Abstract: A vibration isolator (200) for isolating a first assembly (202) from vibration from a second assembly (204) includes a housing (206) that is secured to the second assembly (204) and a pendulum assembly (208). The pendulum assembly (208) includes one or more pistons (226) and a connector assembly (224). The piston (226) is coupled to the first assembly (202). The connector assembly (224) couples the piston (226) to the housing (206) and allows the piston (226) to swing laterally relative to the housing (206). The vibration isolator (200) can also include a pendulum support (264) and/or a mover (580) that moves the piston (226) and assists in supporting the load of the first assembly (202).

Abstract: A method for determining the flow of a fluid (60) in a gap (64) between a pad (48) and a substrate (12) includes the step of utilizing a hybrid Navier-Stokes/lubrication formulation to calculate the flow of the fluid (60) in the gap (64) at a plurality of time steps. The gap (64) can be divided into a plurality of elements (700). The hybrid Navier-Stokes/lubrication formulation can be used to calculate the fluid flow and the pressure of the fluid (60) at each element (700) at the plurality of time steps. Additionally, a method for tracking and estimating the composition of the fluid (60) at various locations in the gap (64) and a material removal rate model that attempts to account for the effects of the fluid flow in the gap (64), the hydrostatic pressure in the gap (64) and the composition of the fluid (60) in the gap (64) are provided herein.

Abstract: A portable power source (10) includes a housing (12), a stator component (20), a rotor component (18), a crank assembly (14), and a control system (24). The stator component (20) is secured to the housing (12), the rotor component (18) rotates relative to the stator component (20) and the crank assembly (14) is coupled to the rotor component (18). The crank assembly (14) is rotated by the user relative to the housing (12). As provided herein, rotation of the crank assembly (14) by the user results in rotation of the rotor component (18) relative to the stator component (20). In one embodiment, the control system (24) controls the amount of torque required to rotate the crank assembly (14). For example, the amount of torque required to rotate the crank assembly (14) is varied according to the rotational position of the crank assembly (14).

Abstract: A portable power source (10) includes a housing (12), a stator component (20), a rotor component (18), a crank assembly (14), and a control system (24). The stator component (20) is secured to the housing (12), the rotor component (18) rotates relative to the stator component (20) and the crank assembly (14) is coupled to the rotor component (18). The crank assembly (14) is rotated by the user relative to the housing (12). As provided herein, rotation of the crank assembly (14) by the user results in rotation of the rotor component (18) relative to the stator component (20). In one embodiment, the control system (24) controls the amount of torque required to rotate the crank assembly (14). For example, the amount of torque required to rotate the crank assembly (14) is varied according to the rotational position of the crank assembly (14).

Abstract: A stage assembly (10) for independently moving and positioning a first device (26A) and a second device (26A) in an operation area (25) is provided herein. The stage assembly (10) includes a stage base (12), a first stage (14), a first mover assembly (15), a second stage (16), and a second mover assembly (18). The first mover assembly (15) moves the first stage (14) and the first device (26A) into the operational area (25) and the second mover assembly (18) moves the second stage (16) and the second device (26B) into the operational area (25). The present stage assembly (10) reduces and minimizes the amount of reaction forces and disturbances that are transferred between the stages (14), (16). This improves the positioning performance of the stage assembly (10). Further, for an exposure apparatus (30), this allows for more accurate positioning of two semiconductor wafers (28) relative to a reticle (32) or some other reference.

Abstract: A disk drive includes a head stack assembly having a storage disk, a data transducer, an actuator pivot center and a positioner. The positioner includes a magnet assembly, a primary coil array that generates a first rotational displacement of the data transducer, and a secondary coil array that generates a second rotational displacement of the data transducer. The absolute value of the ratio of the first rotational displacement to the second rotational displacement is at least approximately 1.5:1. The primary coil array generates a first vibration displacement that causes the data transducer to move off track, and the secondary coil array generates a second vibration displacement that is out of phase from the first vibration displacement. The absolute value of the sum of the first and second vibration displacements is less than the absolute value of the first vibration displacement.

