Patents Represented by Attorney Stanely N. Protigal

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  • Thermal control of concentric tube liquid source gas lines
    Patent number: 5343937
    Abstract: A double containment liquid source gas line uses an outer annular chamber which functions as a safety containment housing and a thermal control liner. The thermal control is accomplished by providing hot water and pumping the water in a closed loop configuration. The water serves to accurately and reliably control temperature of liquid source gas in the gas line. The water is in a closed loop system, so that, by providing leak detection equipment on the water line, faults in either chamber may be rapidly detected.
    Type: Grant
    Filed: March 24, 1992
    Date of Patent: September 6, 1994
    Assignee: Micron Technology, Inc.
    Inventor: Timothy D. Gross