Abstract: Disclosed are methods for analyzing additive breakdown products in electroplating baths as well as methods of controlling the presence of such breakdown products in electroplating baths.
Type:
Grant
Filed:
May 31, 2000
Date of Patent:
January 21, 2003
Assignee:
Shipley Company L.L.C.
Inventors:
Luis A. Gomez, Rozalia Beica, Denis Morrissey, Eugene N. Step
Abstract: Disclosed is a stable dilute solution composition of a 3-isothiazolone compound selected from the group consisting of 5-chloro-2-methyl-3-isothiazolone, 2-methyl-3-isothiazolone, 5-chloro-2-ethyl-3-isothiazolone, 2-ethyl-3-isothiazolone, 4,5-dichloro-2-methyl-3-isothiazolone, and mixtures thereof in water having extremely low levels of copper ion and an oxidant.
Type:
Grant
Filed:
February 13, 1998
Date of Patent:
December 28, 1999
Assignee:
Rohm and Haas Company
Inventors:
Beverly Jean El A'mma, John Robert Mattox