Abstract: A mover assembly (16) that moves or positions an object (12) includes a mover output (226), an actuator (230), and a measurement system (20). The mover output (226) is connected to the object (12), and the actuator (230) causes the mover output (226) to rotate about a first axis and move along the first axis. In this embodiment, the measurement system (20) directly measures the movement of the mover output (226) and provides feedback regarding the position of the mover output (226).

Abstract: A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20).

Abstract: A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) from deformation. In some embodiments, the stage assembly (10) allows precise rotation of the device (26) between a first position (42) and a second position (44) without influencing the flatness of the device (26) and without deflecting and distorting the device (26). For example, the stage assembly (10) can include a carrier (60) and a holder connector assembly (62). The carrier (60) is supported above the device table (20) and rotates relative to the device table (20). The holder connector assembly (62) connects the device holder (24) to the carrier (60). Further, the stage assembly (10) can include a holder mover (120) that rotates the device holder (24) relative to the device table (20).

Abstract: A linear electric motor (10) including a magnet component (12), a conductor component (14) that interacts with the magnet component (12) and a control system (15) for directing current to the conductor component (14) is provided herein. Uniquely, the conductor component (14) minimizes the total stray magnetic fields generated by the conductor component (14), without significantly influencing the dynamic performance of the motor (10). Because of the conductor component (14) provided herein, the motor (10) is particularly useful in manufacturing, measurement and/or inspection processes that are sensitive and/or influenced by stray AC magnetic fields. More specifically, the present invention is particularly useful with an exposure apparatus (18) that utilizes an illumination system (24) that generates a charged particle beam, such as an electron beam.

Abstract: An actuator assembly (432) for positioning a pad (48) includes a first actuator assembly (440), a second actuator subassembly (442) and a control system (524). In one embodiment, the first actuator subassembly (440) includes a first core (502), and a conductor (504) secured to the first core (502), and the second actuator subassembly (442) includes a second core (506) spaced apart a component gap (444) from the first core (502). Further, the control system (524) directs current to the conductor (504) to attract the second core (506) to the first core (502). In one embodiment, the amount of current directed to the conductor (504) is calculated without measuring the component gap (444).

Abstract: A portable power source (10) includes a housing (12), a stator component (20), a rotor component (18), a crank assembly (14), and a control system (24). The stator component (20) is secured to the housing (12), the rotor component (18) rotates relative to the stator component (20) and the crank assembly (14) is coupled to the rotor component (18). The crank assembly (14) is rotated by the user relative to the housing (12). As provided herein, rotation of the crank assembly (14) by the user results in rotation of the rotor component (18) relative to the stator component (20). In one embodiment, the control system (24) controls the amount of torque required to rotate the crank assembly (14). For example, the amount of torque required to rotate the crank assembly (14) is varied according to the rotational position of the crank assembly (14).

Abstract: An optical assembly (222) for directing and/or focusing a beam of light energy for an exposure apparatus (10) includes an optical housing (240) and one or more optical elements (242) that cooperate to form an optical cavity (270) having one or more stagnant flow areas (272). The optical assembly (222) also includes one or more flow diverters (246) for improving the flow a replacement fluid (250) in the stagnant flow areas (272) of the optical cavity (270) during purging of the optical assembly (222) with the replacement fluid (250).

Abstract: A device for preventing the rotation of a power drill attachment relative to a power drill is provided and is described in combination with a liquid sprayer. The device having a container (10) with a supply tube (12) extending downward into the container (10) and upward into a pump inlet (14) which is open to a pump (16.) The pump (16) has on the rearward side a pump seal (18) and a pump drive (20) and on the forward side a pump outlet (22) and nozzle (24). The pump has a rod (26) affixed to it by means of a rod attachment (28). The rod (26) extends rearward and includes an ergonomic rod pillow (30). Also included is a power drill (36) including a power drill trigger (32) and a power drill chuck (34). When energized the power drill (36) imparts rotational energy to the pump (16). Rotation of the pump (16) relative to the power drill (36) is prevented by the communication of the rod (26) the rod attachment (28) and the housing of the power drill (36).

