstract: An alignment fixture that may be used to align the components of a wafer etching machine. The fixture includes a base supporting at least one first alignment guide and a plurality of second alignment guides. The components to be aligned using the fixture may include inner and outer concentric rings. The outer ring may include one or more first position locator guides that are matched with the first alignment guide to establish a known positional relationship with the base. The inner ring may include one or more second position locator guides that are matched simultaneously with one or more first position locator guides and the second alignment guides to establish a known positional relationship between the outer ring and the inner ring. The outer and inner ring may be secured together in the established positional relationship using a conventional fastening means known in the art.

Abstract: A baby holding pen or crib includes automatic position adjusting, monitoring, and interactive communication means, including alarms, for communicating information to and from the crib or pen from a remote location. Such means include interactive audio and visual means, such as prerecorded messages and preprogrammed tactile simulation. The crib includes a combination of a bed surface that is adjustable in both longitudinal and lateral angles; a heating an cooling means to maintain the crib area at a comfortable temperature; speakers that play back prerecorded sounds to the baby such as a recording of a mother's soothing voice or instructions to attendants to the location of the crib; visual sensing equipment, such as video monitors, including alarms to remind an attendant of feeding time, diaper changing time, bathing time, or medicine dosage time; and a plurality of sensors, including temperature sensors, vital function sensors, and the like.