Abstract: A printed circuit board is designed to conform to a single in-line memory module (SIMM) configuration, but includes multiple rows of the memory devices. By controlling a sequence of enable signals, selection of a single row from the multiple row of memory devices can be accomplished. The ability to address the different rows multiplies the memory capacity of the board by the number of rows of memory devices.

Abstract: An R-F electrode apparatus is provided featuring self-adjusting, spring biased electrodes, removably attached to a removable substrate holder, within a chamber used for plasma reactive treatment processes, particularly those involving semiconductor wafers. The apparatus further features base electrodes shaped and supported to insure uniform transmission of electrical energy during operation. The apparatus also provides an automatic means for wiping, self-cleaning action between the contact surfaces of opposing electrodes during introduction and removal of the substrate holder from the reaction chamber. The base electrodes are removably attached to standard electrical feedthroughs located in the reaction chamber wall, which lead to an external R-F power supply.

Abstract: A fluid level sensor is provided in a fluid dispensing system, primarily in a photoresist dispensing system used in a semiconductor manufacturing process. A bubble is introduced into the fluid shortly before fluid supply is emptied, said bubble being used to detect a low fluid level. The invention uses a snap-on combination cap and pickup tube, the pickup tube having a small hole near its lower tip, and the cap containing an optical bubble detector.

Abstract: Apparatus to enclose a resistivity probe, to be used with a semiconductor wafer washer. Said apparatus is detachable and easy to maintain; is made of readily available and inexpensive plumbing parts; substantially encloses said probe, reducing contamination; allows nitrogen purge of said probe, keeping it clean; fully submerges said probe in discharge fluid, improving measurement accuracy; and is compact enough to allow washers to be triple stacked.

Abstract: A semiconductor memory device such as a dymanic random access memory (DRAM) is formed by first forming a burried contact in a silicon wafer and patterning a series of transistors. After the transistors are patterned, oxide layers are applied and the transistors are etched. Cell bottom plates are then formed and electrical connections between the transistors and a periphery are established. The establishment of the transistors are to forming the cell bottom plates and its more efficient manufacture of the DRAM devices and increases manufacturing yield.

Abstract: A low-profile, folded-plate, dynamic random access memory (DRAM) cell capacitor which can be fabicated with only two photoresist masks using equipment and processes identical to those used for the fabrication of DRAM cells having planar capacitors. The n+ silicon substrate, which is an extension of the cell's field-effect transistor drain, functions as the lower half of the capacitor's storage-node plate. The capacitor's field plate is comprised of a doped polycrystalline silicon-2 (poly-2) layer. The field plate is insulated on its lower surface from the n+ silicon substrate by a first dielectric layer of silicon nitride; it is insulated on its edges with a silicon oxide dielectric and on its upper surface with a second dielectric layer of silicon nitride from the upper half of the storage-node plate, which is comprised of a sandwich of n-type poly-3 and poly-4 layers. The upper half of the storage-node plate is tied to the n+ silicon substrate with a buried contact which is an extension of the poly-4-layer.

Abstract: A plasma dry etch chamber is provided with an anode plate which has a cooling jacket which extends radially outwardly from a cooling core to an extent corresponding to the radial dimension of a silicon wafer work product. In order to further reduce deposit formation, the outer perimeter of the anode is designed to reduce the effects of polymer deposition.

Abstract: A CMOS transistor is fasbricated by forming the n-wells with both phosphorus and arsenic implants. The arsenic, with its lower diffusion coefficient, tends to concentrate near the top surface of the n-wells, with the phosphorus penetrating sufficiently to define the n-wells at the desired depth. A boron channel stop implant is later applied without masking over the n-wells. Since the arsenic implant is concentrated near the surface, the arsenic impurities overcome the effects of the boron impurities. Additional boron required for n-channel channel stop is provided by n-channel transistor punch-through implantation.

Abstract: A deflection drive circuit (15) for an inductive yoke (11) used with a raster scanned cathode ray tube rapidly interrupts current then reverses voltage applied to the yoke (11) during flyback. MOSFETs (Q32, Q47) are used to control current flow to the yoke. The current is interrupted by one MOSFET (Q32) being gated "OFF", after which current is permitted to flow to a capacitor (C51). At a preselected time, a second MOSFET (Q47) is gated on to admit reverse flow of current from the capacitor (C51) to the yoke (11). The second MOSFET (Q47) is gated "ON" by a circuit which includes a third MOSFET (Q57) and a pulse transformer (T59).Advantages include an ability to rapidly effect flyback without interfering with the forward scanning ability of the deflection drive circuit 15.

Abstract: A fail-safe solenoid switching mechanism (11) uses a reciprocating switch (15) to establish make-or-break connections. In order to increase the effective life of shorting bars on the switch, the switch's reciprocating part 23 is rotated by a ratcheting mechanism each time the switch (15) is cycled.Advantages include enhanced reliability, even when the switching mechanism (11) sees extended quiescant periods between operations.

