Abstract: The present invention relates to a novel polymer suitable for use as an antireflective coating or as an additive in photoresist for absorption of reflected light. The novel polymer comprises at least one unit containing a dye that absorbs from about 180 nm to about 450 nm and at least one unit that contains no aromatic funtionality. The polymer is soluble in organic solvents, preferrably solvents of low toxicity, or it may be soluble in water, which may additionally contain other water miscible organic solvents.
Type:
Grant
Filed:
April 30, 1997
Date of Patent:
November 9, 1999
Assignee:
Clariant Finance (BVI) Limited
Inventors:
Shuji Ding, Dinesh N. Khanna, Ping-Hung Lu, Jianhui Shan, Ralph R. Dammel, Dana L. Durham, M. Dalil Rahman, Iain McCulloch