Patents Represented by Attorney Technology & Innovation Law Group, PC.

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  • Liquid cooled mirror for use in extreme ultraviolet lithography
    Patent number: 7591561
    Abstract: Methods and apparatus for internally or directly cooling a mirror using a fluid with laminar flow properties are disclosed. According to one aspect of the present invention, an internally cooled mirror includes an optical surface that absorbs light, and at least one microchannel formed beneath the optical surface. The mirror also includes a port that supplied a fluid to the microchannel. The fluid is subjected to a laminar flow and absorbs heat associated with the absorbed light.
    Type: Grant
    Filed: May 9, 2006
    Date of Patent: September 22, 2009
    Assignee: Nikon Corporation
    Inventors: Alton H. Phillips, Derek Coon, Douglas C. Watson
  • Method and system for testing websites
    Patent number: 7231606
    Abstract: A method and system is provided for testing and analyzing websites via a test-enabled web browser. In the representative embodiment a user controls a test-enabled web browser via a set of pull-down menus, thereby choosing between alternative testing and analysis functional capabilities, selecting files in which to store recordings (scripts), choosing files into which to place test results and messages, and setting various parameters that affect how the testing and analysis functions are performed.
    Type: Grant
    Filed: October 31, 2001
    Date of Patent: June 12, 2007
    Assignee: Software Research, Inc.
    Inventors: Edward F Miller, Rita Bral