Patents Represented by Attorney, Agent or Law Firm Thomas W. Coie
  • Method and apparatus for rejuvenating polishing slurry
    Patent number: 6527969
    Abstract: A method for rejuvenating a polishing slurry that has been used for a chemical-mechanical polishing process includes the steps of: recovering the polishing slurry; and re-dispersing abrasive grains contained in the polishing slurry recovered. Specifically, the abrasive grains may be re-dispersed by adding a dispersant or applying an electromagnetic field or ultrasonic radiation to the polishing slurry recovered.
    Type: Grant
    Filed: April 19, 2000
    Date of Patent: March 4, 2003
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Akihiro Tanoue, Yutaka Matsuzawa, Koji Shimizu