Patents Represented by Attorney, Agent or Law Firm Skjerven Morrill MacPheron LLP
  • Patent number: 6329062
    Abstract: A two-component porous material including small silicalite crystals in a porous binder provides a low dielectric constant material useful as an insulating layer in microelectronic devices. The silicalite/binder porous material uses silicalite nanocrystals smaller than the characteristic dimensions of the features on the integrated circuit device. The binder is an amorphous porous material that links the silicalite nanocrystals together, formed from a precursor which polymerizes on heating. The silicalite nanocrystals are supplied as a colloidal suspension or slurry. The slurry and binder precursor are spincoated onto a substrate and thermally treated to polymerize the binder precursor and drive off solvent in the slurry, forming the porous silicalite/binder material. The silicalite/binder porous material is readily integrated into standard damascene fabrication processes.
    Type: Grant
    Filed: February 29, 2000
    Date of Patent: December 11, 2001
    Assignee: Novellus Systems, Inc.
    Inventor: Justin F. Gaynor