Abstract: A stress limiter apparatus for a gas turbine engine (10) is disclosed. A proportional fuel fuel control (11) regulates the fuel flow (Wf) from a hydromechanical unit (36) based upon an error signal (E) representing the difference between a demanded speed signal (Nd) and an actual speed signal (N1). The demanded speed signal (Nd) is generated by an integrator (32) as the time integral of one of the acceleration terms (A1, A2, A3) selected by gate 38. The demanded acceleration term (A1) is generated by junction (26) as the difference between the demanded signal (Nd) and a scheduled speed signal (Ngs). The acceleration terms (A2, A3) are generated by junctions (44, 46) and scheduling means (40, 42) which form stress limiter circuits.

Abstract: A directional filter is constructed with a plurality of grooves (15) extending into a plate (13) from one side (16) thereof. The grooves (15) have a light absorbing characteristic which causes them to absorb light impinging upon the grooves, particularly light impinging upon the grooves (15) from within the plate (13). Since all light passing beyond a certain angle .phi. must impinge upon the grooves (13), and only a small percentage of light passing parallel to the cut of the grooves (15) would impinge upon the grooves (15), the filter has a high ratio of attenuation of unwanted versus wanted light.

Abstract: A guided projectile (11) is provided with a gyroscope (29) having a spherical rotor (41). The rotor (41) is supported at its outer spherical surface by a stator (42) using fluid bearing techniques. The stator (42) is fixed to the projectile's housing (38) so that the gyroscope (29) is operated in a strapdown mode.The structure of the gyroscope (29) and particularly the stator (42) places very little material along its center axis of the projectile (11). This is particularly useful where the projectile's warhead (17) functions by squirting a stream (25) of metal through a target's armor, and any material in the way of the stream (25) would tend to diminish the lethality of the projectile (11). The spherical configuration of the rotor (41) and the use of the stator (42) as a support bearing also provides a method of supporting the rotor (41) during conditions of high acceleration which are experienced in cannon launch of the projectile (11). Other advantages include light weight, low cost and high reliability.

Abstract: A method and apparatus for acceleration limiting a gas turbine engine (10) is disclosed. A proportional fuel control (11) regulates the fuel flow Wf from a hydromechanical unit (36) based upon an error signal E representing the difference between a demanded speed signal Nd and an actual speed signal Ng. The demanded speed signal Nd is generated by an integrator (32) as the time integral of the difference between the demanded signal Nd and a scheduled speed signal Ngs. Additionally, the difference signal is limited between an upper limit A1 and a lower limit D1 prior to the integration by a comparator (28) and a limiter circuit (30). The acceleration limit, A1 is generated as a function of a nondimensional parameter ratio (dN/dt.times.N)/Wf.

Abstract: A vibration and noise isolating coupling (11) for a rotating drive train uses a plurality of vibration and noise isolating modules (17) which are arranged circumferentially about the coupling (11) in two rows (21, 22). Each module consists of a plurality of rubber sheets separated by laminations. A pair of drive discs (13, 14) sandwich the modules (17), and a driven disc (15) is located between the two rows (21, 22) of the module (17). Force transmitted from the drive discs (13, 14) is transmitted through the driven disc (15) via the modules 17. The drive discs (13, 14) are compressed toward one another, thereby compressing the module (17) and consequently the rubber sheets within the module (17).The arrangement provides the advantage of resiliently transferring rotating force to rubber components while maintaining the rubber in a compressed state and maintaining a power-transfer capability even if the rubber components are fully deteriorated.

Abstract: A flexible coupling (11) is formed with a toroidal diaphragm (21-22) as its flexible member. A pair of half-toroids (21-22) are fixed to inner rings (25, 26) and outer rings (27, 28) in order to effect connections. The inner rings (25, 26) are connected, respectively, to drive shaft sections (13, 14). The outer rings (27, 28) are used to connect the half-toroids (21-22) to each other. Torque from one of the drive shaft sections (13) is passed through one of the inner rings (23), through one of the diaphragms (21) through the outer rings (27 and 28) to the other diaphragms (22), the other inner ring (26) and to the other drive shaft section (14). Advantages include increased flexibility of a flexible coupling of a type which uses no bearing parts.

Abstract: A propeller brake for an engine having a propeller shaft includes a housing (10) and a brake shaft (18) rotatably mounted in the housing (10). The brake shaft (18) is coupled to the propeller shaft to rotate therewith. Also included is a brake (64,74) and a lock device (38). The brake (64,74) is mounted in the housing (10) and has a spaced plurality of frictional plates (64) for frictionally resisting rotation of the brake shaft (18). This brake (64,74) is reciprocatable between an operative and an inoperative position. The lock device (38) is mounted in the housing (10) and can reciprocate between an unlocked and locked position. This lock device (38) can, in its locked position, inhibit rotation of the brake shaft (18). The forgoing equipment can stop a propeller shaft by first frictionally coupling the brake (64,74) to the propeller shaft, allowing the coupled portion of the brake (64,74) to rotate therewith. The brake (64,74) may then be actuated to transmit a resisting torque to stop the propeller shaft.