Abstract: A stage assembly (10) for moving a device (26) along an X axis and a Y axis includes a stage base (12), a device table (16), a stage mover assembly (18), a measurement system (21), and a control system (22). The stage mover assembly (18) includes a pair X guide movers (82) (84) and a Y table mover (87). The measurement system (21) includes a first X system (100) and a second X system (102). The control system (22) receives the position signals from the measurement system (21) and directs current to the X movers (82) (84) to move the device table along the X axis. The control system (22) can be designed to not skip any servo cycles during switching of position signals.

Abstract: A disk drive includes a drive housing, an actuator arm mounted to the drive housing, a head suspension assembly secured to the actuator arm, a spindle secured to the drive housing, a storage disk positioned on the spindle and a spacer positioned on the spindle. The actuator arm includes a suspension mounting side and the spindle includes a disk mounting surface. A actual measured distance along a first axis between the suspension mounting side and the disk mounting surface is measured. The spacer is positioned between the disk mounting surface and the storage disk. The spacer has a spacer height along the first axis that is based upon the actual measured distance.

Abstract: A stage assembly (10) for moving and positioning a device (26) includes a guide base (12), a stage (14), a stage bearing assembly (18), a control system (22), and a Y mover (68). The stage (14) retains the device (26). The stage bearing assembly (18) supports the stage (14) spaced apart from the guide base (12). More specifically, the stage bearing assembly (18) generates an electrostatic force that urges the stage (14) towards the guide base (12). The housing mover (68) moves the stage (14) relative to the guide base (12). The Y mover (68) includes a plurality of magnets and a conductor. The magnets have a magnet length (86) and the conductors have a conductor length (88). Preferably, the magnet length (86) is at least as long as the conductor length (88) plus an X stroke (87) of the stage assembly (10). This design allows the Y mover (68) to provide a force along the Y axis over the range of the positions of the Y mover (68).

Abstract: A magnetic shunt assembly (12) for an exposure apparatus (10) includes a magnetic shunt assembly (12). The apparatus (10) includes an optical assembly (24)(26), a stage (44), a first mover assembly (16) that moves the stage (44) in a first gap (37). The first mover assembly (16) is surrounded by a magnetic field. The magnetic shunt assembly (12) is positioned near the optical assembly (24)(26) approximately between the optical assembly (24)(26) and the mover assembly (16). The magnetic shunt assembly (12) is made of a material having a relatively high magnetic permeability. The magnetic shunt assembly (12) can provide a low magnetic reluctance path that redirects at least a portion of the magnetic field from the first mover assembly (16) away from the gap (37).

Abstract: A tape drive (10) for use with a cartridge (24) having a storage tape (30) that moves along a tape path (32) includes a drive housing (12) defining a drive interior (62), a circuit assembly (42) that generates heat, and a thermal insulator (44). In one embodiment, the thermal insulator (44) is positioned between a portion of the storage tape (30) and the circuit assembly (42). The thermal insulator (44) can be formed from a flexible, plastic material and/or can have a thermal conductivity of less than approximately 50 W/mK to decrease the transfer of heat between the circuit assembly (42) and the storage tape (30). The drive interior (62) can have a first region (64) that includes a portion of the tape path (32), and a second region (66) that includes the circuit assembly (42).

Abstract: A disk drive includes a drive housing, one or more rotating storage disks, each having a storage surface, and a fluid diffuser. The fluid diffuser includes one or more stationary diffuser wings, each having a wing surface positioned near the storage surface. One or more of the diffuser wings can extend between two of the storage disks. The diffuser wing includes a surface deviation that disrupts the fluid flow over the wing surface that is caused by the rotating storage disk. The surface deviation can include an indentation in the wing surface or can extend from the wing surface toward the storage surface. In still another embodiment, the surface deviation includes an aperture that extends through the diffuser wing. Further, the fluid diffuser can include a plurality of surface deviations that are positioned along the wing surface. Further, a portion of the surface deviation can form an angle with the wing surface that is greater than approximately 0 degrees and less than approximately 180 degrees.